Micro/nanoengineering of functionalized metal surfaces based on short/ultra-short-pulsed lasers: a review
Source abstract
Abstract
With the advancement of micro/nanotechnology, precise control of the interaction between light and matter at the micro/nanoscale is crucial for successful material processing and surface functionalization. Ultrafast lasers with ultra-short pulses have gained attention due to their high spatial resolution and low thermal damage, enabling extremely smooth and precise machining on various metal surfaces. At the same time, shorter pulse nanosecond lasers, which have a wider application range, strike a balance between achieving high-precision microfabrication and mitigating adverse thermal effects caused by millisecond lasers. By adjusting laser processing parameters, it is possible to create large-scale micro/nanostructures with complex shapes, delicate textures, and special functionalities, applicable in fields such as optics, electronics, and biomedicine. Short/ultrafast pulse laser fabrication technology opens up more possibilities and prospects for the realization of diverse functional micro/nanostructures. This comprehensive review provides an overview of the interaction mechanisms between short/ultra-short-pulse laser micro/nanoprocessing and materials. By integrating theoretical models such as the two-temperature model and the Drude–Lorentz model, along with comprehensive numerical simulation methods, a brief summary of the ablation behavior of metal surfaces under short/ultra-short-pulse lasers is provided. Furthermore, we delve into the controllability of microstructures, laser-induced periodic surface structures at the nanoscale, and other types of nanostructures under different processing conditions. Thorough analysis and discussion are conducted from multiple perspectives, including surface topography and functional impacts. Subsequently, the focus shifts to the functionalization of metal surfaces with micro/nanostructures, and an in-depth investigation and review are conducted in areas such as surface wettability, bio-inspired surfaces, optical diffraction, and advanced biomedicine. Finally, the advantages and limitations of laser texturing processing techniques are discussed, and the future development of functionalized metal surfaces is anticipated.
Source: expertdata · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Material Processing Techniques · Laser-Ablation Synthesis of Nanoparticles · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
Show source-provided references
1. Sugioka K, Cheng Y (2014) Ultrafast lasers—reliable tools for advanced materials processing. Light Sci Appl 3:e149–e149. https://doi.org/10.1038/lsa.2014.3010.1038/lsa.2014.30 ↗
2. Liu X-Q, Chen Q-D, Guan K-M, Ma Z-C, Yu Y-H, Li Q-K, Tian Z-N, Sun H-B (2017) Dry-etching-assisted femtosecond laser machining: Dry-etching-assisted femtosecond laser machining. Laser Photonics Rev 11:1600115. https://doi.org/10.1002/lpor.20160011510.1002/lpor.201600115 ↗
3. Chambonneau M, Li Q, Fedorov VYu, Blothe M, Schaarschmidt K, Lorenz M, Tzortzakis S, Nolte S (2021) Taming ultrafast laser filaments for optimized semiconductor-metal welding. Laser Photonics Rev 15:2000433. https://doi.org/10.1002/lpor.20200043310.1002/lpor.202000433 ↗
4. Ródenas A, Gu M, Corrielli G, Paiè P, John S, Kar AK, Osellame R (2019) Three-dimensional femtosecond laser nanolithography of crystals. Nature Photon 13:105–109. https://doi.org/10.1038/s41566-018-0327-910.1038/s41566-018-0327-9 ↗
5. Penilla EH, Devia-Cruz LF, Wieg AT, Martinez-Torres P, Cuando-Espitia N, Sellappan P, Kodera Y, Aguilar G, Garay JE (2019) Ultrafast laser welding of ceramics. Science 365:803–808. https://doi.org/10.1126/science.aaw669910.1126/science.aaw6699 ↗
6. Jia X, Chen Y, Liu L, Wang C, Duan J (2022) Combined pulse laser: Reliable tool for high-quality, high-efficiency material processing. Opt Laser Technol 153:108209. https://doi.org/10.1016/j.optlastec.2022.10820910.1016/j.optlastec.2022.108209 ↗
7. Liang W, Zhu L, Li W, Liu H (2015) Facile fabrication of a flower-like CuO/Cu(OH)2 nanorod film with tunable wetting transition and excellent stability. RSC Adv 5:38100–38110. https://doi.org/10.1039/C5RA04359J10.1039/C5RA04359J ↗
8. Rao AV, Latthe SS, Mahadik SA, Kappenstein C (2011) Mechanically stable and corrosion resistant superhydrophobic sol–gel coatings on copper substrate. Appl Surf Sci. https://doi.org/10.1016/j.apsusc.2011.01.09910.1016/j.apsusc.2011.01.099 ↗
9. Wilkinson M, Ka A, Basahel SN, Carmalt CJ, Parkin IP (2013) Combinatorial atmospheric pressure chemical vapor deposition of graded TiO2−VO2 mixed-phase composites and their dual functional property as self-cleaning and photochromic window coatings. ACS Comb Sci. https://doi.org/10.1021/co400027p10.1021/co400027p ↗
10. Sun C, Ji S, Wang H, Wang X, Wang R (2022) Effect of surface reconstruction induced by different electrochemical methods on hydrogen evolution performance of Ni2P array catalysts. Int J Hydrog Energy 47:17097–17106. https://doi.org/10.1016/j.ijhydene.2022.03.18610.1016/j.ijhydene.2022.03.186 ↗
11. Celia E (2013) Recent advances in designing superhydrophobic surfaces. J Colloid Interface Sci. https://doi.org/10.1016/j.jcis.2013.03.04110.1016/j.jcis.2013.03.041 ↗
12. Su J (2016) Fabrication of super-microporous nanocrystalline zirconia with high thermal stability. Chem Phys Lett 5:4. https://doi.org/10.1016/j.cplett.2016.03.00310.1016/j.cplett.2016.03.003 ↗
13. Liu Y, Wu M, Zhang Z, Lu J, Xu K, Zhu H, Wu Y, Wang B, Lei W (2023) A review on applications of functional superhydrophobic surfaces prepared by laser biomimetic manufacturing. J Mater Sci 58:3421–3459. https://doi.org/10.1007/s10853-023-08217-910.1007/s10853-023-08217-9 ↗
14. Yang Y, Yang J, Xue L, Guo Y (2010) Surface patterning on periodicity of femtosecond laser-induced ripples. Appl Phys Lett 97:141101. https://doi.org/10.1063/1.349578510.1063/1.3495785 ↗
15. Fadeeva E, Chichkov B (2018) Biomimetic liquid-repellent surfaces by ultrafast laser processing. Appl Sci. https://doi.org/10.3390/app809142410.3390/app8091424 ↗
16. Barthlott W, Neinhuis C (1997) Purity of the sacred lotus, or escape from contamination in biological surfaces. Planta 202:1–8. https://doi.org/10.1007/s00425005009610.1007/s004250050096 ↗
17. Gao X, Jiang L (2004) Water-repellent legs of water striders. Nature 432:36–36. https://doi.org/10.1038/432036a10.1038/432036a ↗
18. Zheng Y, Gao X, Jiang L (2007) Directional adhesion of superhydrophobic butterfly wings. Soft Matter. https://doi.org/10.1039/B612667G10.1039/B612667G ↗
19. Farooqi IS, Keogh JM, Kamath S, Jones S, Gibson WT, Trussell R, Jebb SA, Lip GYH, O’Rahilly S (2001) Water capture by a desert beetle. Nature 414:34–35. https://doi.org/10.1038/3510211210.1038/35102112 ↗
20. Fang RH, Kroll AV, Gao W, Zhang L (2018) Cell membrane coating nanotechnology. Adv Mater. https://doi.org/10.1002/adma.20170675910.1002/adma.201706759 ↗
21. Liu M, Wang S, Wei Z, Song Y, Jiang L (2009) Bioinspired design of a superoleophobic and low adhesive water/solid interface. Adv Mater 21:665–669. https://doi.org/10.1002/adma.20080178210.1002/adma.200801782 ↗
22. Guo Z, Liu W (2007) Biomimic from the superhydrophobic plant leaves in nature: binary structure and unitary structure. Plant Sci 172:1103–1112. https://doi.org/10.1016/j.plantsci.2007.03.00510.1016/j.plantsci.2007.03.005 ↗
23. Chen Z, Yang J, Liu H, Zhao Y, Pan R (2022) A short review on functionalized metallic surfaces by ultrafast laser micromachining. Int J Adv Manuf Technol 119:6919–6948. https://doi.org/10.1007/s00170-021-08560-810.1007/s00170-021-08560-8 ↗
24. Farooqi IS, Keogh JM, Kamath S, Jones S, Gibson WT, Trussell R, Jebb SA, Lip GYH, O’Rahilly S (2001) Partial leptin deficiency and human adiposity. Nature 414:34–35. https://doi.org/10.1038/3510211210.1038/35102112 ↗
25. Gao X, Yan X, Yao X, Xu L, Zhang K, Zhang J, Yang B, Jiang L (2011) The dry-style antifogging properties of mosquito compound eyes and artificial analogues prepared by soft lithography**. Adv Mater, 55390–393
26. Biswas S, Karthikeyan A, Kietzig A-M (2016) Effect of repetition rate on femtosecond laser-induced homogenous microstructures. Materials 9:1023. https://doi.org/10.3390/ma912102310.3390/ma9121023 ↗
27. Bonse J, Höhm S, Rosenfeld A, Krüger J (2013) Sub-100-nm laser-induced periodic surface structures upon irradiation of titanium by Ti:sapphire femtosecond laser pulses in air. Appl Phys A 110:547–551. https://doi.org/10.1007/s00339-012-7140-y10.1007/s00339-012-7140-y ↗
28. Koda K, Kobayashi W, Imai H, Tsukamoto M (2018) Formation of microstructures on Ni film surface by nanosecond laser irradiation. Appl Phys A 124:227. https://doi.org/10.1007/s00339-018-1635-010.1007/s00339-018-1635-0 ↗
29. Rosa B, Mognol P, Hascoët J (2015) Laser polishing of additive laser manufacturing surfaces. J Laser Appl 27:S29102. https://doi.org/10.2351/1.490638510.2351/1.4906385 ↗
30. Wang X, Jia Z, Ma J, Han D, Qi X, Gui C, Liu W (2022) Prediction method of radial heat-affected zone width in nanosecond pulsed laser ablation of TC4 titanium alloy. Int J Adv Manuf Technol 121:2663–2670. https://doi.org/10.1007/s00170-022-09408-510.1007/s00170-022-09408-5 ↗
31. Sassmannshausen A, Brenner A, Finger J (2021) Ultrashort pulse laser polishing by continuous surface melting. J Mater Process Technol 293:117058. https://doi.org/10.1016/j.jmatprotec.2021.11705810.1016/j.jmatprotec.2021.117058 ↗
32. Li Z, Zhang D, Su X, Yang S, Xu J, Ma R, Shan D, Guo B (2021) Removal mechanism of surface cleaning on TA15 titanium alloy using nanosecond pulsed laser. Opt Laser Technol 139:106998. https://doi.org/10.1016/j.optlastec.2021.10699810.1016/j.optlastec.2021.106998 ↗
33. Sakamoto H (2013) Practical definition method of laser ablation threshold in nano-second order pulse duration considering intensity distribution at focal point. JLMN 8:45–50. https://doi.org/10.2961/jlmn.2013.01.001010.2961/jlmn.2013.01.0010 ↗
34. Shivakoti I, Kibria G, Pradhan BB (2019) Predictive model and parametric analysis of laser marking process on gallium nitride material using diode pumped Nd:YAG laser. Opt Laser Technol 115:58–70. https://doi.org/10.1016/j.optlastec.2019.01.03510.1016/j.optlastec.2019.01.035 ↗
35. Shaheen ME, Gagnon JE, Fryer BJ (2016) Excimer laser ablation of aluminum: influence of spot size on ablation rate. Laser Phys 26:116102. https://doi.org/10.1088/1054-660X/26/11/11610210.1088/1054-660X/26/11/116102 ↗
36. Cao Y, Zhao X, Shin YC (2013) Analysis of nanosecond laser ablation of aluminum with and without phase explosion in air and water. J Laser Appl 25:032002. https://doi.org/10.2351/1.479403210.2351/1.4794032 ↗
37. Wang Y, Zhang M, Huang Y, Cao X, Dong Y, Zhao J, Li Y, Wang Y (2022) Ablation threshold modelling and validation of metal Nanosecond laser processing. Opt Commun 523:128608. https://doi.org/10.1016/j.optcom.2022.12860810.1016/j.optcom.2022.128608 ↗
38. Dasallas LL, Garcia WO (2018) Numerical simulation of femtosecond pulsed laser ablation of copper for oblique angle of incidence through two-temperature model. Mater Res Express 5:016518. https://doi.org/10.1088/2053-1591/aaa4e810.1088/2053-1591/aaa4e8 ↗
39. Wang Y, Zhang M, Huang Y, Cao X, Dong Y, Zhao J, Li Y, Wang Y (2022) Ablation threshold modelling and validation of metal nanosecond laser processing. Opt Commun. https://doi.org/10.1016/j.optcom.2022.12860810.1016/j.optcom.2022.128608 ↗
40. Furusawa K, Takahashi K, Kumagai H, Midorikawa K, Obara M (1999) Ablation characteristics of Au, Ag, and Cu metals using a femtosecond Ti:sapphire laser. Appl Phys A Mater Sci Process 69:S359–S366. https://doi.org/10.1007/s00339005141710.1007/s003390051417 ↗
41. Mannion PT, Magee J, Coyne E, O’Connor GM, Glynn TJ (2004) The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air. Appl Surf Sci 233:275–287. https://doi.org/10.1016/j.apsusc.2004.03.22910.1016/j.apsusc.2004.03.229 ↗
42. Fang RR, Zhang DM, Wei H, Hu DZ, Li ZH, Tan XY, Sun M, Yang FX (2008) A unified thermal model of thermophysical effects with pulse width from nanosecond to femtosecond. Eur Phys J Appl Phys 42:229–234. https://doi.org/10.1051/epjap:200806110.1051/epjap:2008061 ↗
43. Zhang J, Chen Y, Hu M, Chen X (2015) An improved three-dimensional two-temperature model for multi-pulse femtosecond laser ablation of aluminum. J Appl Phys 117:063104. https://doi.org/10.1063/1.490799010.1063/1.4907990 ↗
44. Saghebfar M, Tehrani MK, Darbani SMR, Majd AE (2017) Femtosecond pulse laser ablation of chromium: experimental results and two-temperature model simulations. Appl Phys A 123:28. https://doi.org/10.1007/s00339-016-0660-010.1007/s00339-016-0660-0 ↗
45. Starinskiy SV, Rodionov AA, Shukhov YG, Maximovskiy EA, Bulgakov AV (2019) Dynamics of nanosecond-laser-induced melting of tin in vacuum, air, and water. Appl Phys A 125:734. https://doi.org/10.1007/s00339-019-3028-410.1007/s00339-019-3028-4 ↗
46. Struleva EV, Komarov PS, Ashitkov SI (2019) Comparison of femtosecond laser ablation of gold and nickel. High Temp 57:659–662. https://doi.org/10.1134/S0018151X1905015810.1134/S0018151X19050158 ↗
47. Genieys T, Sentis M, Utéza O (2020) Investigation of ultrashort laser excitation of aluminum and tungsten by reflectivity measurements. Appl Phys A 126:263. https://doi.org/10.1007/s00339-020-3440-910.1007/s00339-020-3440-9 ↗
48. Peng Z, Yin J, Cui Y, Cao Y, Lu L, Yan Y, Hu Z (2022) Numerical and experimental investigation on pulsed nanosecond laser ablation processing of aluminum alloy. J Market Res 19:4708–4720. https://doi.org/10.1016/j.jmrt.2022.07.02910.1016/j.jmrt.2022.07.029 ↗
49. Wang Y, Zhang M, Dong Y, Zhao J, Zhu X, Li Y, Fan L, Leng H (2023) Morphology modelling and validation in nanosecond pulsed laser ablation of metallic materials. Precis Eng 79:34–42. https://doi.org/10.1016/j.precisioneng.2022.08.01010.1016/j.precisioneng.2022.08.010 ↗
50. Liu JM (1982) Simple technique for measurements of pulsed Gaussian-beam spot sizes. Opt Lett 7:196. https://doi.org/10.1364/OL.7.00019610.1364/OL.7.000196 ↗
51. Anisimov SI (1996) Vaporization of metal absorbing laser radiation. In: World Scientific Series in 20th Century Physics, World Scientific, pp 14–15. https://doi.org/10.1142/9789814317344_000210.1142/9789814317344_0002 ↗
52. Long J, Cao Z, Lin C, Zhou C, He Z, Xie X (2019) Formation mechanism of hierarchical micro- and nanostructures on copper induced by low-cost nanosecond lasers. Appl Surf Sci 464:412–421. https://doi.org/10.1016/j.apsusc.2018.09.05510.1016/j.apsusc.2018.09.055 ↗
53. Farid N, Harilal SS, Ding H, Hassanein A (2014) Emission features and expansion dynamics of nanosecond laser ablation plumes at different ambient pressures. J Appl Phys 115:033107. https://doi.org/10.1063/1.486216710.1063/1.4862167 ↗
54. Mazzi A, Miotello A (2017) Simulation of phase explosion in the nanosecond laser ablation of aluminum. J Colloid Interface Sci 489:126–130. https://doi.org/10.1016/j.jcis.2016.08.01610.1016/j.jcis.2016.08.016 ↗
55. Gattass RR, Mazur E (2008) Femtosecond laser micromachining in transparent materials. Nature Photon 2:219–225. https://doi.org/10.1038/nphoton.2008.4710.1038/nphoton.2008.47 ↗
56. Cheng J, Liu C-S, Shang S, Liu D, Perrie W, Dearden G, Watkins K (2013) A review of ultrafast laser materials micromachining. Opt Laser Technol 46:88–102. https://doi.org/10.1016/j.optlastec.2012.06.03710.1016/j.optlastec.2012.06.037 ↗
57. García-Vidal FJ, Pendry JB (1996) Collective theory for surface enhanced Raman scattering. Phys Rev Lett 77:1163–1166. https://doi.org/10.1103/PhysRevLett.77.116310.1103/PhysRevLett.77.1163 ↗
58. Anisimov SI (1974) Electron emission from metal surfaces exposed to ultrashort laser pulses. Zh Eksp Teor Fiz, 3
59. Watanabe W, Li Y, Itoh K (2016) Ultrafast laser micro-processing of transparent material. Opt Laser Technol 78:52–61. https://doi.org/10.1016/j.optlastec.2015.09.02310.1016/j.optlastec.2015.09.023 ↗
60. Niu CN, Han JY, Hu SP, Chao DY, Song XG, Howlader MMR, Cao J (2021) Fast and environmentally friendly fabrication of superhydrophilic-superhydrophobic patterned aluminum surfaces. Surfaces and Interfaces 22:100830. https://doi.org/10.1016/j.surfin.2020.10083010.1016/j.surfin.2020.100830 ↗
61. Li H, Li L, Huang R, Tan C, Yang J, Xia H, Chen B, Song X (2021) The effect of surface texturing on the laser-induced wetting behavior of AlSi5 alloy on Ti6Al4V alloy. Appl Surf Sci 566:150630. https://doi.org/10.1016/j.apsusc.2021.15063010.1016/j.apsusc.2021.150630 ↗
62. Lian Z, Xu J, Yu Z, Yu P, Yu H (2019) A simple two-step approach for the fabrication of bio-inspired superhydrophobic and anisotropic wetting surfaces having corrosion resistance. J Alloy Compd 793:326–335. https://doi.org/10.1016/j.jallcom.2019.04.16910.1016/j.jallcom.2019.04.169 ↗
63. Wenzel RN (1936) Resistance of solid surfaces to wetting by water. Ind Eng Chem 28:988–994. https://doi.org/10.1021/ie50320a02410.1021/ie50320a024 ↗
64. Bharatish A, Murthy HNN, Anand B, Madhusoodana CD, Praveena GS, Krishna M (2013) Characterization of hole circularity and heat affected zone in pulsed CO2 laser drilling of alumina ceramics. Opt Laser Technol 53:22–32. https://doi.org/10.1016/j.optlastec.2013.04.01010.1016/j.optlastec.2013.04.010 ↗
65. Yan Y, Ji L, Bao Y, Jiang Y (2012) experimental and numerical study on laser percussion drilling of thick-section alumina. J Mater Process Technol 212:1257–1270. https://doi.org/10.1016/j.jmatprotec.2012.01.01010.1016/j.jmatprotec.2012.01.010 ↗
66. Kacar E, Mutlu M, Akman E, Demir A, Candan L, Canel T, Gunay V, Sınmazcelik T (2009) Characterization of the drilling alumina ceramic using Nd:YAG pulsed laser. J Mater Process Technol 209:2008–2014. https://doi.org/10.1016/j.jmatprotec.2008.04.04910.1016/j.jmatprotec.2008.04.049 ↗
67. Ng GKL, Li L (2001) The e ect of laser peak power and pulse width on the hole geometry repeatability in laser percussion drilling. Opt Laser Technol, 1010.2351/1.5059416 ↗
68. Li J, Ji L, Hu Y, Bao Y (2016) Precise micromachining of yttria-tetragonal zirconia polycrystal ceramic using 532 nm nanosecond laser. Ceram Int 42:4377–4385. https://doi.org/10.1016/j.ceramint.2015.11.11810.1016/j.ceramint.2015.11.118 ↗
69. Vazquez-Martinez J, Gomez JS, Ares PM, Fernandez-Vidal S, Ponce MB (2018) Effects of laser microtexturing on the wetting behavior of Ti6Al4V alloy. Coatings 8:145. https://doi.org/10.3390/coatings804014510.3390/coatings8040145 ↗
70. Jagdheesh R (2014) Fabrication of a superhydrophobic Al2O3 surface using picosecond laser pulses. Langmuir 30:12067–12073. https://doi.org/10.1021/la503352710.1021/la5033527 ↗
71. Li J, Xu J, Lian Z, Yu Z, Yu H (2020) Fabrication of antireflection surfaces with superhydrophobic property for titanium alloy by nanosecond laser irradiation. Opt Laser Technol 126:106129. https://doi.org/10.1016/j.optlastec.2020.10612910.1016/j.optlastec.2020.106129 ↗
72. Birnbaum M (1965) Semiconductor surface damage produced by ruby lasers. J Appl Phys 36:3688–3689. https://doi.org/10.1063/1.170307110.1063/1.1703071 ↗
73. van Driel HM, Sipe JE, Young JF (1982) Laser-induced periodic surface structure on solids: a universal phenomenon. Phys Rev Lett 49:1955–1958. https://doi.org/10.1103/PhysRevLett.49.195510.1103/PhysRevLett.49.1955 ↗
74. Bonse J, Gräf S (2020) Maxwell meets Marangoni: a review of theories on laser-induced periodic surface structures. Laser Photonics Rev. https://doi.org/10.1002/lpor.20200021510.1002/lpor.202000215 ↗
75. Wu X, Zheng L, Wu D (2005) Fabrication of superhydrophobic surfaces from microstructured ZnO-based surfaces via a wet-chemical route. Langmuir 21:2665–2667. https://doi.org/10.1021/la050275y10.1021/la050275y ↗
76. Orazi L, Romoli L, Schmidt M, Li L (2021) Ultrafast laser manufacturing: from physics to industrial applications. CIRP Ann 70:543–566. https://doi.org/10.1016/j.cirp.2021.05.00710.1016/j.cirp.2021.05.007 ↗
77. Vorobyev AY, Guo C (2015) Multifunctional surfaces produced by femtosecond laser pulses. J Appl Phys 117:033103. https://doi.org/10.1063/1.490561610.1063/1.4905616 ↗
78. Sciancalepore C, Gemini L, Romoli L, Bondioli F (2018) Study of the wettability behavior of stainless steel surfaces after ultrafast laser texturing. Surf Coat Technol 352:370–377. https://doi.org/10.1016/j.surfcoat.2018.08.03010.1016/j.surfcoat.2018.08.030 ↗
79. Rukosuyev MV, Lee J, Cho SJ, Lim G, Jun MBG (2014) One-step fabrication of superhydrophobic hierarchical structures by femtosecond laser ablation. Appl Surf Sci 313:411–417. https://doi.org/10.1016/j.apsusc.2014.05.22410.1016/j.apsusc.2014.05.224 ↗
80. Jia TQ, Chen HX, Huang M, Zhao FL, Qiu JR, Li RX, Xu ZZ, He XK, Zhang J, Kuroda H (2055) Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses. Phys Rev B 4
81. Yang T, Qiao X, Rong Q, Bao W (2017) Fiber Bragg gratings inscriptions in multimode fiber using 800 nm femtosecond laser for high-temperature strain measurement. Opt Laser Technol 93:138–142. https://doi.org/10.1016/j.optlastec.2017.01.03310.1016/j.optlastec.2017.01.033 ↗
82. Zhou S (2022) Hybrid periodic microstructures fabricated on chromium metal surface using ns-DLIP scanning combined with LIPSS. Opt Laser Technol 1310.1016/j.optlastec.2022.108261 ↗
83. Florian C, Kirner SV, Krüger J, Bonse J (2020) Surface functionalization by laser-induced periodic surface structures. J Laser Appl 32:022063. https://doi.org/10.2351/7.000010310.2351/7.0000103 ↗
84. Gnilitskyi I, Derrien TJ-Y, Levy Y, Bulgakova NM, Mocek T, Orazi L (2017) High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity. Sci Rep 7:8485. https://doi.org/10.1038/s41598-017-08788-z10.1038/s41598-017-08788-z ↗
85. Ardron M (2014) A practical technique for the generation of highly uniform LIPSS. Appl Surf Sci. https://doi.org/10.1016/j.apsusc.2014.05.15410.1016/j.apsusc.2014.05.154 ↗
86. Jia T, Baba M, Suzuki M, Ganeev RA, Qiu J, Wang X, Li R, Xu Z (2008) Fabrication of two-dimensional periodic nanostructures by two-beam interference of femtosecond pulses. Opt Express. https://doi.org/10.1364/OE.16.00187410.1364/OE.16.001874 ↗
87. Jia X, Jia T, Zhang Y, Xiong P, Feng D, Sun Z, Xu Z (2010) Optical absorption of two dimensional periodic microstructures on ZnO crystal fabricated by the interference of two femtosecond laser beams. Opt Express 18:14401. https://doi.org/10.1364/OE.18.01440110.1364/OE.18.014401 ↗
88. Vorobyev AY, Guo C (2007) Femtosecond laser structuring of titanium implants. Appl Surf Sci 253:7272–7280. https://doi.org/10.1016/j.apsusc.2007.03.00610.1016/j.apsusc.2007.03.006 ↗
89. Vorobyev AY, Guo C (2013) Direct femtosecond laser surface nano/microstructuring and its applications: direct femtosecond laser surface nano/microstructuring and its applications. Laser Photonics Rev 7:385–407. https://doi.org/10.1002/lpor.20120001710.1002/lpor.201200017 ↗
90. Wu C, Crouch CH, Zhao L, Carey JE, Younkin R, Levinson JA, Mazur E, Farrell RM, Gothoskar P, Karger A (2001) Near-unity below-band-gap absorption by microstructured silicon. Appl Phys Lett 78:1850–1852. https://doi.org/10.1063/1.135884610.1063/1.1358846 ↗
91. Zorba V, Stratakis E, Barberoglou M, Spanakis E, Tzanetakis P, Anastasiadis SH, Fotakis C (2008) Biomimetic artificial surfaces quantitatively reproduce the water repellency of a lotus leaf. Adv Mater 20:4049–4054. https://doi.org/10.1002/adma.20080065110.1002/adma.200800651 ↗
92. Baldacchini T, Carey JE, Zhou M, Mazur E (2006) Superhydrophobic surfaces prepared by microstructuring of silicon using a femtosecond laser. Langmuir 22:4917–4919. https://doi.org/10.1021/la053374k10.1021/la053374k ↗
93. Nayak BK, Iyengar VV, Gupta MC (2011) Efficient light trapping in silicon solar cells by ultrafast-laser-induced self-assembled micro/nano structures: efficient light trapping in Si solar cells. Prog Photovolt: Res Appl 19:631–639. https://doi.org/10.1002/pip.106710.1002/pip.1067 ↗
94. Myers RA, Farrell R, Karger AM, Carey JE, Mazur E (2006) Enhancing near-infrared avalanche photodiode performance by femtosecond laser microstructuring. Appl Opt 45:8825. https://doi.org/10.1364/AO.45.00882510.1364/AO.45.008825 ↗
95. Madore C, Piotrowski O, Landolt D (1999) Through-mask electrochemical micromachining of titanium. J Electrochem Soc 146:2526–2532. https://doi.org/10.1149/1.139196610.1149/1.1391966 ↗
96. Pető G, Karacs A, Pászti Z, Guczi L, Divinyi T, Joób A (2002) Surface treatment of screw shaped titanium dental implants by high intensity laser pulses. Appl Surf Sci 186:7–13. https://doi.org/10.1016/S0169-4332(01)00769-310.1016/S0169-4332(01)00769-3 ↗
97. Wennerberg A, Albrektsson T, Johansson C, Andersson B (1996) blasting material and surface topography. Biomaterials 17:810.1016/0142-9612(96)80750-2 ↗
98. Li J, Xiong D, Wu H, Huang Z, Dai J, Tyagi R (2010) Tribological properties of laser surface texturing and molybdenizing duplex-treated Ni-base alloy. Tribol Trans 53:195–202. https://doi.org/10.1080/1040200090309747810.1080/10402000903097478 ↗
99. Nayak BK, Gupta MC (2010) Self-organized micro/nano structures in metal surfaces by ultrafast laser irradiation. Opt Lasers Eng 48:940–949. https://doi.org/10.1016/j.optlaseng.2010.04.01010.1016/j.optlaseng.2010.04.010 ↗
100. Nayak BK, Gupta MC, Kolasinski KW (2008) Formation of nano-textured conical microstructures in titanium metal surface by femtosecond laser irradiation. Appl Phys A 90:399–402. https://doi.org/10.1007/s00339-007-4349-210.1007/s00339-007-4349-2 ↗