Elastic modulus measurement of multilayer metallic thin films

Two- and three-layer composite models were developed using a beam vibration theory, and the models were applied for measuring Young's moduli of thin metallic films. The Cr, Ni, and Co-coated Si wafer composites (two-layer composite) and (Cr/Ti/Si) composites (three-layer composite) were produced by radio-frequency (rf) magnetron sputtering and used to test the developed models. Young's moduli of (Cr) films obtained by the three-layer composite model agree well with those of (Cr) films obtained by the two-layer composite model, considering (Ti/Si) as the one layer and (Cr) as the other layer. This suggests that moduli of multilayer films may be obtained by using a two-layer composite model repeatedly.