Surface stability of epitaxial SrRuO₃ thin films in vacuum

Surface stability of nearly defect-free epitaxial SrRuO₃ thin films grown by pulsed laser deposition was studied using low-energy electron diffraction (LEED), scanning tunneling microscopy (STM), and electron spectroscopies. Even after exposure to atmosphere, surfaces exhibited distinct LEED patterns providing evidence of unusual chemical stability. Surface order disappeared after heating to 200 °C in vacuum. To investigate, SrRuO₃ thin films were annealed up to 800 °C in high vacuum and examined for chemical state and topography. Formation of unit-cell deep pits and the Ru-rich particles begins at low temperatures. Hydrocarbon contamination on the surface contributes to this process.