Imaging of piezoelectric activity in laser-ablated c-axis-oriented LiNbO₃/ZnO thin film multilayer on glass using atomic force microscopy

A LiNbO₃/ZnO multilayer with a preferred c-axis orientation normal to the plane of the substrate was grown on glass and SiO₂/Si substrates by laser ablation. The piezoelectric activity in as-deposited films was demonstrated using a novel approach to the atomic force microscope. In the presence of an in-plane, low-frequency (0.1–5 Hz) alternating current electric field, we monitored and imaged the induced piezoelectric response normal to the film plane between two electrodes.