journal article·2026-03Open access

Enhanced thermal conductivity in sintered reaction-bonded silicon nitride through ammonia-assisted chemical processing

Ziqiang Yin, Yusen Duan, Sai An, Quanxing Ren, Shuo Yan, Minjie Huang, Fan Yang, Zhaohua Luo, Tianhao Li, Zhengren Huang, Yinsheng Li

Abstract

To improve the thermal conductivity of sintered reaction-bonded silicon nitride (SRBSN), ammonia pretreatment was introduced before the nitridation stage of silicon compact. The Si powder compact containing Y 2 O 3 –Sc 2 O 3 additives underwent ammonia pretreatment at 850 °C for 4 h, followed by nitridation in N 2 –H 2 atmosphere at 1450 °C for 6 h. The reaction-bonded silicon nitride (RBSN) compacts were densified through gas-pressure sintering at 1900 °C for 12 h under a nitrogen pressure of 1 MPa. The ammonia pretreatment removed inherent SiO 2 impurities from the Si powder, leading to enhanced nitridation efficiency, elevated α-Si 3 N 4 phase fraction, and increased N/O ratio in the intergranular secondary phase of RBSN. These processing in RBSN facilitated the formation of larger β-Si 3 N 4 grains, reduced lattice oxygen content, diminished grain boundary phases, and improved grain contiguity in the final SRBSN. Consequently, the ammonia-assisted chemical processing significantly increased the thermal conductivity of SRBSN from 116 W/(m·K) to 130 W/(m·K).
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Research context

OpenAlex topics: Advanced ceramic materials synthesis · Thermal properties of materials · Semiconductor materials and devices

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