journal article·2011-10

Effect of Al doping and deposition runs on structural and optical properties of In2S3 thin films grown by CBD

M. Kilani, B. Yahmadi, N. Kamoun Turki, M. Castagné

Journal of Materials Science· Volume 46· Issue 19
Publisher page

Abstract

β-In2−x Al x S3 thin films have been grown on glass substrate by chemical bath deposition for different value of Al concentration y = (([Al])/([In]))sol (0 ≤ y ≤ 5 at.%). Samples have been characterized using X-ray diffraction, atomic force microscopy and by spectrophotometric measurements. The influence of the increase of y ratio in the structural and optical properties are described and discussed in terms of crystallinity improvement. In order to increase film thickness of β-In2−x Al x S3, we have been realized multi-deposition system. The structural, the surface morphology as well as the optical properties seem to be improved as the film thickness is of about 1200 nm.
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Research context

OpenAlex topics: Chalcogenide Semiconductor Thin Films · Quantum Dots Synthesis And Properties · Semiconductor materials and interfaces

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