Quantification of Oxygen Vacancies in SrFe_0.5Cr_0.5O_3−δ Thin Films: Correlating Lattice Expansion with Oxidation State Variability

Oxygen vacancies (V O ), even in the dilute regime, can significantly impact the physical and chemical properties of complex oxides. It is however challenging to reliably detect and adequately quantify such defects in thin film samples where the V O concentration and distribution may further vary in response to interfacial strain. Here, we present a method to quantify V O concentrations in SrFe 0.5 Cr 0.5 O 3−δ (SFCO) epitaxial thin films. Through coherent Bragg rod analysis, X-ray absorption spectroscopy, and theoretical modeling, we systematically correlate the c -axis lattice expansion detected in SFCO films with a V O concentration gradient. Our results reveal a nearly linear relationship between oxygen off-stoichiometry and out-of-plane lattice expansion in coherently strained SFCO films, with δ increasing from 0.32 to 0.52 and the lattice expanding by ∼1.0%. Moreover, a significant decrease in Cr oxidation state (from Cr 5+ to Cr 3+ ) is observed as the V O concentration increases, while the Fe oxidation state remains fixed at Fe 3+ . Our findings provide a reliable way to quantify oxygen stoichiometry in complex oxides, offering a pathway to design materials with precisely tailored structure–property relationships.