A parametric study of the deposition of the TiN thin films by laser reactive ablation of titanium targets in nitrogen: the roles of the total gas pressure and the contaminations with oxides
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Laser-induced spectroscopy and plasma · Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (32)
Show source-provided references
1. M. Y. Al-Jaroudi, H. T. G. Hentzel, S. E. Hornstrom and A. Bengston, Thin Solid Films 190 (1990) 265.10.1016/0040-6090(89)90916-4 ↗
2. S. Kadlec, J. Musil and J. Vyskocil, Surf. Coat. Technol. 54/55 (1992) 287.10.1016/0257-8972(92)90176-B ↗
3. R. C. Glass, L. M. Spellman, S. Tanaka and R. F. Davis, J. Vac. Sci. Technol. A 10 (1992) 1625.10.1116/1.578033 ↗
4. G. Gagnon, J. F. Currie, G. Beique, J. L. Brebner, S. G. Gujrathi and L. Onellet, J. Appl. Phys. 75 (1994) 1565.10.1063/1.356392 ↗
5. Scyung-I. Chen and Jeng-Gong Duh, Surf. Coat. Technol. 47 (1991) 371.10.1016/0257-8972(91)90178-Y ↗
6. V. J. Szcyrbowsi, S. Rogels, A. Kastner, A. Dietrich and K. Hartig, Vakuum Technih 37 (1988) 14.
7. J. E. Sundgren, B. O. Johansson and S. E. Karlsson, Thin Solid Films 105 (1983) 353.10.1016/0040-6090(83)90318-8 ↗
8. S. Logothetidis, I. Aeexandou and J. Stoemenos, Appl. Surf. Sci. 86 (1995) 185.10.1016/0169-4332(94)00392-0 ↗
9. S. Logothetidis, I. Alexandrou and A. Papadopoulos, J. Appl. Phys., 77 (1995) 1043.10.1063/1.358963 ↗
10. R. Bunshah, J. Vac. Sci. Technol B 2 (1984) 789.10.1116/1.582880 ↗
11. D. Bauerle, in “Laser Diagnostics and Photochemical Processing for Semiconductor Devices” Materials Research Society Symposium, Vol. 17, edited by R. M. Osgood, S. R. Brueck and H. R. Scholtssberg (North-Holland, Amsterdam, 1983) p. 19.
12. Y. Rytz-Froidevaux, R. P. Salathe and H. H. Gilgen, J. Appl. Phys. A 37 (1985) 121.10.1007/BF00617497 ↗
13. O. Conde, J. Mariano, A. J. Silvestre and R. Vilar, in “Proceedings of the Third European Conference on Laser Treatment of Materials”, Erlangen, Germany, 17–19 September 1990, edited by Hans W. Bergmann and Roland Kupfer (Spredisaal, Coburg, 1990).
14. O. Conde, M. L. G. Ferreira, P. Hochholdinger, A. J. Silvestre and R. Vilar, Appl. Surf. Sci. 54 (1992) 130.10.1016/0169-4332(92)90032-S ↗
15. O. Conde, A. Kar and J. Mazumder, J. Appl. Phys. 72 (1992) 754.10.1063/1.352351 ↗
16. A. J. Silvestre, M. L. G. F. Parames and O. Conde, Thin Solid Films 241 (1994) 57.10.1016/0040-6090(94)90396-4 ↗
17. A. J. Silvestre, O. Conde, R. Vilar and M. Jeandin, J. Mater. Sci. 29 (1994) 404.10.1007/BF01162499 ↗
18. S. D. Allen, J. Appl. Phys. 52 (1981) 6501.10.1063/1.328600 ↗
19. V. Craciun, I. N. Mihailescu, GH. Oncioiu, A. Luches, M. Martino, V. Nassisi, E. Radiotis, A. V. Drigo and S. Ganatsios, ibid. 68 (1990) 2509.10.1063/1.346518 ↗
20. E. D'Anna, G. Leggieri, A. Luches, M. Martino, A. V. Drigo, I. N. Mihailescu and S. Ganatsios, ibid. 69 (1991) 1687.10.1063/1.347213 ↗
21. E. A'Anna, M. L. De Giorgi, G. Leggieri, A. Luches, M. Martino, A. Perrone, I. N. Mihailescu, P. Mengucci and A. V. Drigo, Thin Solid Films 213 (1992) 197.10.1016/0040-6090(92)90283-H ↗
22. E. D'Anna, M. L. De Giorgi, G. Leggieri, S. Luby, A. Luches, M. Martino, P. Mengucci and I. N. Mihailescu, in “Proceedings of Laser Advanced Materials processing (LAMP'92) — Science and Applications”, Niigata, Japan, edited by A. Matsumara and S. Katayama (High Temperature Society of Japan, Osaka, 1992) p. 867.
23. I. N. Mihailescu, N. Chitica, V. S. Teodorescu, M. L. De Giorgi, G. Leggieri, A. Luches, A. Perrone and B. Dubreuil, J. Vac. Sci. Technol. A. 11 (1993) 2577.10.1116/1.578609 ↗
24. I. N. Mihailescu, N. Chitica, L. C. Nistor, M. Popescu, V. S. Teodorescu, I. Ursu, A. Andrei, A. Barborica, A. Luches, M. L. De Giorgi, A. Perrone, B. Dubreuil and J. Hermann, J. Appl. Phys. 74 (1993) 5781.10.1063/1.354198 ↗
25. V. Beattle and M. Versynder, Trans. ASM 45 (1953) 397.
26. R. F. Voitovich, “Oxidation of Carbides and Nitrides” (Naukova Dumka, Kiev, USSR, 1967) p. 192.
27. J. E. Sundgren, A. Rockett, J. E. Greene and V. Helmersson, J. Vac. Sci. Technol. A 4 (1986) 2157.
28. T. Choudhury, S. O. Saied, J. L. Sullivan and A. M. Abbot, J. Phys. D Appl. Phys. 22 (1989) 1185.10.1088/0022-3727/22/8/026 ↗
29. A. Munster and G. Schlamp, Z. Phys. Chem. Neue Folge 13 (1957) 59.10.1524/zpch.1957.13.1_2.059 ↗
30. Idem, ibid 13 (1957) 76.10.1524/zpch.1957.13.1_2.076 ↗
31. G. V. Samsonov and I. M. Vinitskii, “Handbook of Refractory Compounds” (IFI/Plenum Press, New York, 1978).
32. P. Pascal (ed.), “Nouveau Traite de Chimie Minerale”, 9 (Masson, Paris, 1963) p. 32.