An XPS and thermogravimetric study of oxidized AlN and AlN–Si3N4 layers deposited by liquid-phase chemical vapour deposition
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OpenAlex topics: Advanced ceramic materials synthesis · Semiconductor materials and devices · Advanced Surface Polishing Techniques
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References (38)
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1. Y Pauleau, J. J. Hartzpergue and J. C. Remy, Bull. Soc. Chim. Fr. 5– 6 (1979) 199.
2. F. L. Riley, Sci. Ceram. 12 (1983) 15.
3. M. Feil, Hybrid Circuits, 18 (1989) 29.
4. K. T. McGarron, G. R. Kline, J. T. Martin and K. M. Larkin, IEEE Ultrason. Symp. Proc 1 (1988) 673.
5. K. Ando, A. Ishitani and K. Hamano, Appl. Phys. Lett. 59 (1991) 1083.10.1063/1.106350 ↗
6. H. Kurogi, N. Inoue, M. Takahashi, H. Tamura, T. Ajioka, M. Yoshimaru and M. Ino, IEICE Tech Rep SDM91-30 (1991) p. 43.
7. J. H. Scofield, J. Electron Spectrosc. 8 (1976) 129.10.1016/0368-2048(76)80015-1 ↗
8. B. Aspar, R. Berjoan, C. Labatut and B. Armas, Appl. Surf. Sci. 81 (1994) 55.10.1016/0169-4332(94)90085-X ↗
9. Frank Henry, PhD thesis, Université de Montpellier, January 1995.
10. D. Briggs and M. P. Seah, “Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy” (Wiley, Chichester, 1983) p. 363.
11. Ch. Grundling, J. Alercher and D. W. Goodman, Surf. Sci. 318 (1994) 97.10.1016/0039-6028(94)90345-X ↗
12. F. Henry, B. Armas, M. Balat, R. Berjoan and C. Combescure, J. Phys. IV, Coll. C3, Suppl. J. Phys. 23 (1993) 519.
13. J. A. Taylor and J. W. Rablais, J. Chem. Phys. 75 (1981) 1735.10.1063/1.442251 ↗
14. H. M. Liao, R. N. S. Sodhi and T. W. Coyle, J. Vac. Sci. Technol. A11 (1993) 2681.10.1116/1.578626 ↗
15. C. P. Wagner, W. M. Riggs, L. E. Davis, J. F. Moulder and G. E. Muilenberg, “Handbook of X-ray Photoelectron Spectroscopy” (Perkin-Elmer, Eden, Prairie, MN, 1979).
16. C. Labatut, D. Kharchi, B. Aspar, F. Sibieude and B. Armas, J. Eur. Ceram. Soc. 13 (1994) 339.10.1016/0955-2219(94)90009-4 ↗
17. N. Azema, J. Durand, R. Berjoan, C. Dupuy and C. Lot, ibid. 8 (1991) 291.10.1016/0955-2219(91)90123-H ↗
18. V. Andre, F. Arefi, J. Amouroux and G. Lorang, Surf. Interface Anal. 16 (1990) 241.10.1002/sia.740160152 ↗
19. M. P. Seah, Vacuum 34 (1984) 463.10.1016/0042-207X(84)90084-8 ↗
20. S. Hoffman, J. Trace Microprobe Technol. 1 (1982/83) 213.
21. F. Weitzer, K. Remschnig, J. C. Schuster and P. Rogl, J. Mater. Res. 8 (1990) 2152.10.1557/JMR.1990.2152 ↗
22. E. Beche, R. Berjoan, J. Viard, B. Cros and J. Durand, Thin Solid Films 258 (1995) 143.10.1016/0040-6090(94)06384-2 ↗
23. C. D. Wagner, Surf. Interface Anal. 12 (1988) 527.10.1002/sia.740121004 ↗
24. S. I. Raider, R. Flitsch, J. A. Aboaf and W. A. Pliskin, J. Electrochem Soc 123 (1976) 560.10.1149/1.2132877 ↗
25. M. Kazuta, N. So, H. Kasamura and M. Kudo, Surf. Interface Anal. 19 (1992) 222.10.1002/sia.740190143 ↗
26. H. Bender and W. D. Chen, ibid. 15 (1990) 38.10.1002/sia.740150107 ↗
27. F. PavlyÀk, I. Bertoti, M. Mohai, I. Buzco and J. Giber, ibid. 20 (1993) 221.10.1002/sia.740200306 ↗
28. J. A. Taylor, Appl. Surf. Sci. 7 (1981) 168.10.1016/0378-5963(81)90068-4 ↗
29. A. D. Katnani and K. I. Papothomas, J. Vac. Sci. Technol. A5 (1987) 1335.10.1116/1.574765 ↗
30. P. S. Wang, S. G. Malghan and S. M. Hsu, J. Mater. Res. 10 (1995) 302.10.1557/JMR.1995.0302 ↗
31. W. F. Egellhoff, J. Surf. Sci. Rep. 6 (1987) 253.10.1016/0167-5729(87)90007-0 ↗
32. T. L. Barr, S. Seal, L. M. Chen and C. C. Kao, Thin Solid Films 253 (1994) 277.10.1016/0040-6090(94)90334-4 ↗
33. N. Cabrera and N. F. Mott, Rep. Prog. Phys. 12 (1948) 163.10.1088/0034-4885/12/1/308 ↗
34. M. Casamassima and E. Dargue-Ceretti, J. Mater. Sci. 28 (1993) 3997.10.1007/BF00351220 ↗
35. W. Mullins and B. L. Averbach, Surf. Sci. 206 (1988) 41.10.1016/0039-6028(88)90013-1 ↗
36. C. D. Wagner, D. E. Passoja, H. F. Hillery, T. G. Kinisky, H. A. Six, W. T. Jansen and J. A. Taylor, J. Vac. Sci. Technol. 21 (1982) 933.10.1116/1.571870 ↗
37. M. S Hedge, R. Caracciolo, K. S. Halton and J. B. Watchman, Appl. Surf. Sci. 37 (1989) 16.10.1016/0169-4332(89)90969-0 ↗
38. L. Lozzi, M. Passacantando, P. Picozzi, S. Santucci, G. Tomassi, R. Alfonsetti and A. Borghesi, Surf. Interface Anal. 22 (1994) 190.10.1002/sia.740220142 ↗