journal article·2012-03-14Open access

Modeling evaporation, ion-beam assist, and magnetron sputtering of TiO₂ thin films over realistic timescales

Sabrina Blackwell, Roger Smith, Steven D. Kenny, Louis J. Vernon, John M. Walls

Journal of Materials Research· Volume 27· Issue 5

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OpenAlex topics: Ion-surface interactions and analysis · Semiconductor materials and devices · Electronic and Structural Properties of Oxides

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