Eu-doped Y₂O₃ phosphor films produced by electrostatic-assisted chemical vapor deposition

Europium-doped yttrium oxide (Y₂O₃:Eu) thermographic phosphor films were deposited on Ni-alloy substrates using a novel and cost-effective electrostatic-assisted chemical vapor deposition (EACVD) technique. The thermoluminescence properties were studied under irradiation by an ultraviolet laser. It was found that crystallized Y₂O₃: Eu films could be deposited at a temperature as low as 550 °C. Annealing of the as-deposited films at higher temperatures (>1000 °C) improved the luminescence properties due to further crystallization processes. The correlation of the lifetime decay and temperature change of the films showed that the EACVD-deposited films are suitable for use in phosphor thermometry for high-temperature applications.