High-Purity Copper Structures from a Perfluorinated Copper Carboxylate Using Focused Electron Beam Induced Deposition and Post-Purification
Source abstract
Abstract
The electron-induced modification of volatile physisorbed metal–organic molecules is the key process in focused electron beam induced deposition (FEBID). In this work, the perfluorinated copper carboxylate [Cu2(μ-O2CC2F5)4], (Cu2(pfp)4), was implemented in FEBID, as it has the highest metal-to-carbon ratio Cu/C = 1:6 compared to other Cu precursors used so far. FEBID was obtained within a small temperature window of 120–130 °C. Transmission electron microscopy verified the presence of metal(oxide) nanocrystals within a carbonaceous matrix. The chemical composition analysis revealed the loss of about 80% of ligand material during the electron-induced dissociation. The copper nanocrystals oxidized within a few minutes in films <80 nm upon exposure to ambient conditions, while they were protected by a carbon–fluorine-containing matrix in thicker areas of the deposits. A two-step post-growth annealing procedure with subsequent oxidizing and reducing atmosphere was used to purify the deposits. Pure copper crystals were formed in this step.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced Electron Microscopy Techniques and Applications · Electron and X-Ray Spectroscopy Techniques · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Laboratory for Mechanics of Materials and Nanostructures, Empa—Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
Faculty of Physics and Applied Computer Science, AGH University of Science and Technology, Al. Mickiewicza 30, 30-059 Kraków, Poland
Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87 100 Toruń, Poland
Laboratory for Advanced Materials Processing, Empa—Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland
Funding
Schweizerischer Nationalfonds zur F?rderung der Wissenschaftlichen Forschung · H2020 Marie Sklodowska-Curie Actions · Uniwersytet Mikolaja Kopernika w Toruniu · European Cooperation in Science and Technology
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