Size effects on the mechanical behavior of gold thin films
Source abstract
Abstract
The Membrane Deflection Experiment was used to test the mechanical response of freestanding thin film gold specimens. We present stress-strain curves obtained on films 0.3, 0.5, and 0.1 μm thick. Elastic modulus was consistently measured in the range of 53–55 GPa. Several size effects on the mechanical properties were observed including yield stress variations with membrane width and film thickness. It was observed that a width of 2.5 μm and a thickness of 0.5 μm correspond to major transitions in the material deformation behavior.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Copper Interconnects and Reliability · Advanced Surface Polishing Techniques
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References (12)
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