Effect of CH4 concentration on the early growth stage of patterned diamond using high seeding density and hot filament chemical vapor deposition
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OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
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References (67)
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1. Girard HA, Perruchas S, Gesset C, Chaigneau M, Vieille L, Arnault JC, Bergonzo P, Boilot JP, Gacoin T (2009) Electrostatic grafting of diamond nanoparticles: a versatile route to nanocrystalline diamond thin films. ACS Appl Mater Inter 1:2738–2746. https://doi.org/10.1021/am900458g10.1021/am900458g ↗
2. Auciello O, Sumant AV (2010) Status review of the science and technology of ultrananocrystalline diamond (UNCD (TM)) films and application to multifunctional devices. Diam Relat Mater 19:699–718. https://doi.org/10.1016/j.diamond.2010.03.01510.1016/j.diamond.2010.03.015 ↗
3. Eckert M, Neyts E, Bogaerts A (2010) Insights into the growth of (ultra)nanocrystalline diamond by combined molecular dynamics and monte carlo simulations. Cryst Growth Des 10:3005–3021. https://doi.org/10.1021/cg100063c10.1021/cg100063c ↗
4. Yates L, Anderson J, Gu X, Lee C, Bai TY, Mecklenburg M, Aoki T, Goorsky MS, Kuball M, Piner EL, Graham S (2018) Low thermal boundary resistance interfaces for GaN-on-diamond devices. ACS Appl Mater Int 10:24302–24309. https://doi.org/10.1021/acsami.8b0701410.1021/acsami.8b07014 ↗
5. Heidrich N, Iankov D, Hees J, Pletschen W, Sah RE, Kirste L, Zuerbig V, Nebel C, Ambacher O, Lebedev V (2013) Enhanced mechanical performance of AlN/nanodiamond micro-resonators. J Micromech Microeng 23:125017. https://doi.org/10.1088/0960-1317/23/12/12501710.1088/0960-1317/23/12/125017 ↗
6. Sumant AV, Auciello O, Carpick RW, Srinivasan S, Butler JE (2010) Ultrananocrystalline and nanocrystalline diamond thin films for MEMS/NEMS applications. Mrs Bull 35:281–288. https://doi.org/10.1557/mrs2010.55010.1557/mrs2010.550 ↗
7. Schirhagl R, Chang K, Loretz M, Degen CL (2014) Nitrogen-vacancy centers in diamond: nanoscale sensors for physics and biology. Annu Rev Phys Chem 65:83–105. https://doi.org/10.1146/annurev-physchem-040513-10365910.1146/annurev-physchem-040513-103659 ↗
8. Almeida EC, Azevedo AF, Baldan MR, Braga NA, Rosolen JM, Ferreira NG (2007) Nanocrystalline diamond/carbon felt as a novel composite for electrochemical storage energy in capacitor. Chem Phys Lett 438:47–52. https://doi.org/10.1016/j.cplett.2007.02.04010.1016/j.cplett.2007.02.040 ↗
9. Yu J, Huang RF, Wen LS, Shi CX (1997) Enhancement of the HFCVD diamond growth process by directed gas flow. Mater Lett 32:143–146. https://doi.org/10.1016/S0167-577x(97)00020-710.1016/S0167-577x(97)00020-7 ↗
10. Roy M, George VC, Dua AK, Raj P, Schulze S, Tenne DA, Salvan G, Zahn DRT (2002) Detection of nanophase at the surface of HFCVD grown diamond films using surface enhanced Raman spectroscopic technique. Diam Relat Mater 11:1858–1862. https://doi.org/10.1016/S0925-9635(02)00174-710.1016/S0925-9635(02)00174-7 ↗
11. Windischmann H, Epps GF, Cong Y, Collins RW (1991) Intrinsic stress in diamond films prepared by microwave plasma Cvd. J Appl Phys 69:2231–2237. https://doi.org/10.1063/1.34870110.1063/1.348701 ↗
12. Goto Y, Yagi T, Nagai H (1989) Synthesis of diamond films by laser-induced chemical vapor-deposition. Mat Res Sci Chem 129:213–217
13. Suzuki K, Sawabe A, Yasuda H, Inuzuka T (1987) Growth of diamond thin-films by Dc plasma chemical vapor-deposition. Appl Phys Lett 50:728–729. https://doi.org/10.1063/1.9808010.1063/1.98080 ↗
14. Baldwin SK, Owano TG, Kruger CH (1994) Growth-rate studies of Cvd diamond in an Rf plasma torch. Plasma Chem Plasma Process 14:383–406. https://doi.org/10.1007/Bf0157020310.1007/Bf01570203 ↗
15. Barbosa DC, Almeida FA, Silva RF, Ferreira NG, Trava-Airoldi VJ, Corat EJ (2009) Influence of substrate temperature on formation of ultrananocrystalline diamond films deposited by HFCVD argon-rich gas mixture. Diam Relat Mater 18:1283–1288. https://doi.org/10.1016/j.diamond.2009.05.00210.1016/j.diamond.2009.05.002 ↗
16. Jeon ID, Park CJ, Kim DY, Hwang NM (2001) Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process. J Cryst Growth 223:6–14. https://doi.org/10.1016/S0022-0248(00)01016-210.1016/S0022-0248(00)01016-2 ↗
17. Lee ST, Lam YW, Lin ZD, Chen Y, Chen QJ (1997) Pressure effect on diamond nucleation in a hot-filament CVD system. Phys Rev B 55:15937–15941. https://doi.org/10.1103/PhysRevB.55.1593710.1103/PhysRevB.55.15937 ↗
18. Zhang GE, Buck V (2002) Lower filament temperature limit of diamond growth in a hot-filament CVD system. Surf Coat Technol 160:14–19. https://doi.org/10.1016/S0257-8972(02)00327-410.1016/S0257-8972(02)00327-4 ↗
19. Wei QP, Ashfold MNR, Mankelevich YA, Yu ZM, Liu PZ, Ma L (2011) Diamond growth on WC-Co substrates by hot filament chemical vapor deposition: effect of filament-substrate separation. Diam Relat Mater 20:641–650. https://doi.org/10.1016/j.diamond.2011.02.01710.1016/j.diamond.2011.02.017 ↗
20. Demuynck L, Arnault JC, Speisser C, Polini R, LeNormand F (1997) Mechanisms of CVD diamond nucleation and growth on mechanically scratched and virgin Si(100) surfaces. Diam Relat Mater 6:235–239. https://doi.org/10.1016/S0925-9635(96)00709-110.1016/S0925-9635(96)00709-1 ↗
21. Anupam KC, Saha R, Anderson J, Ayala A, Engdahl C, Piner EL, Holtz MW (2021) Effect of seeding density on the growth of diamond films by hot-filament chemical vapor deposition from sparse to dense range. J Appl Phys 130:225302. https://doi.org/10.1063/5.006854110.1063/5.0068541 ↗
22. Mandal S (2021) Nucleation of diamond films on heterogeneous substrates: a review. RSC Adv 11:10159–10182. https://doi.org/10.1039/d1ra00397f10.1039/d1ra00397f ↗
23. Anaya J, Bai T, Wang Y, Li C, Goorsky M, Bougher TL, Yates L, Cheng Z, Graham CS, Hobart KD, Feygelson TI, Tadjer MJ, Anderson TJ, Pate BB, Kuball M (2017) Simultaneous determination of the lattice thermal conductivity and grain/grain thermal resistance in polycrystalline diamond. Acta Mater 139:215–225. https://doi.org/10.1016/j.actamat.2017.08.00710.1016/j.actamat.2017.08.007 ↗
24. Gilbert DR, Singh R, Clarke R, Murugkar S (1997) Dynamic growth effects during low-pressure deposition of diamond films. Appl Phys Lett 70:1974–1976. https://doi.org/10.1063/1.11879610.1063/1.118796 ↗
25. Tang CJ, Neves AJ, Fernandes AJS (2003) Influence of nucleation density on film quality, growth rate and morphology of thick CVD diamond films. Diam Relat Mater 12:1488–1494. https://doi.org/10.1016/S0925-9635(03)00179-110.1016/S0925-9635(03)00179-1 ↗
26. Read TL, Cobb SJ, Macpherson JV (2019) An sp(2) patterned boron doped diamond electrode for the simultaneous detection of dissolved oxygen and pH. ACS Sensors 4:756–763. https://doi.org/10.1021/acssensors.9b0013710.1021/acssensors.9b00137 ↗
27. Ueda K, Kasu M, Yamauchi Y, Makimoto T, Schwitters M, Twitchen DJ, Scarsbrook GA, Coe SE (2006) Diamond FET using high-quality polycrystalline diamond with f(T) of 45 GHz and f(max) of 120 GHz. IEEE Electr Device Lett 27:570–572. https://doi.org/10.1109/Led.2006.87632510.1109/Led.2006.876325 ↗
28. Wang XD, Hong GD, Zhang J, Lin BL, Gong HQ, Wang WY (2002) Precise patterning of diamond films for MEMS application. J Mater Process Technol 127:230–233. https://doi.org/10.1016/S0924-0136(02)00147-410.1016/S0924-0136(02)00147-4 ↗
29. Ahmed R, Nazari M, Hancock BL, Simpson J, Engdahl C, Piner EL, Holtz MW (2018) Ultraviolet micro-Raman stress map of polycrystalline diamond grown selectively on silicon substrates using chemical vapor deposition. Appl Phys Lett 112:181907. https://doi.org/10.1063/1.502750710.1063/1.5027507 ↗
30. Kobashi K, Inoue T, Tachibana H, Kumagai K, Miyata K, Nishimura K, Nakaue A (1990) Selected-area deposition of diamond films. Nato Adv Sci I E-App; 185:159–167
31. Xu N, Zheng ZH, Sun Z, Zhang XF, Xu CF, Wan PM, Xin PS (1994) Selected-area diamond deposition on si substrates pretreated in different ways. Surf Coat Tech 63:159–16510.1016/0257-8972(94)90093-0 ↗
32. Hwang DS, Saito T, Fujimori N (2004) New etching process for device fabrication using diamond. Diam Relat Mater 13:2207–2210. https://doi.org/10.1016/j.diamond.2004.07.02010.1016/j.diamond.2004.07.020 ↗
33. Hirabayashi K, Taniguchi Y, Takamatsu O, Ikeda T, Ikoma K, Iwasakikurihara N (1988) Selective deposition of diamond crystals by chemical vapor-deposition using a tungsten-filament method. Appl Phys Lett 53:1815–1817. https://doi.org/10.1063/1.9978910.1063/1.99789 ↗
34. Masood A, Aslam M, Tamor MA, Potter TJ (1991) Techniques for patterning of Cvd diamond films on non-diamond substrates. J Electrochem Soc 138:L67–L68. https://doi.org/10.1149/1.208545210.1149/1.2085452 ↗
35. Liu HW, Gao CX, Zou GT, Li X, Wang CX, Wen C (2000) The selective area deposition of diamond films. Jpn J Appl Phys 1(39):1323–1324. https://doi.org/10.1143/Jjap.39.132310.1143/Jjap.39.1323 ↗
36. Jirasek V, Izak T, Varga M, Babchenko O, Kromka A (2015) Investigation of residual stress in structured diamond films grown on silicon. Thin Solid Films 589:857–863. https://doi.org/10.1016/j.tsf.2015.07.02210.1016/j.tsf.2015.07.022 ↗
37. Lee SK, Kim JH, Jeong MG, Song MJ, Lim DS (2010) Direct deposition of patterned nanocrystalline CVD diamond using an electrostatic self-assembly method with nanodiamond particles. Nanotechnology 21:505302. https://doi.org/10.1088/0957-4484/21/50/50530210.1088/0957-4484/21/50/505302 ↗
38. Ali M, Urgen M (2011) Surface morphology, growth rate and quality of diamond films synthesized in hot filament CVD system under various methane concentrations. Appl Surf Sci 257:8420–8426. https://doi.org/10.1016/j.apsusc.2011.04.09710.1016/j.apsusc.2011.04.097 ↗
39. Vanderdrift A (1967) Evolutionary selection a principle governing growth orientation in vapour-deposited layers. Philips Res Rep 22:267
40. Leigh WGS, Thomas ELH, Cuenca JA, Mandal S, Williams OA (2023) In-situ monitoring of microwave plasma-enhanced chemical vapour deposition diamond growth on silicon using spectroscopic ellipsometry. Carbon 202:204–212. https://doi.org/10.1016/j.carbon.2022.10.04910.1016/j.carbon.2022.10.049 ↗
41. Gracio JJ, Fan QH, Madaleno JC (2010) Diamond growth by chemical vapour deposition. J Phys D Appl Phys 43:374017. https://doi.org/10.1088/0022-3727/43/37/37401710.1088/0022-3727/43/37/374017 ↗
42. Menon PM, Clausing RE, Heatherly L, Feigerle CS (1998) The morphology of diamond grown by hot filament chemical vapor deposition. Diam Relat Mater 7:1201–1206. https://doi.org/10.1016/S0925-9635(98)00178-210.1016/S0925-9635(98)00178-2 ↗
43. Schirach RJ, Kolbesen BO, Aderhold D, Comes FJ (1997) Characterization of crystal faces of polycrystalline HFCVD diamond films by STM/STS. Fresen J Anal Chem 358:335–338. https://doi.org/10.1007/s00216005042210.1007/s002160050422 ↗
44. Ali N, Fan QH, Ahmed W, Gracio J (2002) Deposition of polycrystalline diamond films using conventional and time-modulated CVD processes. Thin Solid Films 420:155–160. https://doi.org/10.1016/S0040-6090(02)00793-910.1016/S0040-6090(02)00793-9 ↗
45. Ahmed R, Siddique A, Saha R, Anderson J, Engdahl C, Holtz M, Piner E (2020) Effect of precursor stoichiometry on morphology, phase purity, and texture formation of hot filament CVD diamond films grown on Si (100) substrate. J Mater Sci Mater 31:8597–8606. https://doi.org/10.1007/s10854-020-03395-710.1007/s10854-020-03395-7 ↗
46. Kondoh E, Tanaka K, Ohta T (1993) Reactive-flow simulation of the hot-filament chemical-vapor-deposition of diamond. J Appl Phys 74:4513–4520. https://doi.org/10.1063/1.35436810.1063/1.354368 ↗
47. Nazari M, Holtz MW (2018) Near-ultraviolet Raman and micro-Raman analysis of electronic materials. Appl Phys Rev 5:041303. https://doi.org/10.1063/1.505466010.1063/1.5054660 ↗
48. Namba Y, Heidarpour E, Nakayama M (1992) Size effects appearing in the Raman-spectra of polycrystalline diamonds. J Appl Phys 72:1748–1751. https://doi.org/10.1063/1.35169810.1063/1.351698 ↗
49. Ruiz-Valdez CF, Chernov V, Melendrez R, Alvarez-Garcia S, Santacruz-Gomez K, Berman-Mendoza D, Barboza-Flores M (2018) Raman and thermoluminescence studies of HPHT synthetic nanodiamond powders. Phys Status Solidi A 215:1800267. https://doi.org/10.1002/pssa.20180026710.1002/pssa.201800267 ↗
50. Tuinstra F, Koenig JL (1970) Raman spectrum of graphite. J Chem Phys 53:1126. https://doi.org/10.1063/1.167410810.1063/1.1674108 ↗
51. Fortunato W, Chiquito AJ, Galzerani JC, Moro JR (2007) Crystalline quality and phase purity of CVD diamond films studied by Raman spectroscopy. J Mater Sci 42:7331–7336. https://doi.org/10.1007/s10853-007-1575-010.1007/s10853-007-1575-0 ↗
52. Zhao XZ, Cherian KA, Roy R, White WB (1998) Downshift of Raman peak in diamond powders. J Mater Res 13:1974–1976. https://doi.org/10.1557/Jmr.1998.027710.1557/Jmr.1998.0277 ↗
53. Prawer S, Nemanich RJ (2004) Raman spectroscopy of diamond and doped diamond. Philos T Roy Soc A 362:2537–2565. https://doi.org/10.1098/rsta.2004.145110.1098/rsta.2004.1451 ↗
54. Sun Z, Shi JR, Tay BK, Lau SP (2000) UV Raman characteristics of nanocrystalline diamond films with different grain size. Diam Relat Mater 9:1979–1983. https://doi.org/10.1016/S0925-9635(00)00349-610.1016/S0925-9635(00)00349-6 ↗
55. Ager JW, Veirs DK, Rosenblatt GM (1991) Spatially resolved raman studies of diamond films grown by chemical vapor-deposition. Phys Rev B 43:6491–6499. https://doi.org/10.1103/PhysRevB.43.649110.1103/PhysRevB.43.6491 ↗
56. Campbell IH, Fauchet PM (1986) The effects of microcrystal size and shape on the one phonon Raman-spectra of crystalline semiconductors. Solid State Commun 58:739–741. https://doi.org/10.1016/0038-1098(86)90513-210.1016/0038-1098(86)90513-2 ↗
57. Bergman L, Nemanich RJ (1995) Raman and photoluminescence analysis of stress state and impurity distribution in diamond thin-films. J Appl Phys 78:6709–6719. https://doi.org/10.1063/1.36049510.1063/1.360495 ↗
58. Nemanich RJ, Solin SA, Martin RM (1981) Light-scattering study of boron-nitride micro-crystals. Phys Rev B 23:6348–6356. https://doi.org/10.1103/PhysRevB.23.634810.1103/PhysRevB.23.6348 ↗
59. Ferrari AC, Robertson J (2000) Interpretation of Raman spectra of disordered and amorphous carbon. Phys Rev B 61:14095–14107. https://doi.org/10.1103/PhysRevB.61.1409510.1103/PhysRevB.61.14095 ↗
60. Osanai H, Nakamura K, Sasaki Y, Koriyama H, Kobayashi Y, Enta Y, Suzuki Y, Suemitsu M, Nakazawa H (2022) Effects of annealing temperature on the mechanical, optical, and electrical properties of hydrogenated, nitrogen-doped diamond-like carbon films. Thin Solid Films 745:139100. https://doi.org/10.1016/j.tsf.2022.13910010.1016/j.tsf.2022.139100 ↗
61. Nazari M, Hancock BL, Anderson J, Savage A, Piner EL, Graham S, Faili F, Oh S, Francis D, Twitchen D, Holtz M (2016) Near-ultraviolet micro-Raman study of diamond grown on GaN. Appl Phys Lett 108:031901. https://doi.org/10.1063/1.494020010.1063/1.4940200 ↗
62. Roy D, Barber ZH, Clyne TW (2003) Strain gradients along the growth direction in thin diamond film deposited on silicon wafer. J Appl Phys 94:136–139. https://doi.org/10.1063/1.157334710.1063/1.1573347 ↗
63. Yanchuk IB, Valakh MY, Vul’ AY, Golubev VG, Grudinkin SA, Feoktistov NA, Richter A, Wolf B (2004) Raman scattering, AFM and nanoindentation characterisation of diamond films obtained by hot filament CVD. Diam Relat Mater 13:266–269. https://doi.org/10.1016/j.diamond.2003.11.00110.1016/j.diamond.2003.11.001 ↗
64. Ager JW, Drory MD (1993) Quantitative measurement of residual biaxial stress by Raman-spectroscopy in diamond grown on a Ti alloy by chemical-vapor-deposition. Phys Rev B 48:2601–2607. https://doi.org/10.1103/PhysRevB.48.260110.1103/PhysRevB.48.2601 ↗
65. Guillemet T, Xie ZQ, Zhou YS, Park JB, Veillere A, Xiong W, Heintz JM, Silvain JF, Chandra N, Lu YF (2011) Stress and phase purity analyses of diamond films deposited through laser-assisted combustion synthesis. ACS Appl Mater Inter 3:4120–4125. https://doi.org/10.1021/am201010h10.1021/am201010h ↗
66. Watanabe H, Yamada N, Okaji M (2004) Linear thermal expansion coefficient of silicon from 293 to 1000 K. Int J Thermophys 25:221–236. https://doi.org/10.1023/B:Ijot.0000022336.83719.4310.1023/B:Ijot.0000022336.83719.43 ↗
67. Jacobson P, Stoupin S (2019) Thermal expansion coefficient of diamond in a wide temperature range. Diam Relat Mater 97:107469. https://doi.org/10.1016/j.diamond.2019.10746910.1016/j.diamond.2019.107469 ↗