Epitaxial Growth of Patterned SrBi₂Ta₂O₉ Lines by Channel Stamping

Patterned epitaxial SrBi₂Ta₂O₉ (SBT) lines with (00l) out-of-plane orientation were grown on a (001) SrTiO₃ substrate by the novel “channel stamping” method. Parallel channels in a poly(dimethylsiloxane) stamp were filled with a metalorganic precursor solution by spin coating. After solvent evaporation, the solid precursor within the channels was transferred to the substrate by stamping. Stamped precursor lines were pyrolyzed at 350 °C/1 h and then heated to 850 °C/1 h. It was shown by x-ray diffraction and scanning electron microscopy that patterned SBT lines were epitaxial, had a smooth surface with c-axis out-of-plane orientation, and a single in-plane orientation.