DataVXJournal of Materials ResearchPaper
journal article·2011-03-28

Noncontact, in-line measurement of boron concentration from ultrathin boron-doped epitaxial Si1–xGex layers on Si(100) by multiwavelength micro-Raman spectroscopy

Yu Fen Tzeng, Scott Ku, Stock Chang, Chi Ming Yang, Chyi Shieng Chern, John Lin, Noriyuki Hasuike, Hiroshi Harima, Takeshi Ueda, Toshikazu Ishigaki, Kitaek Kang, Woo Sik Yoo

Journal of Materials Research· Volume 26· Issue 6
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Abstract

Abstract
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Source: crossref · Quality: short

Research context

OpenAlex topics: Silicon Nanostructures and Photoluminescence · Ion-surface interactions and analysis · Semiconductor materials and interfaces

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References (18)

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