Early stages of oxidation of aluminum nitride

The early stages of oxidation of aluminum nitride have been studied by transmission electron microscopy and electron diffraction. It has been found that the oxide layer grows by the Stranki–Krastonow mechanism, where an initial uniform layer is followed by island formation. The onset of oxidation occurs at 800 °C and the initial oxide phase that forms is γ–Al₂O₃, one of the transition aluminas. The orientation relationship between the oxide layer and the underlying nitride is (440)_γ∥(1120)_AINand [112]_γ∥[0110]_AIN.