journal article·1988-04

Interface modifications for improving the adhesion of a-C:H films to metals

A. Grill, B. Meyerson, V. Patel

Journal of Materials Research· Volume 3· Issue 2
Publisher page

Abstract

The adhesion of diamondlike hard carbon films to silicide forming metals was improved by using an interfacial silicon film several atomic layers thick. The use of thicker (> 10nm) silicon layers results in a decrease in the adhesion, probably due to a degradation of the structural integrity by excessive silicide formation.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (13)

Show source-provided references
1. 10.1016/0040-6090(84)90202-510.1016/0040-6090(84)90202-5 ↗
2. 10.1016/0022-3093(72)90267-010.1016/0022-3093(72)90267-0 ↗
3. 10.1116/1.57056010.1116/1.570560 ↗
4. 10.1016/0040-6090(81)90288-110.1016/0040-6090(81)90288-1 ↗
5. Desposito · Creative Computing · 1985 · 11 · 28
6. 10.1016/0038-1101(68)90071-310.1016/0038-1101(68)90071-3 ↗
7. 10.1116/1.57211910.1116/1.572119 ↗
8. 10.1063/1.33261310.1063/1.332613 ↗
9. 10.1116/1.57288710.1116/1.572887 ↗
10. 10.1016/B978-0-12-410755-7.50010-510.1016/B978-0-12-410755-7.50010-5 ↗
11. 10.1063/1.33788310.1063/1.337883 ↗
12. 10.1016/0040-6090(82)90210-310.1016/0040-6090(82)90210-3 ↗
13. 9QUAD Group, Santa Barbara, California.