An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas
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OpenAlex topics: Copper Interconnects and Reliability · Plasma Diagnostics and Applications · Metal and Thin Film Mechanics
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References (20)
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1. B. V. Tkachuk, V. V. Bushin, V. M. Kolotyrkim and V. M. Smetankina, Polym. Sci. USSR 9 (1967) 2018.10.1016/0032-3950(67)90030-5 ↗
2. A. M. Wróbel, J. E. Klemberg, M. R. Wertheimer and H. P. Schreiber, J. Macromol. Sci. Chem. A 15 (1981) 197.10.1080/00222338108066441 ↗
3. A. K. Hays, Proc. Electrochem. Soc. 82–6 (1982) 75.
4. M. R. Wertheimer, J. E. Klemberg-Sapieha, H. P. Schreiber, Thin Solid Films 115 (1984) 109.10.1016/0040-6090(84)90512-1 ↗
5. V. Krishnamurthy, I. A. Kamel and Y. Wei, J. Appl. Polym. Sci. 38 (1989) 605.10.1002/app.1989.070380402 ↗
6. Y. M. Tsai, F. J. Boerio, W. J. van Ooij, G. K. Kim and T. Rau, Surf. Inter. Anal., 23 (1995) 261.10.1002/sia.740230502 ↗
7. P. K. Tien, G. Smolinsky and R. J. Martin, Appl. Opt. 11 (1972) 637.10.1364/AO.11.000637 ↗
8. J. Sakata, M. Yamamoto and M. Hirai, J. Appl. Polym. Sci. 31 (1986) 1999.10.1002/app.1986.070310704 ↗
9. H. Yasuda, (ed.), “Plasma Polymerisation”, (Academic Press, London, 1985).
10. R. d'Agostino (ed.), “Plasma deposition, treatment, and etching of polymers” (Academic Press, 1990).
11. R. A. Assink, A. K. Hays, R. W. Bild and B. L. Hawkins, J. Vac. Sci. Technol. A3 (1985) 2629.10.1116/1.572802 ↗
12. A. M. Wróbel, J. Macromol. Sci. Chem. A22 (1985) 1089.10.1080/00222338508063316 ↗
13. M. Gazicki, A. M. Wróbel and M. Krystewski, J. Appl. Polym. Sci. Appl. Polym. Symp. 38 (1984) 1.
14. Idem,, J. Appl. Polym. Sci. 21 (1977) 2013.10.1002/app.1977.070210801 ↗
15. A. M. Wróbel, M. Krystewski and M. Gazicki, J. Macromol. Sci. Chem. A20 (1983) 583.10.1080/00222338308061795 ↗
16. I. Tajima and M. Yamamoto, J. Polym. Sci. Polym. Chem. Edn 23 (1985) 615.10.1002/pol.1985.170230303 ↗
17. D. T. Clarke and H. R. Thomas, ibid.— 15 (1977) 283.
18. G. Beamson and D. Briggs, “High Resolution XPS of Organic Polymers—The Scienta ESCA300 Database” (Wiley, Chichester, 1992) p. 72.
19. R. J. Ward and B. J. Wood, Surf. Interface Anal. 18 (1992) 679.10.1002/sia.740180908 ↗
20. P. V. Wright and M. S. Beevers, in “Cyclic Polymers”, edited by J. A. Semlyen (Elsevier Applied Science, Amsterdam 1986) p. 85.10.1007/978-94-009-4175-5_3 ↗