Experimental and theoretical insights on the influence of substrate oscillation period on advanced coatings deposited by dynamic glancing angle deposition
Source abstract
Abstract
Dynamic Glancing Angle Deposition (DGLAD) was explored to tune the properties of chromium nitride (CrN) hard coatings, addressing the unexplored impact of short oscillation periods (1 < T < 10 min) on film properties. The study revealed that substrate oscillation significantly influences microstructure, creating a distinctive wavy, columnar microstructure. Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) showed unique morphological and texture changes in oscillated samples when compared to a sample deposited under the same conditions but in stationary geometry (without oscillation). Mechanical properties such as residual strain, hardness, and crystallite size were also notably affected by the oscillation period. Simulations offered insights into precursor atom flux dynamics, linking oscillation conditions to property variation. This method opens new paths for enhancing the durability and performance of hard coatings in industrial applications with the precise control of properties.Graphical abstract
Source: expertdata · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Optical Coatings and Gratings · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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