Nanosecond laser surface processing of AlN ceramics
Source abstract
Abstract
To study the formation mechanism of a conductive layer in a laser-processed AlN ceramic plate, nanosecond laser treatment on an AlN ceramic was performed to generate an Al layer, which created conductivity on the surface. Changes in the resistance for different energy densities, pulse durations, line spacings and scanning speeds were studied by means of XPS and scanning electron microscopy. The results show that the resistance is inversely proportional to the duration of the pulse in the case of low energy density or low scanning speed. At a higher energy density or a higher scanning speed, the resistance is proportional to the duration of the pulse. The variation in the resistance as a function of line spacing is related to the energy density. As the energy density increases, the resistance value decreases slowly at first and then maintains an upward trend. The resistance is proportional to the scanning speed.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Surface Roughness and Optical Measurements · Adhesion, Friction, and Surface Interactions
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (24)
Show source-provided references
1. Liu WN, Han YL, Liu YW, Ma ZX, Han R (2015) Microstructure of alumina/aluminum nitride ceramics. B Chin Ceram Soc 34:2052–2056
2. Yuan WJ, Li XY, Qiu T (2013) Research progress on aluminum nitride with high thermal conductivity. Mater Rev 07:43–46
3. Yang QH, Wang HP, Xu SQ (2010) Research and prospect of preparation of aluminum nitride powder. J Ceram 31:651–657
4. Chen W, Miyamoto Y, Tojo T, Naito M (2012) Densification and properties of AlN ceramic bonded carbon. J Eur Ceram Soc 32:245–25010.1016/j.jeurceramsoc.2011.08.018 ↗
5. Chen W, Miyamoto Y (2014) Effect of graphite powders on formation of AlN ceramic-bonded carbon composites. Ceram Int 40:12597–1260110.1016/j.ceramint.2014.04.083 ↗
6. Coombs CF (2007) Printed circuits handbook, 6th edn. McGraw-Hill Education, New York
7. Bains N, Geraghty K, Goosey M (2006) New technologies for a sustainable printed circuit board manufacturing process: further results. Circuit World 32:19–2410.1108/03056120610683577 ↗
8. Ladou J (2006) Printed circuit board industry. Int J Hyg Environ Health 209:211–21910.1016/j.ijheh.2006.02.001 ↗
9. Li J, Shrivastava P, Gao Z, Zhang HC (2004) Printed circuit board recycling: a state-of-the-art survey. IEEE Trans Electron Packag 27:33–4210.1109/TEPM.2004.830501 ↗
10. Long JY, Fan PX, Gong DW, Zhang HJ, Zhong ML (2016) Ultrafast laser fabricated bio-inspired surfaces with special wettability. Chin J Lasers 43:7–2410.3788/CJL201643.0419001 ↗
11. Luque A, Flores G, Perdigones F, Medina D, Garcia J, Quero JM (2013) Single axis accelerometer fabricated using printed circuit board techniques and laser ablation. Sens Actuators A Phys 192:119–12310.1016/j.sna.2012.11.044 ↗
12. Plat K, Witzendorff PV, Suttmann O, Overmeyer L (2014) Laser processing of thin glass printed circuit boards with a picosecond laser at 515 nm wavelength. Phys Proced 56:983–99010.1016/j.phpro.2014.08.009 ↗
13. Piqué A, Mathews SA, Pratap B, Auyeung RCY, Karns BJ, Lakeou S (2006) Embedding electronic circuits by laser direct-write. Microelectron Eng 83:2527–253310.1016/j.mee.2006.06.004 ↗
14. Djuric SM, Dubourg G (2017) Fractal inductors on flexible plastic substrate fabricated by laser ablation. Microelectron Eng 168:10–1410.1016/j.mee.2016.10.008 ↗
15. Liébana S, Jones LJ, Drago GA, Pittson RW, Liu D, Perrie W, Hart JP (2016) Design and development of novel screen-printed microelectrode and microbiosensor arrays fabricated using ultrafast pulsed laser ablation. Sens Actuators B Chem 231:384–39210.1016/j.snb.2016.02.142 ↗
16. Kim KR, Cho JH, Lee NY, Kim HJ, Cho SH, Park HJ, Choi B (2016) High-precision and ultrafast UV laser system for next-generation flexible PCB drilling. J Manuf Syst 38:107–11310.1016/j.jmsy.2015.12.001 ↗
17. Zacharatos F, Makrygianni M, Geremia R, Biver E, Karnakis D, Leyder S, Puerto D, Delaporte P, Zergioti I (2016) Laser direct write micro-fabrication of large area electronics on flexible substrates. Appl Surf Sci 374:117–12310.1016/j.apsusc.2015.10.066 ↗
18. Hirayama Y, Yabe H, Obara M (2001) Selective ablation of AlN ceramic using femtosecond, nanosecond and microsecond pulsed laser. J Appl Phys 89:2943–294910.1063/1.1342805 ↗
19. Stolz B, Backes G, Gillner A, Kreutz E (1997) Selective surface modification of ceramics with laser radiation. Appl Surf Sci 109–110:242–24810.1016/S0169-4332(96)00916-6 ↗
20. Feng YB, Yang B, Dai YN (2014) Thermodynamics on formation of C, Al4C3 and Al2O3 in AlCl disproportionation process in vacuum to produce aluminum. Trans Nonferrous Met Soc 24:3366–337110.1016/S1003-6326(14)63478-6 ↗
21. Pavlyuchkov D, Fabrichnaya O, Herrmann M (2012) Thermodynamic assessments of the Al2O3–Al4C3–AlN and Al4C3–AlN–SiC systems. J Phase Equilib Diffus 33:357–36810.1007/s11669-012-0073-5 ↗
22. Ushijima M, Hara H, Muramatsu A, Kuwahara T (2010) The operating characteristics of a ducted rocket in the Mars atmosphere. AIAA J 2514(6):2010–6999
23. Yang D, Yu Z, Fan L (2003) Al4C3 hydration thermochemical analysis for burned carbon-containing refractories with Al. Chin Refract 12:19–22
24. Yao Y, Chen H, Zhang W (2005) Time scale effects in laser material removal: a review. Int J Adv Manuf Technol 26:598–60810.1007/s00170-003-2026-y ↗