journal article·2004-05

Study of polymer humidity sensor array on silicon wafer

Jing Wang, Kaihe Shi, Lihua Chen, Xiaojun Zhang

Journal of Materials Science· Volume 39· Issue 9
Publisher page

Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

Source: Not provided · Quality: missing

Research context

OpenAlex topics: Gas Sensing Nanomaterials and Sensors · Analytical Chemistry and Sensors · Advanced Sensor and Energy Harvesting Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (14)

Show source-provided references
1. Y. Sakai, Y. Sadaoka and M. Matsuguchi, Sens. Actuators B, 35/36 (1996), 85.10.1016/S0925-4005(96)02019-9 ↗
2. M. S. Gong, M. H. Lee and H. W. Rhee, ibid. 73 (2001) 185.10.1016/S0925-4005(00)00703-6 ↗
3. T. Maddanimath, I. S. Mulla, S. R. Sainkar, K. Vijayamohanan, K. I. Shaikh, A. S. Patil and S. P. Vernekar, ibid. 81 (2002) 141.10.1016/S0925-4005(01)00944-3 ↗
4. Y. Sakai, M. Matsuguchi and T. Hurakawa, ibid. 66 (2000) 135.10.1016/S0925-4005(00)00313-0 ↗
5. H. Noguchi, Y. Uchida, A. Nomura and S. I. Mori, J. Mater. Sci. Lett. 8 (1989) 1278.10.1007/BF00721493 ↗
6. Y. Li and M. J. Yang, Sensors and Actuators B 86 (2002) 155.10.1016/S0925-4005(02)00159-4 ↗
7. C. D. Feng, S. L. Sun, H. Wang, C. U. Segre and J. R. Stetter, ibid. 40 (1997) 217.10.1016/S0925-4005(97)80265-1 ↗
8. V. Bondarenka, S. Grebinskij, S. Mickevicius, V. Volkov and G. Zacharova, ibid. 28 (1995) 227.10.1016/0925-4005(95)01726-7 ↗
9. G. Huyberechts and L. Frisson, ibid. 26/27 (1995) 308.10.1016/0925-4005(94)01607-J ↗
10. G. Q. Li, P. T. Lai, S. H. Zeng, M. Q. Huang and B. Y. Liu, Appl. Phys. Lett. 66 (1995) 2436.10.1063/1.113965 ↗
11. G. Sbervegleri, R. Murri and N. Pinto, Sens. Actuators B 23 (1995) 177.10.1016/0925-4005(94)01270-R ↗
12. M. M. Cole, P. C. Joshi and M. H. Eriv, J. Appl. Phys. 89 (2001) 6336.10.1063/1.1366656 ↗
13. J. Wang, H. Wan and Q. H. Lin, Meas. Sci. Technol. 14 (2003) 172.10.1088/0957-0233/14/2/303 ↗
14. T. Zhang, L. Y. Sun, B. K. Xu, L. H. Chen, J. Wang, X. C. Kou and L. M. Zhang, Funct. Mater. 31 (2000) 79.