journal article·2011-10-14

Thermally induced damages of PECVD SiN_x thin films

Yinong Liu, Neerushana Jehanathan, John Dell

Journal of Materials Research· Volume 26· Issue 19

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Source: crossref · Quality: short

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OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices · Silicon and Solar Cell Technologies

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