journal article·2011-01-14

The influence of mixed phases on optical properties of HfO2 thin films prepared by thermal oxidation

Yizhu Xie, Ziwei Ma, Yuroug Su, Yanxia Liu, Lixin Liu, Haiting Zhao, Jinyuan Zhou, Zhenxing Zhang, Jian Li, Erqing Xie

Journal of Materials Research· Volume 26· Issue 1
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Abstract

Abstract
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Source: crossref · Quality: short

Research context

OpenAlex topics: Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis · Advancements in Semiconductor Devices and Circuit Design

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