Indentation load relaxation experiments with indentation depth in the submicron range
Source abstract
Abstract
Indentation load relaxation (ILR) experiments with indentation depths in the submicron range are described. Under appropriate conditions, the ILR data are found to yield flow curves of the same shape as those based on conventional load relaxation data. Variations in flow properties as a function of depth in submicron metal films deposited on a hard substrate are detected by the experiments described.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Advanced Surface Polishing Techniques · Copper Interconnects and Reliability
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References (18)
Show source-provided references
1. 10.1520/STP28886S10.1520/STP28886S ↗
2. Hannula · 1984 · 485
3. Hart · 1975 · 149
4. 5 “Collection and Uses for Relaxation Data in Design”, 1989 ASME Pressure Vessels and Piping Conference, edited by R. W. Swinderman, Y. Asada, and J. T. Fong (1989).
5. 10.1007/BF0264345110.1007/BF02643451 ↗
6. 10.1557/JMR.1990.077610.1557/JMR.1990.0776 ↗
7. 10.1115/1.344336810.1115/1.3443368 ↗
8. 10.1557/JMR.1986.084510.1557/JMR.1986.0845 ↗
9. 10.1016/0036-9748(89)90075-610.1016/0036-9748(89)90075-6 ↗
10. 17 Black R. D. , LaFontaine W. R. , and Li Che-Yu , submitted for publication, Thin Solid Films, 1990.
11. 10.1007/978-94-009-3439-9_210.1007/978-94-009-3439-9_2 ↗
12. Stone · Res. · 1988 · 3 · 141
13. Hannula · 1985 · 217
14. 6 “Stress Relaxation Testing”, ASTM STP 676 (1978).
15. 10.1557/JMR.1986.060110.1557/JMR.1986.0601 ↗
16. 10.1016/0001-6160(73)90017-510.1016/0001-6160(73)90017-5 ↗
17. Li · 1989 · 225
18. 10.1109/T-ED.1987.2298110.1109/T-ED.1987.22981 ↗