Photoacoustic measurement of thermal properties of TiN thin films
Source abstract
Abstract
Titanium nitride (TiN) thin films were prepared by reactive DC magnetron sputtering under different nitrogen flow rates and at constant substrate temperature as well as at constant nitrogen flow rate and at different substrate temperatures. Photoacoustic measurement of the thermal properties of the films revealed that the thermal diffusivity and thermal conductivity of the TiN thin films are significantly lower than the bulk values and that the grain size of the films has substantial influence on the thermal properties of TiN thin films. The thermal conductivity of the films decreases with increasing nitrogen flow rates and increases with increasing substrate temperature. The above opposing behaviour in the thermal properties is found to be related to the microstructure, especially, the grain size of the films.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Advanced Sensor Technologies Research · GaN-based semiconductor devices and materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (39)
Show source-provided references
1. Banerjee R, Chandra R, Ayyub P (2002) Thin Solid Film 405:6410.1016/S0040-6090(01)01705-9 ↗
2. Valvoda V (1995) J Alloy Compd 219:8310.1016/0925-8388(94)05012-0 ↗
3. Ting CY (1982) J Vac Sci Technol 21(1):1410.1116/1.571700 ↗
4. Kim NY, Son JB, Oh JH, Hwangbo CK, Park MC (2000) Surf Coat Technol 128–129:15610.1016/S0257-8972(00)00574-0 ↗
5. Vaz F, Machado P, Rebouta L, Cerqueira P, Goudeau Ph, Riviere JP, Alves E, Pischow K, de Rijk J (2003) Surf Coat Technol 174–175:37510.1016/S0257-8972(03)00711-4 ↗
6. Patsalas P, Charitidis C, Logothetidis S (2000) Surf Coat Technol 125:33510.1016/S0257-8972(99)00606-4 ↗
7. Armigliato A, Celotti G, Garulli A, Guerri S, Ostoja P, Rosa R (1982) Thin Solid Film 92:34110.1016/0040-6090(82)90158-4 ↗
8. Pelleg J, Zevin LZ, Lungo S, Croitoru N (1991) Thin Solid Film 197:11710.1016/0040-6090(91)90225-M ↗
9. Asinovsky L, Frisa LE (1998) Thin Solid Film 313–314:30310.1016/S0040-6090(97)00837-7 ↗
10. Ellwanger RC, Towner JM (1988) Thin Solid Film 161:28910.1016/0040-6090(88)90261-1 ↗
11. Sundgren JE (1985) Thin Solid Film 128:2110.1016/0040-6090(85)90333-5 ↗
12. Yu G, Chen J, Shi Y, Pan HC, Zhu D, Xu H, Zheng Z (1998) Thin Solid Film 335:5910.1016/S0040-6090(98)00886-4 ↗
13. Ma LW, Cairney JM, Hoffman M, Munroe PR (2005) Surf Coat Technol 192:1110.1016/j.surfcoat.2004.04.002 ↗
14. Volkelein F (1990) Thin Solid Film 188:2710.1016/0040-6090(90)90190-O ↗
15. Cahill DG, Alleu TH (1994) Appl Phys Lett 65:30910.1063/1.112355 ↗
16. Okuda M, Ohkuba S (1992) Thin Solid Film 213:17610.1016/0040-6090(92)90280-O ↗
17. Goodson KE, Flik MI, Su LT, Antoniadis DA (1994) ASME J Heat Transfer 116:31710.1115/1.2911402 ↗
18. Goodson KE, Kading OW, Rosler M, Zachai R (1995) J Appl Phys 77:138510.1063/1.358950 ↗
19. Wu ZL, Reichling M, Hu XQ, Balasubramanian K, Guenther KH (1993) Appl Opt 32:566010.1364/AO.32.005660 ↗
20. Wang X, Hu H, Xu X (2001) ASME J Heat Transfer 123:13810.1115/1.1337652 ↗
21. Pandhija S, Rai N, Singh AK, Rai AK, Gopal R (2006) Progr Cryst Growth Character Mater 52:5310.1016/j.pcrysgrow.2006.03.022 ↗
22. Raji P, Sanjeeviraja C, Ramachandran K (2004) Cryst Res Technol 39(7):61710.1002/crat.200310233 ↗
23. Pichler A, Sowa MG. (2005) J Mol Spectrosc 229:23110.1016/j.jms.2004.09.007 ↗
24. Lachine A, Poulet P (1984) Appl Phys Lett 45(9):95310.1063/1.95454 ↗
25. Rohde M (1994) Thin Solid Films 238:19910.1016/0040-6090(94)90056-6 ↗
26. http://www.freepatentsonline.com . Accessed on 20 June 2007
27. Anjos V, Bell MJV, de Vasconcelos EA, da Silva Jr EF, Andrade AA, Franco RWA, Castro MPP, Esquef IA, Faria Jr RT (2005) Microelectr J 36:97710.1016/j.mejo.2005.04.021 ↗
28. Mansanares AM, Bento AC, Vargas H, Leite NF, Miranda LCM (1990) Phys Rev B 42:444710.1103/PhysRevB.42.4477 ↗
29. Tominaga T, Ito K (1988) Jpn J Appl Phys 27(2):392
30. Ma CH, Huang JH, Chen H (2006) Surf Coat Technol 200:386810.1016/j.surfcoat.2004.10.098 ↗
31. Singh RK, Biunno N, Narayan J (1989) J Appl Phys 65:239810.1063/1.342807 ↗
32. Sloope BW, Tiller CO (1965) J Appl Phys 36:317410.1063/1.1702946 ↗
33. Kim T-S, Park S-S, Lee B-T (2005) Mater Lett 59:392910.1016/j.matlet.2005.07.047 ↗
34. Nicholls JR, Lawson KJ, Johnstone A, Rickerby DS (2002) Surf Coat Technol 151–152:38310.1016/S0257-8972(01)01651-6 ↗
35. Popov D, Jacimovski SK, Tosic BS, Setrajcic JP (2003) Physica A 317:12910.1016/S0378-4371(02)01328-6 ↗
36. Kabacoff LT (1998) Thermally sprayed nano-structured thermal barrier Coatings, NATO Workshop on Thermal barrier Coatings, Aaalborg, Denmark, AGARD-R-823, Paper 12
37. Bodzenta J, Burak B, Jagoda A, Stanczyk B (2005) Diamond Relat Mater 14:116910.1016/j.diamond.2005.01.016 ↗
38. Jacquot A, Lenoir B, Dauscher A, Verardi P, Cracium F, Stolzer M, Gartner M, Dinescu M (2002) Appl Surf Sci 186:50710.1016/S0169-4332(01)00767-X ↗
39. Padture NP, Klemens PG (1997) J Am Ceram Soc 80(4):101810.1111/j.1151-2916.1997.tb02937.x ↗