Measurement of crystalline strain and orientation in diamond films grown by chemical vapor deposition
Source abstract
Abstract
We have used x-ray diffraction to characterize diamond films grown in three characteristic morphologies by chemical vapor deposition. Each morphology has a fiber texture about the growth direction; we report the crystal axis aligned in this direction for each morphology. In all cases the average lattice constant agrees with that of bulk diamond; we report the range of strain in each sample.
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · High-pressure geophysics and materials · Metal and Thin Film Mechanics
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References (24)
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1. Joubert · J. Electrochem. Soc. · 1988 · 134 · 247
2. 10.1063/1.33832510.1063/1.338325 ↗
3. 10.1063/1.9571510.1063/1.95715 ↗
4. 10.1063/1.33045710.1063/1.330457 ↗
5. Barrett · 1980 · 196
6. 10.1143/JJAP.21.L18310.1143/JJAP.21.L183 ↗
7. 10.1007/BF0072004310.1007/BF00720043 ↗
8. Deryagin · Sov. Phys. Dokl. · 1976 · 21 · 676
9. Touloukian · 1977 · 13
10. Cullity · 1978 · 284
11. 10.1063/1.33655410.1063/1.336554 ↗
12. 10.1016/0257-8972(89)90054-610.1016/0257-8972(89)90054-6 ↗
13. 10.1016/0167-577X(84)90027-210.1016/0167-577X(84)90027-2 ↗
14. 10.1016/0039-6028(85)90751-410.1016/0039-6028(85)90751-4 ↗
15. 10.1557/JMR.1989.037310.1557/JMR.1989.0373 ↗
16. 10.1103/PhysRevB.38.406710.1103/PhysRevB.38.4067 ↗
17. 10.1007/BF0113237410.1007/BF01132374 ↗
18. 10.1143/JJAP.26.L103210.1143/JJAP.26.L1032 ↗
19. 10.1116/1.131273510.1116/1.1312735 ↗
20. Wild · Electrochem. Soc. Proc. · 1989 · 89–12 · 283
21. 10.1007/BF0120347210.1007/BF01203472 ↗
22. 10.1063/1.169826810.1063/1.1698268 ↗
23. 10.1007/BF0054207510.1007/BF00542075 ↗
24. Field · 1979 · 308