journal article·1979-07

The synthesis of ultrafine titanium nitride in an r.f. plasma

Toyonobu Yoshida, Akihisa Kawasaki, Kunihiko Nakagawa, Kazuo Akashi

Journal of Materials Science· Volume 14· Issue 7
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Abstract

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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · MXene and MAX Phase Materials

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References (20)

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