The growth of diamond in microwave plasma under low pressure
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Dust and Plasma Wave Phenomena
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (12)
Show source-provided references
1. B. V. Spitsyn andB. V. Derjaguin, USSR Inv). Certif. No. 339134 (1956), (in Russian) Official Bulletin of Inventions of USSR, 1980, No 17, p. 323.
2. S. Aisenberg andR. Chabot,J. Appl. Phys. 42 (1971) 2953.10.1063/1.1660654 ↗
3. B. V. Spitsyn, L. L. Bouilov andB. V. Derjaguin,J. Crystal Growth 52 (1981) 219.10.1016/0022-0248(81)90197-4 ↗
4. S. Matumoto, Y. Sato, M. Kamo andN. Setaka,Jpn. J. Appl. Phys. 21 (1982) L183.10.1143/JJAP.21.L183 ↗
5. M. Kamo, Y. Sato, S. Matumoto andN. Setaka,J. Crystal Growth 62 (1983) 642.10.1016/0022-0248(83)90411-6 ↗
6. S. Matumoto,J. Mater. Sci. Lett. 4 (1985) 600.10.1007/BF00720043 ↗
7. C. Weissmantel,Thin Solid Films 58 (1979) 101.10.1016/0040-6090(79)90217-7 ↗
8. L. Holland andS. M. Ojha,ibid. 58 (1979) 107.10.1016/0040-6090(79)90219-0 ↗
9. T. Mori andY. Namba,J. vac. Sci. Technol. A 1 (1983) 23.10.1116/1.572304 ↗
10. M. Kitabatake andK. Wasa,J. Appl. Phys. 58 (1985) 1963.10.1063/1.336066 ↗
11. M. Balooch andD. R. Olander,J. Chem. Phys. 41 (1964) 2766.10.1063/1.1726350 ↗
12. S. P. Chauhan, J. C. Angus andN. C. Gardner,J. Appl. Phys. 47 (1976) 4746.10.1063/1.322531 ↗