Deposition of Al nanoparticles and their nanocomposites using a gas aggregation cluster source

The study describes the preparation and properties of Al/Al x O y nanoparticles and their nanocomposites with hydrocarbon plasma polymer. The nanoparticles were deposited using a simple gas aggregation cluster source based on a planar magnetron. The influence of deposition parameters on size distribution was studied. It was found that Al nanoparticles may be deposited with mean diameter ranging from 30 to 60 nm by varying magnetron current from 0.4 to 0.2 A. Attention was also paid to the investigation of the charge of the nanoparticles. It is shown that a large portion of Al x O y nanoparticles leave the gas aggregation source as negatively charged. The nanoparticles were also embedded into the plasma polymer matrix by their simultaneous co-deposition with plasma-polymerized n-hexane. Morphology and chemical composition of such fabricated nanocomposites were determined. It was shown that Al x O y nanoparticles embedded into the polymeric matrix exhibit localized surface plasmon resonances in the deep ultraviolet region of the electromagnetic spectrum and the position of the plasmon peak is strongly correlated with nanoparticle size.