Ti–Si–C–N thin films grown by reactive arc evaporation from Ti₃SiC₂ cathodes

Anders O. Eriksson; Jianqiang Zhu; Naureen Ghafoor; Jens Jensen; Grzegorz Greczynski; Mats P. Johansson; Jacob Sjölen; Magnus Odén; Lars Hultman; Johanna Rosén

doi:10.1557/jmr.2011.10

journal article·2011-04-14Open access

Ti–Si–C–N thin films grown by reactive arc evaporation from Ti₃SiC₂ cathodes

Anders O. Eriksson, Jianqiang Zhu, Naureen Ghafoor, Jens Jensen, Grzegorz Greczynski, Mats P. Johansson, Jacob Sjölen, Magnus Odén, Lars Hultman, Johanna Rosén

Journal of Materials Research· Volume 26· Issue 7

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Abstract

Only a short abstract or summary was supplied by the source.

Source: crossref · Quality: short

Research context

Energy storage

OpenAlex topics: Metal and Thin Film Mechanics · MXene and MAX Phase Materials · Advanced materials and composites

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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