Fabrication of silicon carbide nanoceramics

Ultrafine silicon carbide powder with an average particle size of 90 nm was densified by hot-processing with the addition of Al₂O₃, Y₂O₃, and CaO at 1750 °C. Silicon carbide nanoceramics with an average grain size of 110 nm were prepared by liquid phase sintering at low temperature. The materials showed superplastic deformation at a strain rate of 5.0 × 10^-4/s at 1700 °C, which is the lowest temperature published. The microstructure and deformation behavior of materials from a submicrometer powder were also investigated as a reference.