The effects of aluminium composition on the mechanical properties of reactivity sputtered TiAlN films
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OpenAlex topics: Metal and Thin Film Mechanics · GaN-based semiconductor devices and materials · Advanced ceramic materials synthesis
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References (30)
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1. O. Knotek and T. Leyendecker, J. Solid State Chem. 70 (1987) 318.10.1016/0022-4596(87)90071-5 ↗
2. Wolf-Dieter Munz, J. Vac. Sci. Technol. A4 (1986) 2717.10.1116/1.573713 ↗
3. W. Konig, R. Fritsch and D. Kammermeier, Surf. Coatings Technol. 49 (1991) 316.10.1016/0257-8972(91)90076-9 ↗
4. R. Komanduri and J. D. Desai, Carbide Tool J. January/February, Vol. 16 (1984) 3.
5. O. Knotek, W. D. Munz and T. Leyendecker, J. Vac. Sci. Technol. A5 (1987) 2173.10.1116/1.574948 ↗
6. T. Leyendecker, O. Lemmer, S. Esser and J. Ebberink, Surf. Coatings Technol. 48 (1991) 175.10.1016/0257-8972(91)90142-J ↗
7. G. Hakansson, J.-E. Sundgren, D. Mcintyre, J. E. Greene and W.-D. Munz, Thin Solid Films, 153 (1987) 55.10.1016/0040-6090(87)90169-6 ↗
8. H. A. Jehn, S. Hofmann, V.-E. Ruckborn and W.-D. Munz, J. Vac. Sci. Technol. A4 (1986) 2701.10.1116/1.573709 ↗
9. D. Mcintyre, J. E. Greene, G. Hakansson, J.-E. Sundgren and W.-D. Munz, J. Appl. Phys. 67 (1990) 1542.10.1063/1.345664 ↗
10. H. Freller and H. Haessler, Thin Solid Films 153 (1987) 67.10.1016/0040-6090(87)90170-2 ↗
11. J. R. Roos, J. P. Celis, E. Vancoille, H. Veltrop, S. Boelens, F. Jungblut, J. Ebberink and H. Homberg, Thin Solid Films 193/194 (1990) 547.10.1016/S0040-6090(05)80064-1 ↗
12. B. Y. Shew and J. L. Huang, Surf. Coatings Technol. 71 (1995) 30.10.1016/0257-8972(94)02300-F ↗
13. B. Y. Shew, J. L. Huang and D. F. Lii, Thin Solid Films 293 (1997) 212–219.10.1016/S0040-6090(96)09038-4 ↗
14. B. Y. Shew, J. L. Huang and D. F. Lii, J. Mater. Chem. Phys. (1997) submitted.
15. B. Y. Shew and J. L. Huang, Surf. Coatings Technol. 73 (1995) 66.10.1016/0257-8972(94)02360-3 ↗
16. P. K. Mehrotra and D. T. Quinto, J. Vac. Sci. Technol. A, 3 (1985) 2401.10.1116/1.572846 ↗
17. J. Gary Baldoni and S. T. Buljan, Ceram. Bull. 67(2) (1988) 381–387.
18. J. Musil, S. Kadlec, J. Vyskocil and V. Valvoda, Thin Solid Films 167 (1988) 107.10.1016/0040-6090(88)90487-7 ↗
19. V. Valvoda, R. Kuzel and R. Cerny, ibid. 156 (1988) 53.10.1016/0040-6090(88)90282-9 ↗
20. U. Konig, Surf. Coatings Technol. 33 (1987) 91.10.1016/0257-8972(87)90180-0 ↗
21. S. V. Subramanian, S. S. Ingle and D. A. R. Kay, ibid. 61 (1993) 293.10.1016/0257-8972(93)90241-F ↗
22. R. S. Cowan and W. O. Winer, in “ASM Handbook”, Vol. 18, “Friction, Lubrication and Wear Technology”, edited by P. Blau, (ASM International, Materials Park, OH (1992) pp. 39–44.
23. D. Mcintyre, J. E. Greene, G. Hakansson, J.-E. Sundgren and W.-D. Munz, J. Appl. Phys. 67 (1990) 1542.10.1063/1.345664 ↗
24. Siegfried Hofmann and Hermann, A. Jehn, Surf. Interface Anal. 12 (1988) 329.10.1002/sia.740120602 ↗
25. J. R. Roos, J. P. Celis, E. Vancoille, H. Veltrop, S. Boelens, F. Jungblut, J. bberink and H. Homberg, Thin Solid Films 193/194 (1990) 547.10.1016/S0040-6090(05)80064-1 ↗
26. B. M. Kramer and P. K. Judi, J. Vac. Sci. Technol. A3 (1985) 2439.10.1116/1.572854 ↗
27. Milton C. Shaw, in “Metal Cutting Principles” (Clarendon Press, Oxford, 1984) Ch. 12.
28. E. Rabinowicz, Lubr. Eng. 33 (1977) 378.
29. R. Komanduri and J. D. Desai, Carbide Tool J. September/October, Vol. 15 (1983) 3.
30. Milton C. Shaw, in“Metal Cutting Principles” (Clarendon Press, Oxford, 1984) Ch. 11, pp. 234–35.