journal article·1990-11

Measurement of crystalline strain and orientation in diamond films grown by chemical vapor deposition

E. D. Specht, R. E. Clausing, L. Heatherly

Journal of Materials Research· Volume 5· Issue 11
Publisher page

Abstract

We have used x-ray diffraction to characterize diamond films grown in three characteristic morphologies by chemical vapor deposition. Each morphology has a fiber texture about the growth direction; we report the crystal axis aligned in this direction for each morphology. In all cases the average lattice constant agrees with that of bulk diamond; we report the range of strain in each sample.
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Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · High-pressure geophysics and materials · Metal and Thin Film Mechanics

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