DataVXJournal of Materials ResearchPaper
journal article·2016-09-14

Experimental phase diagram of SiC in CH3SiCl3–Ar–H2 system produced by fluidized bed chemical vapor deposition and its nuclear applications

Rongzheng Liu, Malin Liu, Jiaxing Chang

Journal of Materials Research· Volume 31· Issue 17
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Abstract

Abstract
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

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Materials processing

OpenAlex topics: Advanced ceramic materials synthesis · Advanced materials and composites · Silicon Carbide Semiconductor Technologies

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