Preparation of nitrogen-doped YSZ thin films by pulsed laser deposition and their characterization
Source abstract
Abstract
The pulsed laser deposition technique was applied to deposit nitrogen-doped yttria stabilized zirconia (YSZ) thin films. The working parameters were varied in order to achieve a maximal nitrogen content. The films were characterized by SIMS, XPS, X-ray diffraction and optical spectroscopy. The surface topography was studied by AFM and HRSEM. The influence of the deposition parameters on the film properties is discussed.
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Research context
OpenAlex topics: Electronic and Structural Properties of Oxides · Catalytic Processes in Materials Science · High-Temperature Coating Behaviors
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