journal article·1994-03

Parametric study of the chemical vapour deposition of carbon-boron-nitrogen compounds

A. Derre, L. Filipozzi, F. Bouyer, A. Marchand

Journal of Materials Science· Volume 29· Issue 6
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Abstract

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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Boron and Carbon Nanomaterials Research · Semiconductor materials and devices

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References (21)

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