Brushed Crystallized Ultrathin Oxides: Recrystallization and Deep-Ultraviolet Imaging Application

Ultrawide band gap oxides have attracted attention for deep-ultraviolet (DUV) imaging detection which possesses a wide range of applications in space science, secure communication, and biological research. Here, we fabricated a large-scale ultrathin polycrystalline oxide with DUV-sensitivity by brushing liquid metal and recrystallization. On the basis of such ultrathin oxides, a linear-array photodetector is fabricated, thus realizing real-time imaging of DUV light spots. Single-pixel detectors show high responsivity (1.75 A/W) and excellent quantum efficiency (854.3%), which demonstrates that the two-step prepared ultrathin oxides with ultrawide band gap (4.9 eV) have met the requirement of DUV detection. The results demonstrate a high DUV-sensitivity of the ultrathin Ga2O3 array, showing great potential for DUV imaging detection.