journal article·2023-11-28Open access

Ultrathin Amorphous Gallium Oxide Vacuum Ultraviolet Photodetectors

Samuel H. Amsterdam, Anil U. Mane, Alex B. F. Martinson

ACS Applied Electronic Materials· Volume 5· Issue 11

Abstract

Gallium oxide is demonstrated to be an effective material for the detection of vacuum-ultraviolet (VUV) photons. Nanometer thick films of amorphous gallium oxide deposited by atomic layer deposition are found to exhibit large absorptivity in the VUV region 120–200 nm. We leverage the strong absorption of the ultrathin film to fabricate self-powered Schottky diode photodetectors using graphene as a VUV-transparent electrode. Responsivity throughout the VUV is calculated, significantly extending the demonstrated spectral range of gallium oxide-based photodetectors.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Ga2O3 and related materials · ZnO doping and properties · GaN-based semiconductor devices and materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Materials Science Division, Argonne National Laboratory, Lemont, Illinois 60439, United States

Applied Materials Division, Argonne National Laboratory, Lemont, Illinois 60439, United States

Funding

High Energy Physics

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