journal article·2024-10

Microstructure and stress evolution of W nanofilms prepared by arc ion plating under different deposition time and substrate bias

Xi Li, Zongxin Mu, Xinyu Song

Journal of Materials Science· Volume 59· Issue 40
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OpenAlex topics: Metal and Thin Film Mechanics · Advanced materials and composites · Diamond and Carbon-based Materials Research

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References (64)

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