Sol-gel-derived Magnesium Oxide Precursor for Thin-film Fabrication

Magnesium oxide (MgO) precursors were prepared by the sol-gel method using magnesium acetate. The reaction products and intermediates obtained during the sol-gel processing of magnesium acetate under various conditions were analyzed thermally and spectroscopically. No organic groups were detected by infrared spectroscopy after heat treating the reaction products at 400 °C. A large exothermic differential thermal analysis peak below 400 °C demonstrated the oxidation of organic moieties in each product. It was found that the presence of an acid catalyst was crucial during the sol-gel processing of magnesium acetate to produce sols suitable for depositing MgO films. The MgO films fabricated on Si(111) substrates using the precursor sol showed (200) orientation regardless of the presence of surface oxides on the substrates.