journal article·1995-03

Synthesis and characterization of TiO2 thin films on organic self-assembled monolayers: Part I. Film formation from aqueous solutions

H. Shin, R.J. Collins, M.R. De Guire, A.H. Heuer, C.N. Sukenik

Journal of Materials Research· Volume 10· Issue 3
Publisher page

Abstract

Self-assembled monolayers (SAMs) bearing sulfonate (-SO3H) surface functional groups, on single-crystal Si wafers, were used as substrates for the deposition of TiO2 thin films from aqueous solutions. Polycrystalline TiO2 thin films over 50 nm thick formed in 2 h by hydrolysis of TiCl4 in aqueous HCI solutions at 80 °C. The films were pore-free, showed excellent adherence and uniformity, and consisted of anatase crystallites 2–4 nm in diameter. Annealing at temperatures up to 600 °C caused coarsening of the anatase grains, but no loss of adherence or structural integrity.
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OpenAlex topics: Electrophoretic Deposition in Materials Science · Copper-based nanomaterials and applications · Quantum Dots Synthesis And Properties

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