Status review of the science and technology of PZT/diamond heterostructures and their applications
Source abstract
Abstract
Diamond has been forecasted as an excellent substrate material for acoustic devices and microelectromechanical systems owing to its exceptional mechanical and acoustic properties. The integration of piezoelectric thin films on diamond can realize devices operating in the GHz frequency range, which has great relevance in the 5G communication systems. The heterostructures, based on lead zirconate titanate (PZT) and diamond, could be highly promising for the aforesaid applications. However, the direct integration of PZT on diamond is problematic due to the formation of undesired pyrochlore phase and the mismatch in their thermal expansion coefficients. Thus, PZT/diamond heterostructures are often fabricated using a buffer layer. But the recent reports indicated that the direct integration of PZT on diamond is possible without any buffer layer, which is highly promising. This comprehensive review discusses various aspects, including the possibilities and challenges in the fabrication of PZT/diamond heterostructures.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Electronic and Structural Properties of Oxides · Ferroelectric and Negative Capacitance Devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
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