Giant piezoresistivity in polymer-derived amorphous SiAlCO ceramics
Source abstract
Abstract
The piezoresistive behavior of polymer-derived amorphous SiAlCO ceramic is studied in a temperature range of 25–300 °C. It is shown that the material exhibits a giant gage factor of 7000–16,000, much higher than that for any reported high-temperature materials. The result also reveals that the material exhibits a positive temperature-dependent piezoresistive stress coefficient within the temperature range. The unusual piezoresistivity of the material was attributed to the structure of the SiAlCO, which consists of highly disordered graphene-like carbon nanoclusters dispersed within an amorphous matrix comprising of SiC x O4−x tetrahedra. The huge piezoresistivity, together with the processibility and low-cost, make the material very promising for high-temperature sensor applications.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced ceramic materials synthesis · Ferroelectric and Piezoelectric Materials · Thermal properties of materials
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References (25)
Show source-provided references
1. Kovacs G (1998) Micromachined transducer sourcebook. WCB/McGraw-Hill, New York
2. Kanda Y, Suzuki K (1991) Origin of the shear piezoresistance coefficient-PI-44 of n-type silicon. Phys Rev B B43:6754–6756. doi: 10.1103/PhysRevB.43.675410.1103/PhysRevB.43.6754 ↗
3. Aslam M, Taher I, Masood A, Tamor M, Potter T (1992) Piezoresistivity in vapor-deposited diamond films. Appl Phys Lett 60(23):2923–2925. doi: 10.1063/1.10682110.1063/1.106821 ↗
4. Sahli S, Aslam DM (1998) Ultra-high sensitivity intra-grain poly-diamond piezoresistors. Sens Actuators A 71:193–197. doi: 10.1016/S0924-4247(98)00181-210.1016/S0924-4247(98)00181-2 ↗
5. Zhang X, Pan Y, Zheng Q, Yi X (2001) Piezoresistance of conductor filled insulator composites. Polym Int 50:229–236. doi: 10.1002/1097-0126(200102)50:210.1002/1097-0126(200102)50:2<229::AID-PI612>3.0.CO;2-U ↗
6. Shor JS, Goldstein D, Kurtz AD (1993) Characterization of n-type beta-SiC as a piezoresistor. IEEE Trans Electron Devices 40:1093–1099. doi: 10.1109/16.21473410.1109/16.214734 ↗
7. Toriyama T, Sugiyama S (2002) Analysis of piezoresistance in n-type beta-SiC for high-temperature mechanical sensors. Appl Phys Lett 81:2797–2799. doi: 10.1063/1.151365210.1063/1.1513652 ↗
8. Zhang L, Wang Y, Wei Y, Xu W, Fang D, Zhai L, Lin K, An L (2008) A silicon carbonitride ceramic with anomalously high piezoresistivity. J Am Ceram Soc 91:1346–1349. doi: 10.1111/j.1551-2916.2008.02275.x10.1111/j.1551-2916.2008.02275.x ↗
9. Wang Y, Zhang L, Fan Y, Jiang D, An L (2009) Stress dependent piezoresistivity in tunneling-percolation systems. J Mater Sci 44(11):2814–2819. doi: 10.1007/s10853-009-3371-510.1007/s10853-009-3371-5 ↗
10. Terauds K, Sanchez-Jimenez PE, Raj R, Vakifahmetoglu C, Colombo P (2010) Giant piezoresistivity of polymer-derived ceramics at high temperatures. J Eur Ceram Soc 30:2203–2207. doi: 10.1016/j.jeurceramsoc.2010.02.02410.1016/j.jeurceramsoc.2010.02.024 ↗
11. Riedel R, Toma L, Janssen E, Nuffer J, Melz T, Hanselka H (2010) Piezoresistive effect in SiOC ceramics for integrated pressure sensors. J Am Ceram Soc 93:920–924. doi: 10.1111/j.1551-2916.2009.03496.x10.1111/j.1551-2916.2009.03496.x ↗
12. Riedel R, Kienzle A, Dressler W, Ruwisch L, Bill J, Aldinger F (1996) A silicoboron carbonitride ceramic stable to 2000 °C. Nature 382:796–798. doi: 10.1038/382796a010.1038/382796a0 ↗
13. Wang Y, Fei W, Fan T, Zhang L, Zhang W, An L (2006) Silicoaluminum carbonitride ceramic resist to oxidation/corrosion in water vapour. J Mater Res 21:1625–1628. doi: 10.1557/jmr.2006.021010.1557/jmr.2006.0210 ↗
14. Wang Y, Fei W, An L (2006) Oxidation/corrosion of polymer-derived SiAlCN ceramics in water vapor. J Am Ceram Soc 89(3):1079–1082. doi: 10.1111/j.1551-2916.2005.00791.x10.1111/j.1551-2916.2005.00791.x ↗
15. Riedel R, Ruwisch LM, An L, Raj R (1998) Amorphous silicoboron carbonitride ceramic with anomalously high resistance to creep. J Am Ceram Soc 81:3341–3344. doi: 10.1111/j.1151-2916.1998.tb02780.x10.1111/j.1151-2916.1998.tb02780.x ↗
16. Sarkar S, Chunder A, Fei W, An L, Zhai L (2008) Superhydrophobic mats of polymer-derived ceramic fibers. J Am Ceram Soc 91(8):2751–2755. doi: 10.1111/j.1551-2916.2008.02500.x10.1111/j.1551-2916.2008.02500.x ↗
17. Li-Anne L, Zhang W, An L, Cross T, Artin LD, Victor B, John WD, Rishi R, Kristi A (2001) Ceramic MEMS: new materials, innovative processing and future applications. Am Ceram Soc Bull 80:25–30
18. Tian Y, Shao G, Wang X, An L (2013) Fabrication of nano-scaled polymer-derived SiAlCN ceramic components using focused ion beam. J Micromech Microeng 23(9):095035. doi: 10.1088/0960-1317/23/9/09503510.1088/0960-1317/23/9/095035 ↗
19. Duan H, Li C, Yang W, Lojewski B, An L, Deng W (2013) Near-field electrospray printing of polymer-derived ceramics for micro-sensor applications. J MEMS 22(1):1–3. doi: 10.1109/JMEMS.2012.222693210.1109/JMEMS.2012.2226932 ↗
20. An L, Wang Y, Bharadwaj L, Fan Y, Zhang L, Jiang D, Sohn Y, Desai V, Kapat J, Chow L (2004) Silicoaluminum carbonitride with anomalously high resistance to oxidation and hot corrosion. Adv Eng Mater 6(5):337–340. doi: 10.1002/adem.20040001010.1002/adem.200400010 ↗
21. Wang Y, Fan Y, Zhang L, Burton S, Gan Z, An L (2005) Oxidation of polymer-derived SiAlCN ceramics. J Am Ceram Soc 88(11):3075–3080. doi: 10.1111/j.1551-2916.2005.00542.x10.1111/j.1551-2916.2005.00542.x ↗
22. Wang Y, Fan Y, Zhang L, Zhang W, An L (2006) Polymer-derived SiAlCN ceramics resist to oxidation at 1400 °C. Scr Mater 55:295–297. doi: 10.1016/j.scriptamat.2006.05.00410.1016/j.scriptamat.2006.05.004 ↗
23. Cao Y, Yang X, An L (2016) Electric conductivity and microstructure evolution of polymer-derived SiAlCO ceramics. Ceram Int 42(3):4033–4038. doi: 10.1016/j.ceramint.2015.11.07310.1016/j.ceramint.2015.11.073 ↗
24. Godet C (2003) Physics of bandtail hopping in disordered carbons. Diam Relat Mater 12:159–165. doi: 10.1016/S0925-9635(03)00017-710.1016/S0925-9635(03)00017-7 ↗
25. Ma B, Wang Y, Wang K, Li X, Zhang M, Liu J, An L (2015) Frequency-dependent conductive behavior of polymer-derived amorphous silicon carbonitride. Acta Mater 73:215–224. doi: 10.1016/j.actamat.2015.02.02010.1016/j.actamat.2015.02.020 ↗