Accurate measurement of thickness of large-area graphene layers by neutron reflectometry
Source abstract
Abstract
Neutron reflectometry was used to determine the thickness of large-area graphene layers on SiO2/Si substrates. Preliminary simulations showed that the optimum thickness of the SiO2 layer for neutron reflection is about a few hundred angstroms. The thicknesses of the graphene and the SiO2 layers were obtained by fitting the experimental reflectivity spectra. Transmission electron microscopy and Raman experiments were performed on the same samples, and verified that the neutron reflection results are reliable and accurate at the subangstrom level. This neutron reflectometry is nondestructive and applicable to wafer-size layers to yield the mean thickness. This accurate determination of the thickness will be helpful for managing quality of large-area graphene films.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Graphene research and applications · Advancements in Battery Materials · Thermal properties of materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (34)
Show source-provided references
1. Geim AK, Novoselov KS (2007) The rise of graphene. Nat Mater 6:183–191. doi: 10.1038/nmat184910.1038/nmat1849 ↗
2. Geim AK (2009) Graphene: status and prospects. Science 324:1530–1534. doi: 10.1126/science.115887710.1126/science.1158877 ↗
3. Morozov SV, Novoselov KS, Katsnelson MI, Schedin F, Elias DC, Jaszczak JA, Geim AK (2008) Giant intrinsic carrier mobilities in graphene and its bilayer. Phys Rev Lett 100:016602. doi: 10.1103/PhysRevLett.100.01660210.1103/PhysRevLett.100.016602 ↗
4. Balandin AA (2011) Thermal properties of graphene and nanostructured carbon materials. Nat Mater 10:569–581. doi: 10.1038/NMAT3064
5. Bolotin KI, Sikes KJ, Jiang Z, Klima M, Fudenberg G, Hone J, Kim P, Stormer HL (2008) Ultrahigh electron mobility in suspended graphene. Solid State Commun 146:351–355. doi: 10.1016/j.ssc.2008.02.02410.1016/j.ssc.2008.02.024 ↗
6. Tan PH, Han WP, Zhao WJ, Wu ZH, Chang K, Wang H, Wang YF, Bonini N, Marzari N, Pugno N, Savini G, Lombardo A, Ferrari AC (2012) The shear mode of multilayer graphene. Nat Mater 11:294–300. doi: 10.1038/NMAT324510.1038/NMAT3245 ↗
7. Lee HS, Min SW, Chang YG, Park MK, Nam T, Kim H, Kim JH, Ryu S, Im S (2012) MoS2 nanosheet phototransistors with thickness-modulated optical energy gap. Nano Lett 12:3695–3700. doi: 10.1021/nl301485q10.1021/nl301485q ↗
8. Mak KF, Lee C, Hone J, Shan J, Heinz TF (2010) Atomically thin MoS2: a new direct-gap semiconductor. Phys Rev Lett 105:136805. doi: 10.1103/PhysRevLett.105.13680510.1103/PhysRevLett.105.136805 ↗
9. Li H, Qi X, Wu J, Zeng Z, Wei J, Zhang H (2013) Investigation of MoS2 and graphene nanosheets by magnetic force microscopy. ACS Nano 7:2842–2849. doi: 10.1021/nn400443u10.1021/nn400443u ↗
10. Lee C, Li Q, Kalb W, Liu XZ, Berger H, Carpick RW, Hone J (2010) Frictional characteristics of atomically thin sheets. Science 328:76–80. doi: 10.1126/science.118416710.1126/science.1184167 ↗
11. Nolen CM, Denina G, Teweldebrhan D, Bhanu B, Balandin AA (2011) High-throughput large-area automated identification and quality control of graphene and few-Layer graphene films. ACS Nano 5:914–922. doi: 10.1021/nn102107b10.1021/nn102107b ↗
12. Dong X, Ma Y, Zhu G, Huang Y, Wang J, Chan-Park MB, Wang L, Huanga W, Chen P (2012) Synthesis of graphene–carbon nanotube hybrid foam and its use as a novel three-dimensional electrode for electrochemical sensing. J Mater Chem 22:17044–17048. doi: 10.1039/c2jm33286h10.1039/c2jm33286h ↗
13. Dimiev A, Kosynkin DV, Sinitskii A, Slesarev A, Sun Z, Tour JM (2011) Layer-by-layer removal of graphene for device patterning. Science 331:1168–1172. doi: 10.1126/science.119918310.1126/science.1199183 ↗
14. Xu S, Man B, Jiang S, Yue W, Yang C, Liu M, Chen C, Zhang C (2014) Direct growth of graphene on quartz substrates for label-free detection of adenosine triphosphate. Nanotechnology 25:165702. doi: 10.1088/0957-4484/25/16/16570210.1088/0957-4484/25/16/165702 ↗
15. Sun Z, Yan Z, Yao J, Beitler E, Zhu Y, Tour JM (2010) Growth of graphene from solid carbon sources. Nature 468:549–552. doi: 10.1038/nature0957910.1038/nature09579 ↗
16. Kim J, Park H, Hannon JB, Bedell SW, Fogel K, Sadana DK, Dimitrakopoulos C (2013) Layer-resolved graphene transfer via engineered strain layers. Science 342:833–836. doi: 10.1126/science.124298810.1126/science.1242988 ↗
17. Casiraghi C, Hartschuh A, Lidorikis E, Qian H, Harutyunyan H, Gokus T, Novoselov KS, Ferrari AC (2007) Rayleigh imaging of graphene and graphene layers. Nano Lett 7:2711–2717. doi: 10.1021/nl071168m10.1021/nl071168m ↗
18. Nair RR, Blake P, Grigorenko AN, Novoselov KS, Booth TJ, Stauber T, Peres NMR, Geim AK (2008) Fine structure constant defines visual transparency of graphene. Science 320:1308. doi: 10.1126/science.115696510.1126/science.1156965 ↗
19. Li H, Wu J, Huang X, Lu G, Yang J, Lu X, Xiong Q, Zhang H (2013) Rapid and reliable thickness identification of two-fimensional nanosheets using optical microscopy. ACS Nano 7:10344–10353. doi: 10.1021/nn404747410.1021/nn4047474 ↗
20. Lee S, Lee K, Zhong Z (2010) Wafer scale homogeneous bilayer graphene films by chemical vapor deposition. Nano Lett 10:4702–4707. doi: 10.1021/nl102997810.1021/nl1029978 ↗
21. Koh YK, Bae MH, Cahill DG, Pop E (2011) Reliably counting atomic planes of few-layer graphene (n > 4). ACS Nano 5:269–274. doi: 10.1021/nn102658a10.1021/nn102658a ↗
22. Joo K, Jerng SK, Kim YS, Kim B, Moon S, Moon D, Lee GD, Song YK, Chun SH, Yoon E (2012) Reduction of graphene damages during the fabrication of InGaN/GaN light emitting diodes with graphene electrodes. Nanotechnology 23:425302. doi: 10.1088/0957-4484/23/42/42530210.1088/0957-4484/23/42/425302 ↗
23. Reina A, Jia X, Ho J, Nezich D, Son H, Bulovic V, Dresselhaus MS, Kong J (2009) Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition. Nano Lett 9:30–35. doi: 10.1021/nl801827v10.1021/nl801827v ↗
24. Meyer JC, Geim AK, Katsnelson MI, Novoselov KS, Booth TJ, Roth S (2007) The structure of suspended graphene sheets. Nature 446:60–63. doi: 10.1038/nature0554510.1038/nature05545 ↗
25. Kim KS, Zhao Y, Jang H, Lee SY, Kim JM, Kim KS, Ahn JH, Kim P, Choi JY, Hong BH (2009) Large-scale pattern growth of graphene films for stretchable transparent electrodes. Nature 457:706–710. doi: 10.1038/nature0771910.1038/nature07719 ↗
26. Kobayashi T, Bando M, Kimura N, Shimizu K, Kadono K, Umezu N, Miyahara K, Hayazaki S, Nagai S, Mizuguchi Y, Murakami Y, Hobara D (2013) Production of a 100-m-long high-quality graphene transparent conductive film by rollto-roll chemical vapor deposition and transfer process. Appl Phys Lett 102:023112. doi: 10.1063/1.477670710.1063/1.4776707 ↗
27. Russell TP (1990) X-ray and neutron reflectivity for the investigation of polymers. Mater Sci Rep 5:171–27110.1016/S0920-2307(05)80002-7 ↗
28. Ruammaitree A, Nakahara H, Akimoto K, Soda K, Saito Y (2013) Determination of non-uniform graphene thickness on SiC (0001) by X-ray diffraction. Appl Surf Sci 282:297–301. doi: 10.1016/j.apsusc.2013.05.12210.1016/j.apsusc.2013.05.122 ↗
29. Tokarczyk M, Kowalsi G, Kepa H, Grodecki K, Drabinska A, Strupinski W (2013) Multilayer graphene stacks grown by different methods-thickness measurements by X -ray diffraction, Raman spectroscopy and optical transmission. Crystallogr Rep 58:1053–1057. doi: 10.1134/S106377451307019510.1134/S1063774513070195 ↗
30. Nelson A (2006) Co-refinement of multiple-contrast neutron/X-ray reflectivity data using MOTOFIT. J Appl Crystallogr 39:273–276. doi: 10.1107/S002188980600507310.1107/S0021889806005073 ↗
31. Heavens OS, Liddell HM (1966) Staggered broad-band reflecting multilayers. Appl Opt 5:373–37610.1364/AO.5.000373 ↗
32. Anner GE (1990) Planar processing primer. Van Nostrand Reinhold, New York10.1007/978-94-009-0441-5 ↗
33. http://www.iue.tuwien.ac.at/phd/hoessinger/node28.html
34. http://www.graphenesupermarket.com