journal article·2001-12

Preparation and characterization of TiO2 thin films by the sol-gel process

Tianfa Wen, Jianping Gao, Juyun Shen, Zhongshen Zhou

Journal of Materials Science· Volume 36· Issue 24
Publisher page

Abstract

Titanium dioxide (TiO2) thin films have been prepared on microscope slide by the sol-gel process. The preparation of covering solution is investigated with the method of orthogonal experimental design, and the heat treatment temperature and time, which influenced on the films properties are discussed. And the TiO2 thin films had been studied by the means of differential thermal analysis (DTA), X-ray diffraction (XRD) and scanning electron microscopy (SEM).
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Phase-change materials and chalcogenides · Liquid Crystal Research Advancements · Photonic and Optical Devices

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References (13)

Show source-provided references
1. T. Fuyuki and H. Matsunami, Jpn. J. Appl. Phys. 25 (1986) 1288.10.1143/JJAP.25.1288 ↗
2. P. A. Bertrand and P. D. Fleischauer, Thin Solid Films 103 (1983) 167.10.1016/0040-6090(83)90433-9 ↗
3. H. Schroder, in “Physics of Thin Films,” Vol. 5: G. Hass and R. E. Thun (Academic, New York 1969) p. 87.
4. H. K. Pulker, “Thin Film Science and Technology,” Vol. 6: Coatings on Glass (Elsevier, Amsterdam, 1984).
5. B. E. Yoldas and T. W. O'keefe, Appl. Opt. 18 (1979) 3133.10.1364/AO.18.003133 ↗
6. B. E. Yoldas, ibid. 21 (1982) 2960.10.1364/AO.21.002960 ↗
7. D. Duohong, E. Borgarello and M. Gratzel, J. Am. Chem. Soc. 103 (1981) 4685.10.1021/ja00406a004 ↗
8. S. Nishimeto, B. Ohtani, A. Sakamoto and T. Kagiya, Nippon Kagaku Kaishi 246 (1984) 52.
9. Jiong-Ping Lu, Jengdaw Wang AND Rishi Raj, Thin Solid Films 204 (1991) L13.10.1016/0040-6090(91)90488-J ↗
10. N. Nabavi, S. Doeuff, C. Sanchez and J. Livage, Mater. Sci. Eng. B 3 (1989) 203.10.1016/0921-5107(89)90202-X ↗
11. B. Morris Henry, U.S. Patent, 4,200,474, 1978.
12. M. Lottiaux, C. Boulesteix, G. Nihoul, et al., Thin Solid Films 170 (1989) 107.10.1016/0040-6090(89)90627-5 ↗
13. M. H. Suhail, G. Mohan Rao and S. Mohan, J. Appl. Phys. 71(3) (1992) 1421.10.1063/1.351264 ↗