journal article·2007-04

Microstructural evolution of gold–aluminum wire-bonds

Adi Karpel, Giyora Gur, Ziv Atzmon, Wayne D. Kaplan

Journal of Materials Science· Volume 42· Issue 7
Publisher page

Abstract

The purpose of this study is to understand the morphological changes that occur during annealing of Al–Au wire-bonds, by analyzing the interface region of annealed model wire-bonded samples between 5N (99.999%) Au wires and Al pads. Due to the small length scale of the intermetallic region at the interface of the bond, the analysis was done using scanning/transmission electron microscopy combined with energy dispersive spectroscopy. Samples were prepared using a dual-beam focused ion beam system. Microstructural characterization showed that during annealing, a Au-rich intermetallic region was formed under the bond and at the periphery of the bond. Two types of failures occurred during annealing: crack formation at the bond periphery due to an increase in volume during intermetallic growth and the formation of stresses; and oxidation of the AlAu4 phase adjacent to the Au ball, which resulted in the formation of continuous cracks between the Au ball and the intermetallic region. The characteristic void-line found inside the intermetallic region played no part in failure that occurred during exposure to elevated temperatures.
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Research context

OpenAlex topics: Microstructure and mechanical properties · Electronic Packaging and Soldering Technologies · Advanced Welding Techniques Analysis

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References (21)

Show source-provided references
1. Harman G (1997) Wire-bonding in microelectronics materials process reliability and yield. McGraw-Hill Publishers, NY
2. Zhang X, Yan TT (2006) Thin Solid Films 504[1–2]:35510.1016/j.tsf.2005.09.121 ↗
3. Noolu NJ, Murdeshwar NM, Ely KJ, Lippold JC, Baeslack WA (2004) J Mater Res 19(5):137410.1557/JMR.2004.0184 ↗
4. Breach CD, Tok CW, Wulff F, Calpito D (2004) J Mater Sci 39(19):612510.1023/B:JMSC.0000041716.58658.0a ↗
5. Maiocco L, Smyers D, Kadiyala S, Baker I (1990) Mater Charact 24(4):29310.1016/1044-5803(90)90039-M ↗
6. Clatterbaugh GV, Weiner JA, Charles HK (1984) IEEE Trans Compon Hybrids Manufacture Technol 7(4):34910.1109/TCHMT.1984.1136367 ↗
7. Majni G, Nobili C, Ottaviani G, Costato M, Galli E (1981) J Appl Phys 52(6):404710.1063/1.329214 ↗
8. Markwitz A, Matz W (1970) Surf Interface Anal 26(9):65010.1002/(SICI)1096-9918(199808)26:9<650::AID-SIA409>3.0.CO;2-5 ↗
9. Philofsky E (1970) Solid-State Electron 13(10):139110.1016/0038-1101(70)90172-3 ↗
10. Xu C, Sritharan T, Mhaisalkar SG (2007) Scripta Mater 56(6):54910.1016/j.scriptamat.2006.09.038 ↗
11. Chang HS, Hsieh KC, Martens T, Yang A (2004) IEEE Trans Compon Pack Technol 27(1):15510.1109/TCAPT.2004.825752 ↗
12. Ji H, Li M, Wang C, Bang HS, Bang HS (2007) Mater Sci Eng A 447(1–2):11110.1016/j.msea.2006.10.105 ↗
13. Williams DB, Carter BC (1996) Transmission electron microscopy. Plenum, New York10.1007/978-1-4757-2519-3 ↗
14. Karpel A, Kaplan WD, Atzmon Z, Gur G (2005) In: Havas D, Levine L
15. (eds) Proceedings of the 2005 international symposium on microelectronics, IMAPS. p 325
16. Reyntjens S, Puers R (2001) J Micromech Microeng 11(4):28710.1088/0960-1317/11/4/301 ↗
17. Karpel A, Gur G, Atzmon Z, Kaplan WD (2007) J Mater Sci, in press. doi 10.1007/s10853-007-1592-z
18. Bowden P, Brandon DG (1963) J Nuclear Mater 9(3):34810.1016/0022-3115(63)90151-X ↗
19. Piao H, McIntyre NS (2001) Surf Interface Anal 31(9):87410.1002/sia.1123 ↗
20. Xu C, Breach CD, Sritharan T, Wulff F, Mhaisalkar SG (2004) Thin Solid Films 462–463:35710.1016/j.tsf.2004.05.041 ↗
21. Villars P (1991) Pearson’s handbook of crystallographic data for intermetallic phases, 2nd ed. vol 1. ASM International, Materials Park, Ohio, p 652