journal article·2021-06

Fracture mechanism of microporous Ag-sintered joint in a GaN power device with Ti/Ag and Ni/Ti/Ag metallization layer at different thermo-mechanical stresses

Dongjin Kim, Sangmin Lee, Chuantong Chen, Seung-Joon Lee, Shijo Nagao, Katsuaki Suganuma

Journal of Materials Science· Volume 56· Issue 16
Publisher page

Abstract

Ag sinter joining technology is emerging as a die attach material for next-generation power modules in high-temperature applications. Thermal shock test has revealed that the fracture characteristics and reliability of sintered Ag joint were influenced by thermo-mechanical stress. This was study conducted to understand the microstructure, vertical crack formation, and fracture behavior of sintered Ag joints which were designed with different metallization layers on a direct bonded aluminum (DBA) substrate, at different thermo-mechanical stresses during thermal shock tests. Two kinds of metallization layers were designed as Ti/Ag and Ni/Ti/Ag layers. A finite element model (FEM) simulation confirmed that the Ni layer prohibited Al hillock-like deformation and generates different thermo-mechanical stresses during the thermal shock test from − 50 °C to 250 °C. Depending on the degradation of the interfaces for both of the Ag-sintered joints, the sintered Ag grain necking thickness and microstructure characteristics including the Ag grain structures, which have a dominant influence on the bonding strength in terms of long-term reliability, are considerably different from the results by an electron back scatter diffraction (EBSD) analysis. This paper proposes a novel metallization technology that can induce joint fracture with complete recrystallization of sintered Ag joints by effectively suppressing interfacial degradation. The mechanism of this technology was systematically analyzed through experiments and FEM simulations.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Electronic Packaging and Soldering Technologies · Aluminum Alloys Composites Properties · Advanced Welding Techniques Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (41)

Show source-provided references
1. Chin HS, Cheong KY, Ismail AB (2010) A review on die attach materials for SiC-based high-temperature power devices. Metall Mater Trans B 41:824–832. https://doi.org/10.1007/s11663-010-9365-510.1007/s11663-010-9365-5 ↗
2. Chen C, Suganuma K (2019) Microstructure and mechanical properties of sintered Ag particles with flake and spherical shape from nano to micro size. Mater Des 162:311–321. https://doi.org/10.1016/j.matdes.2018.11.06210.1016/j.matdes.2018.11.062 ↗
3. Noh S, Choe C, Chen C, Suganuma K (2018) Heat-resistant die-attach with cold-rolled Ag sheet. Appl Phys Express 11(1):016501. https://doi.org/10.7567/APEX.11.01650110.7567/APEX.11.016501 ↗
4. Suganuma K, Nagao S, Sugahara T, Yokoi E, Zhang H, Jiu J (2016) Silver sinter joining and stress migration bonding for WBG die-attach. In 2016 International Symposium on 3D Power Electronics Integration and Manufacturing (3D-PEIM) vol 2, doi: https://doi.org/10.1109/3DPEIM.2016.757055410.1109/3DPEIM.2016.7570554 ↗
5. Liu X, He S, Nishikawa H (2016) Thermally stable Cu3Sn/Cu composite joint for high-temperature power device. Scr Mater 110:101–104. https://doi.org/10.1016/j.scriptamat.2015.08.01110.1016/j.scriptamat.2015.08.011 ↗
6. Knoerr M, Kraft S, Schletz A (2010) Reliability assessment of sintered nano-silver die attachment for power semiconductors. In 2010 12th Electronics Packaging Technology Conference. IEEE, (p 56–61) doi: https://doi.org/10.1109/EPTC.2010.570260510.1109/EPTC.2010.5702605 ↗
7. George E, Das D, Osterman M, Pecht M (2011) Thermal cycling reliability of lead-free high-temperature applications. IEEE Trans Device Mater Reliab 11:328–338. https://doi.org/10.1109/TDMR.2011.213410010.1109/TDMR.2011.2134100 ↗
8. Quintero PO, Mccluskey FP (2011) temperature cycling reliability of high-temperature lead-free die-attach technologies. IEEE Trans Device Mater Reliab 11:531–539. https://doi.org/10.1109/TDMR.2011.214011410.1109/TDMR.2011.2140114 ↗
9. George E, Pecht M (2016) Microelectronics reliability RoHS compliance in safety and reliability critical electronics cost reliability. Microelectron Reliab 65:1–7. https://doi.org/10.1016/j.microrel.2016.07.15010.1016/j.microrel.2016.07.150 ↗
10. Suganuma K (2001) Advances in lead-free electronics soldering. Curr Opin Solid State Mater Sci 5:55–64. https://doi.org/10.1016/S1359-0286(00)00036-X10.1016/S1359-0286(00)00036-X ↗
11. Lee J, Kim K, Suganuma K, Takenaka J, Hagio K (2005) Interfacial properties of Zn – Sn alloys as high temperature lead-free solder on Cu substrate. Mater Trans 46:2413–2418. https://doi.org/10.2320/matertrans.46.241310.2320/matertrans.46.2413 ↗
12. Kim S, Kim KS, Kim SS, Suganuma K, Izuta G (2009) Improving the reliability of Si die attachment with Zn-Sn-based high-temperature Pb-free solder using a TiN diffusion barrier. J Electron Mater 38:2668–2675. https://doi.org/10.1007/s11664-009-0928-710.1007/s11664-009-0928-7 ↗
13. Gusak AM, Tu KN, Chen C (2020) Extremely rapid grain growth in scallop-type Cu6Sn5 during solid–liquid interdiffusion reactions in micro-bump solder joints. Scr Mater 179:45–48. https://doi.org/10.1016/j.scriptamat.2020.01.00510.1016/j.scriptamat.2020.01.005 ↗
14. Telang AU, Bieler TR, Zamiri A, Pourboghrat F (2007) Incremental recrystallization/grain growth driven by elastic strain energy release in a thermomechanically fatigued lead-free solder joint. Acta Mater 55:2265–2277. https://doi.org/10.1016/j.actamat.2006.11.02310.1016/j.actamat.2006.11.023 ↗
15. Wang S, Li M, Ji H, Wang C (2013) Rapid pressureless low-temperature sintering of Ag nanoparticles for high-power density electronic packaging. Scr Mater 69:789–792. https://doi.org/10.1016/j.scriptamat.2013.08.03110.1016/j.scriptamat.2013.08.031 ↗
16. Qi K, Chen X, Lu GQ (2008) Effect of interconnection area on shear strength of sintered joint with nano-silver paste. Solder Surf Mt Technol 20:8–12. https://doi.org/10.1108/0954091081086143110.1108/09540910810861431 ↗
17. Kim MS, Nishikawa H (2014) Silver nanoporous sheet for solid-state die attach in power device packaging. Scr Mater 92:43–46. https://doi.org/10.1016/j.scriptamat.2014.08.01010.1016/j.scriptamat.2014.08.010 ↗
18. Yan JJ, Zou G, Wu AP, Ren J, Yan JJ, Hu A et al (2012) Pressureless bonding process using Ag nanoparticle paste for flexible electronics packaging. Scr Mater 66:582–585. https://doi.org/10.1016/j.scriptamat.2012.01.00710.1016/j.scriptamat.2012.01.007 ↗
19. Milhet X, Nait-Ali A, Tandiang D, Liu YJ, Van Campen D, Caccuri V et al (2018) Evolution of the nanoporous microstructure of sintered Ag at high temperature using in-situ X-ray nanotomography. Acta Mater 156:310–317. https://doi.org/10.1016/j.actamat.2018.06.04710.1016/j.actamat.2018.06.047 ↗
20. Kim D, Chen C, Pei C, Zhang Z, Nagao S, Suetake A et al (2019) Thermal shock reliability of a GaN die-attach module on DBA substrate with Ti/Ag metallization by using micron/submicron Ag sinter paste. Jpn J Appl Phys 58(SB):1510.7567/1347-4065/ab0278 ↗
21. Yu F, Cui J, Zhou Z, Fang K, Johnson RW, Hamilton MC (2017) Reliability of Ag sintering for power semiconductor die attach in high-temperature applications. IEEE Trans Power Electron 32:7083–7095. https://doi.org/10.1109/TPEL.2016.263112810.1109/TPEL.2016.2631128 ↗
22. Fan T, Zhang H, Shang P, Li C, Chen C, Wang J et al (2018) Effect of electroplated Au layer on bonding performance of Ag pastes. J Alloys Compd 731:1280–1287. https://doi.org/10.1016/j.jallcom.2017.09.27910.1016/j.jallcom.2017.09.279 ↗
23. Chen C, Suganuma K, Iwashige T, Sugiura K, Tsuruta K (2018) High-temperature reliability of sintered microporous Ag on electroplated Ag, Au, and sputtered Ag metallization substrates. J Mater Sci Mater Electron 29:1785–1797. https://doi.org/10.1007/s10854-017-8087-810.1007/s10854-017-8087-8 ↗
24. Noh S, Zhang H, Suganuma K (2018) Heat-resistant microporous Ag die-attach structure for wide band-gap power semiconductors. Materials 11:2531. https://doi.org/10.3390/ma1112253110.3390/ma11122531 ↗
25. Kim D, Chen C, Noh S, Lee SJ, Zhang Z, Kimoto Y et al (2019) Development of high-strength and superior thermal shock-resistant GaN/DBA die attach structure with Ag sinter joining by thick Ni metallization. Microelectron Reliab 100–101:113380. https://doi.org/10.1016/j.microrel.2019.06.07210.1016/j.microrel.2019.06.072 ↗
26. Kim D, Chen C, Lee SJ, Nagao S, Suganuma K (2020) Strengthening of DBA substrate with Ni/Ti/Ag metallization for thermal fatigue-resistant Ag sinter joining in GaN power modules. J Mater Sci Mater Electron 31:3715–3726. https://doi.org/10.1007/s10854-020-02930-w10.1007/s10854-020-02930-w ↗
27. Pei C, Chen C, Suganuma K, Fu G (2018) Thermal stability of silver paste sintering on coated copper and aluminum substrates. J Electron Mater 47:811–819. https://doi.org/10.1007/s11664-017-5857-210.1007/s11664-017-5857-2 ↗
28. Chen C, Nagao S, Zhang H, Jiu J, Sugahara T, Suganuma K, Iwashige T, Sugiura K, Tsuruta K (2017) Mechanical deformation of sintered porous Ag die attach at high temperature and its size effect for wide-bandgap power device design. J Electron Mater 46:1576–1586. https://doi.org/10.1007/s11664-016-5200-310.1007/s11664-016-5200-3 ↗
29. Chen C, Choe C, Kim D, Suganuma K (2020) Life time prediction of SiC power module by micron/submicron Ag sinter joining based on fatigue, creep and thermal properties from room temperature to high temperature. J Electron Mater. https://doi.org/10.1007/s11664-020-08410-510.1007/s11664-020-08410-5 ↗
30. Shen TD, Schwarz RB, Feng S, Swadener JG, Huang JY, Tang M et al (2007) Effect of solute segregation on the strength of nanocrystalline alloys: inverse hall-petch relation. Acta Mater 55:5007–5013. https://doi.org/10.1016/j.actamat.2007.05.01810.1016/j.actamat.2007.05.018 ↗
31. Thompson AW, Baskes MI, Flanagan WF (1973) The dependence of polycrystal work hardening on grain size. Acta Metall 21:1017–1028. https://doi.org/10.1016/0001-6160(73)90158-210.1016/0001-6160(73)90158-2 ↗
32. Chen C, Nagao S, Suganuma K, Jiu J, Sugahara T, Zhang H et al (2017) Macroscale and microscale fracture toughness of microporous sintered Ag for applications in power electronic devices. Acta Mater 129:41–51. https://doi.org/10.1016/j.actamat.2017.02.06510.1016/j.actamat.2017.02.065 ↗
33. Ri S, Saka M (2012) Diffusion–fatigue interaction effect on hillock formation in aluminum thin films under thermal cycle testing. Mater Lett 79:139–141. https://doi.org/10.1016/j.matlet.2012.03.10910.1016/j.matlet.2012.03.109 ↗
34. Kim D, Chen C, Nagao S, Suganuma K (2020) Mechanical characteristics and fracture behavior of GaN/DBA die-attached during thermal aging: pressure-less hybrid Ag sinter joint and Pb–5Sn solder joint. J Mater Sci Mater Electron 31:587–598. https://doi.org/10.1007/s10854-019-02563-810.1007/s10854-019-02563-8 ↗
35. Zhang Z, Chen C, Wu AT, Suganuma K (2019) Improvement of high-temperature thermal aging reliability of Ag–Au joints by modifying Ni/Au surface finish. J Mater Sci Mater Electron 30:20292–20301. https://doi.org/10.1007/s10854-019-02415-510.1007/s10854-019-02415-5 ↗
36. Chen C, Choe C, Kim D, Zhang Z, Long X, Zhou Z et al (2020) Effect of oxygen on microstructural coarsening behaviors and mechanical properties of Ag sinter paste during high-temperature storage from macro to micro. J Alloys Compd 834:155173. https://doi.org/10.1016/j.jallcom.2020.15517310.1016/j.jallcom.2020.155173 ↗
37. Chen C, Zhang Z, Wang Q, Zhang B, Gao Y, Sasamura T et al (2020) Robust bonding and thermal-stable Ag–Au joint on ENEPIG substrate by micron-scale sinter Ag joining in low temperature pressure-less. J Alloys Compd 828:154397. https://doi.org/10.1016/j.jallcom.2020.15439710.1016/j.jallcom.2020.154397 ↗
38. Kim D, Chen C, Suetake A, Choe C, Sugahara T, Nagao S et al (2018) Development of thermal shock-resistant of GaN/DBC die-attached module by using Ag sinter paste and thermal stress relaxation structure. Microelectron Reliab 88–90:779–787. https://doi.org/10.1016/j.microrel.2018.07.04410.1016/j.microrel.2018.07.044 ↗
39. Shen YF, Xue WY, Liu ZY, Zuo L (2010) Nanoscratching deformation and fracture toughness of electroless Ni-P coatings. Surf Coatings Technol 205:632–640. https://doi.org/10.1016/j.surfcoat.2010.07.06610.1016/j.surfcoat.2010.07.066 ↗
40. Dai W, Oropeza C, Lian K, Wang W (2006) Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures. Microsyst Technol 12:306–314. https://doi.org/10.1007/s00542-005-0056-010.1007/s00542-005-0056-0 ↗
41. Chen J, Bull SJ (2009) Finite element analysis of contact induced adhesion failure in multilayer coatings with weak interfaces. Thin Solid Films 517:3704–3711. https://doi.org/10.1016/j.tsf.2009.02.12110.1016/j.tsf.2009.02.121 ↗