Status of the growth and fabrication of AlGaN-based UV laser diodes for near and mid-UV wavelength
Source abstract
Abstract
In this article, the development of mid-UV laser diodes based on the AlGaN materials system is reviewed. The targeted wavelength for these lasers covers the range from 200 to 350 nm. After introducing UV laser diodes and explaining their applications, the challenges in growth, design, and fabrication are discussed. In addition, recent results from optically and electrically injected UV laser diodes are presented. Finally, we will discuss possible pathways to improve performance and give an outlook on the expected development of UV laser diodes in the near future.Graphical abstract
Source: expertdata · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: GaN-based semiconductor devices and materials · Photocathodes and Microchannel Plates · Ga2O3 and related materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
Show source-provided references
1. R.N. Hall, G.E. Fenner, J.D. Kingsley, T.J. Soltys, R.O. Carlson, Phys. Rev. Lett. 9, 366 (1962)10.1103/PhysRevLett.9.366 ↗
2. M.I. Nathan, W.P. Dumke, G. Burns, F.H. Dill Jr, G. Lasher, Appl. Phys. Lett. 1, 62 (1962)10.1063/1.1777371 ↗
3. Z.I. Alferov, V. Andreev, D.Y. Garbuzov, Y. Zhilyaev, E. Morozov, E. Portnoi, V. Trofim, Sov. Phys. Semicond. 4, 1573 (1971)
4. M. Kneissl, D.W. Treat, M. Teepe, N. Miyashita, N.M. Johnson, Appl. Phys. Lett. 82, 2386 (2003)10.1063/1.1568160 ↗
5. Y. Enya, Y. Yoshizumi, T. Kyono, K. Akita, M. Ueno, M. Adachi, T. Sumitomo, S. Tokuyama, T. Ikegami, K. Katayama, T. Nakamura, Appl. Phys. Express 2, 082101 (2009)10.1143/APEX.2.082101 ↗
6. H. Yoshida, Y. Yamashita, M. Kuwabara, H. Kan, Appl. Phys. Lett. 93, 241106 (2008)10.1063/1.3050539 ↗
7. S. Zhao, X. Liu, S.Y. Woo, J. Kang, G.A. Botton, Z. Mi, Appl. Phys. Lett. 107, 043101 (2015)10.1063/1.4927602 ↗
8. Z. Zhang, M. Kushimoto, T. Sakai, N. Sugiyama, L.J. Schowalter, C. Sasaoka, H. Amano, Appl. Phys. Express 12, 124003 (2019)10.7567/1882-0786/ab50e0 ↗
9. R. Collazo, S. Mita, J. Xie, A. Rice, J. Tweedie, R. Dalmau, Z. Sitar, Phys. Status Solidi C 8, 2031 (2011)10.1002/pssc.201000964 ↗
10. S.A. Asher, Anal. Chem. 65, 59A (1993)10.1021/ac00050a717 ↗
11. E.V. Efremov, F. Ariese, C. Gooijer, Anal. Chim. Acta 606, 119 (2008)10.1016/j.aca.2007.11.006 ↗
12. M. Gaft, L. Nagli, Opt. Mater. 30, 1739 (2008)10.1016/j.optmat.2007.11.013 ↗
13. M.A. Würtele, T. Kolbe, M. Lipsz, A. Külberg, M. Weyers, M. Kneissl, M. Jekel, Water Res. 45, 1481 (2011)10.1016/j.watres.2010.11.015 ↗
14. L. Bachmann, D.M. Zezell, A.C. da Ribeiro, L. Gomes, A.S. Ito, Appl. Spectrosc. Rev. 41, 575 (2006)10.1080/05704920600929498 ↗
15. J.B. Irving, R.M. Judith, Phys. Med. Biol. 42, 803 (1997)10.1088/0031-9155/42/5/005 ↗
16. S.T. Hess, S. Huang, A.A. Heikal, W.W. Webb, Biochemistry 41, 697 (2002)10.1021/bi0118512 ↗
17. N. Hudson, A. Baker, D. Reynolds, River Res. Appl. 23, 631 (2007)10.1002/rra.1005 ↗
18. D. Wan, H.-L. Chen, S.-C. Tseng, L.A. Wang, Y.-P. Chen, ACS Nano 4, 165 (2010)10.1021/nn9013005 ↗
19. A.S. Matharu, S. Jeeva, P.S. Ramanujam, Chem. Soc. Rev. 36, 1868 (2007)10.1039/b706242g ↗
20. B.J. Lin, J. Vac. Sci. Technol. 12, 1317 (1975)10.1116/1.568527 ↗
21. Z. Xu, B.M. Sadler, IEEE Commun. Mag. 46, 67 (2008)
22. G. Chen, L. Liao, Z. Li, R.J. Drost, B.M. Sadler, (2014), pp. 904–909
23. R. Torsten, D. Ralph, Laser Technol. J. 6, 20 (2009)
24. H. Häffner, C.F. Roos, R. Blatt, Phys. Rep. 469, 155 (2008)10.1016/j.physrep.2008.09.003 ↗
25. R. Islam, E.E. Edwards, K. Kim, S. Korenblit, C. Noh, H. Carmichael, G.D. Lin, L.M. Duan, C.C. Joseph-Wang, J.K. Freericks, C. Monroe, Nat. Commun. 2, 377 (2011)10.1038/ncomms1374 ↗
26. T. Makimura, S. Mitani, Y. Kenmotsu, K. Murakami, M. Mori, K. Kondo, Appl. Phys. Lett. 85, 1274 (2004)10.1063/1.1782265 ↗
27. S. Mishra, V. Yadava, Opt. Lasers Eng. 73, 89 (2015)10.1016/j.optlaseng.2015.03.017 ↗
28. K.-R. Kim, J.-H. Cho, N.-Y. Lee, H.-J. Kim, S.-H. Cho, H.-J. Park, B. Choi, J. Manuf. Syst. 38, 107 (2016)10.1016/j.jmsy.2015.12.001 ↗
29. U. Kogelschatz, H. Esrom, J.Y. Zhang, I.W. Boyd, Appl. Surf. Sci. 168, 29 (2000)10.1016/S0169-4332(00)00571-7 ↗
30. J.J. McFerran, L. Yi, S. Mejri, S. Di Manno, W. Zhang, J. Guéna, Y. Le Coq, S. Bize, Phys. Rev. Lett. 108, 183004 (2012)10.1103/PhysRevLett.108.183004 ↗
31. W.H. Oskay, S.A. Diddams, E.A. Donley, T.M. Fortier, T.P. Heavner, L. Hollberg, W.M. Itano, S.R. Jefferts, M.J. Delaney, K. Kim, F. Levi, T.E. Parker, J.C. Bergquist, Phys. Rev. Lett. 97, 020801 (2006)10.1103/PhysRevLett.97.020801 ↗
32. T.-J. Lu, M. Fanto, H. Choi, P. Thomas, J. Steidle, S. Mouradian, W. Kong, D. Zhu, H. Moon, K. Berggren, J. Kim, M. Soltani, S. Preble, D. Englund, Opt. Express 26, 11147 (2018)10.1364/OE.26.011147 ↗
33. R. Dingle, C.H. Henry, (1976)
34. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, Y. Sugimoto, H. Kiyoku, Appl. Phys. Lett. 69, 1568 (1996)10.1063/1.117032 ↗
35. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, Y. Sugimoto, H. Kiyoku, Appl. Phys. Lett. 69, 4056 (1996)10.1063/1.117816 ↗
36. S.D. Lester, F.A. Ponce, M.G. Craford, D.A. Steigerwald, Appl. Phys. Lett. 66, 1249 (1995)10.1063/1.113252 ↗
37. K. Ban, J. Yamamoto, K. Takeda, K. Ide, M. Iwaya, T. Takeuchi, S. Kamiyama, I. Akasaki, H. Amano, Appl. Phys. Express 4, 052101 (2011)10.1143/APEX.4.052101 ↗
38. R. Kirste, Q. Guo, J.H. Dycus, A. Franke, S. Mita, B. Sarkar, P. Reddy, J. LeBeau, M.R. Collazo, Z. Sitar, Appl. Phys. Express 11, 082101 (2018)10.7567/APEX.11.082101 ↗
39. P. Reddy, S. Washiyama, F. Kaess, R. Kirste, S. Mita, R. Collazo, Z. Sitar, J. Appl. Phys. 122, 245702 (2017)10.1063/1.5002682 ↗
40. N.A. Fichtenbaum, T.E. Mates, S. Keller, S.P. DenBaars, U.K. Mishra, J. Cryst. Growth 310, 1124 (2008)10.1016/j.jcrysgro.2007.12.051 ↗
41. F. Kaess, S. Mita, J. Xie, P. Reddy, A. Klump, L.H. Hernandez-Balderrama, S. Washiyama, A. Franke, R. Kirste, A. Hoffmann, R. Collazo, Z. Sitar, J. Appl. Phys. 120, 105701 (2016)10.1063/1.4962017 ↗
42. C. Lund, S. Nakamura, S.P. DenBaars, U.K. Mishra, S. Keller, J. Cryst. Growth 464, 127 (2017)10.1016/j.jcrysgro.2016.11.039 ↗
43. A. Saxler, D. Walker, P. Kung, X. Zhang, M. Razeghi, J. Solomon, W.C. Mitchel, H.R. Vydyanath, Appl. Phys. Lett. 71, 3272 (1997)10.1063/1.120310 ↗
44. T. Tanikawa, S. Kuboya, T. Matsuoka, Phys. Status Solidi B 254, 1600751 (2017)10.1002/pssb.201600751 ↗
45. P. Reddy, M.P. Hoffmann, F. Kaess, Z. Bryan, I. Bryan, M. Bobea, A. Klump, J. Tweedie, R. Kirste, S. Mita, M. Gerhold, R. Collazo, Z. Sitar, J. Appl. Phys. 120, 185704 (2016)10.1063/1.4967397 ↗
46. Z. Bryan, I. Bryan, J. Xie, S. Mita, Z. Sitar, R. Collazo, Appl. Phys. Lett. 106, 142107 (2015)10.1063/1.4917540 ↗
47. M. Martens, C. Kuhn, T. Simoneit, S. Hagedorn, A. Knauer, T. Wernicke, M. Weyers, M. Kneissl, Appl. Phys. Lett. 110, 081103 (2017)10.1063/1.4977029 ↗
48. Z. Zhang, M. Kushimoto, M. Horita, N. Sugiyama, L.J. Schowalter, C. Sasaoka, H. Amano, Appl. Phys. Lett. 117, 152104 (2020)10.1063/5.0027789 ↗
49. R. Collazo, J. Xie, B.E. Gaddy, Z. Bryan, R. Kirste, M. Hoffmann, R. Dalmau, B. Moody, Y. Kumagai, T. Nagashima, Y. Kubota, T. Kinoshita, A. Koukitu, D.L. Irving, Z. Sitar, Appl. Phys. Lett. 100, 191914 (2012)10.1063/1.4717623 ↗
50. B.E. Gaddy, Z. Bryan, I. Bryan, J. Xie, R. Dalmau, B. Moody, Y. Kumagai, T. Nagashima, Y. Kubota, T. Kinoshita, A. Koukitu, R. Kirste, Z. Sitar, R. Collazo, D.L. Irving, Appl. Phys. Lett. 104, 202106 (2014)10.1063/1.4878657 ↗
51. Q. Guo, Engineering of Electrically Injected AlGaN-Based UVC Lasers (North Carolina State University, Raleigh, 2019)
52. S. Nakamura, T. Mukai, M. Senoh, N. Iwasa, Jpn. J. Appl. Phys. 31, L139 (1992)10.1143/JJAP.31.L139 ↗
53. B. Sarkar, S. Mita, P. Reddy, A. Klump, F. Kaess, J. Tweedie, I. Bryan, Z. Bryan, R. Kirste, E. Kohn, R. Collazo, Z. Sitar, Appl. Phys. Lett. 111, 032109 (2017)10.1063/1.4995239 ↗
54. T. Kinoshita, T. Obata, H. Yanagi, S. Inoue, Appl. Phys. Lett. 102, 012105 (2013)10.1063/1.4773594 ↗
55. J. Simon, V. Protasenko, C. Lian, H. Xing, D. Jena, Science 327, 60 (2010)10.1126/science.1183226 ↗
56. P. Reddy, I. Bryan, Z. Bryan, J. Tweedie, S. Washiyama, R. Kirste, S. Mita, R. Collazo, Z. Sitar, Appl. Phys. Lett. 107, 091603 (2015)10.1063/1.4930026 ↗
57. J.-S. Jang, K.-H. Park, H.-K. Jang, H.-G. Kim, S.-J. Park, J. Vac. Sci. Technol. B 16, 3105 (1998)10.1116/1.590448 ↗
58. B. Sarkar, P. Reddy, A. Klump, R. Rounds, M.R. Breckenridge, B.B. Haidet, S. Mita, R. Kirste, R. Collazo, Z. Sitar, in (2018), pp. 1–2
59. Z. Zhang, M. Kushimoto, T. Sakai, N. Sugiyama, L.J. Schowalter, C. Sasaoka, H. Amano, Jpn. J. Appl. Phys. 59, 094001 (2020)10.35848/1347-4065/abaac6 ↗
60. Q. Guo, R. Kirste, P. Reddy, S. Mita, R. Collazo, Z. Sitar, in (2018), pp. 1–4
61. T. Takano, T. Mino, J. Sakai, N. Noguchi, K. Tsubaki, H. Hirayama, Appl. Phys. Express 10, 031002 (2017)10.7567/APEX.10.031002 ↗
62. R. Kirste, S. Mita, P. Reddy, A. Franke, Q. Guo, K. Wang, R. Collazo, Z. Sitar, in (2019), pp. 1–3
63. Q. Guo, R. Kirste, P. Reddy, W. Mecouch, Y. Guan, S. Mita, S. Washiyama, J. Tweedie, Z. Sitar, R. Collazo, Jpn. J. Appl. Phys. 59, 091001 (2020)10.35848/1347-4065/abab44 ↗
64. M. Rigler, M. Zgonik, M.P. Hoffmann, R. Kirste, M. Bobea, R. Collazo, Z. Sitar, S. Mita, M. Gerhold, Appl. Phys. Lett. 102, 221106 (2013)10.1063/1.4800554 ↗
65. M. Rigler, J. Buh, M.P. Hoffmann, R. Kirste, M. Bobea, S. Mita, M.D. Gerhold, R. Collazo, Z. Sitar, M. Zgonik, Appl. Phys. Express 8, 042603 (2015)10.7567/APEX.8.042603 ↗
66. G.M. Laws, E.C. Larkins, I. Harrison, C. Molloy, D. Somerford, J. Appl. Phys. 89, 1108 (2001)10.1063/1.1320007 ↗
67. Q. Guo, R. Kirste, S. Mita, J. Tweedie, P. Reddy, B. Moody, Y. Guan, S. Washiyama, A. Klump, Z. Sitar, R. Collazo, J. Appl. Phys. 126, 223101 (2019)10.1063/1.5125256 ↗
68. Z. Bryan, I. Bryan, S. Mita, J. Tweedie, Z. Sitar, R. Collazo, Appl. Phys. Lett. 106, 232101 (2015)10.1063/1.4922385 ↗
69. H. Kawanishi, M. Senuma, T. Nukui, Appl. Phys. Lett. 89, 041126 (2006)10.1063/1.2236792 ↗
70. I. Bryan, Z. Bryan, S. Washiyama, P. Reddy, B. Gaddy, B. Sarkar, M. Hayden-Breckenridge, Q. Guo, M. Bobea, J. Tweedie, S. Mita, D. Irving, R. Collazo, Z. Sitar, Appl. Phys. Lett. 112, 062102 (2018)10.1063/1.5011984 ↗
71. P. Bagheri, R. Kirste, P. Reddy, S. Washiyama, S. Mita, B. Sarkar, R. Collazo, Z. Sitar, Appl. Phys. Lett. 116, 222102 (2020)10.1063/5.0008362 ↗
72. T. Kinoshita, T. Obata, T. Nagashima, H. Yanagi, B. Moody, S. Mita, S. Inoue, Y. Kumagai, A. Koukitu, Z. Sitar, Appl. Phys. Express 6, 092103 (2013)10.7567/APEX.6.092103 ↗
73. F. Mehnke, T. Wernicke, H. Pingel, C. Kuhn, C. Reich, V. Kueller, A. Knauer, M. Lapeyrade, M. Weyers, M. Kneissl, Appl. Phys. Lett. 103, 212109 (2013)10.1063/1.4833247 ↗
74. B. Jacobs, M.C.J.C.M. Kramer, E.J. Geluk, F. Karouta, J. Cryst. Growth 241, 15 (2002)10.1016/S0022-0248(02)00920-X ↗
75. M. Lapeyrade, A. Muhin, S. Einfeldt, U. Zeimer, A. Mogilatenko, M. Weyers, M. Kneissl, Semicond. Sci. Technol. 28, 125015 (2013)10.1088/0268-1242/28/12/125015 ↗
76. A.A. Allerman, M.H. Crawford, A.J. Fischer, K.H.A. Bogart, S.R. Lee, D.M. Follstaedt, P.P. Provencio, D.D. Koleske, J. Cryst. Growth 272, 227 (2004)10.1016/j.jcrysgro.2004.08.035 ↗
77. H. Hirayama, S. Fujikawa, N. Noguchi, J. Norimatsu, T. Takano, K. Tsubaki, N. Kamata, Phys. Stat. Sol. (a) 206, 1176 (2009)10.1002/pssa.200880961 ↗
78. D. Liu, S.J. Cho, J. Park, J.-H. Seo, R. Dalmau, D. Zhao, K. Kim, J. Gong, M. Kim, I.-K. Lee, J.D. Albrecht, W. Zhou, B. Moody, Z. Ma, Appl. Phys. Lett. 112, 081101 (2018)10.1063/1.5011180 ↗
79. H. Hirayama, N. Maeda, S. Fujikawa, S. Toyoda, N. Kamata, Jpn. J. Appl.Phys. 53, 100209 (2014)10.7567/JJAP.53.100209 ↗
80. L. Liu, J.H. Edgar, Mater. Sci. Eng. R Rep. 37, 61 (2002)10.1016/S0927-796X(02)00008-6 ↗
81. S. Iwama, K. Hayakawa, T. Arizumi, J. Cryst. Growth 56, 265 (1982)10.1016/0022-0248(82)90443-2 ↗
82. W.M. Yim, R.J. Paff, J. Appl. Phys. 45, 1456 (1974)10.1063/1.1663432 ↗
83. R. Rounds, B. Sarkar, A. Klump, C. Hartmann, T. Nagashima, R. Kirste, A. Franke, M. Bickermann, Y. Kumagai, Z. Sitar, R. Collazo, Appl. Phys. Express 11, 071001 (2018)10.7567/APEX.11.071001 ↗
84. D.I. Florescu, V.M. Asnin, F.H. Pollak, A.M. Jones, J.C. Ramer, M.J. Schurman, I. Ferguson, Appl. Phys. Lett. 77, 1464 (2000)10.1063/1.1308057 ↗
85. O. Lagerstedt, B. Monemar, Phys. Rev. B 19, 3064 (1979)10.1103/PhysRevB.19.3064 ↗
86. R. Rounds, B. Sarkar, T. Sochacki, M. Bockowski, M. Imanishi, Y. Mori, R. Kirste, R. Collazo, Z. Sitar, J. Appl. Phys. 124, 105106 (2018)10.1063/1.5047531 ↗
87. F. Briegleb, A. Geuther, Justus Liebigs Ann. Chem. 123, 228 (1862)10.1002/jlac.18621230212 ↗
88. G.A. Slack, T.F. McNelly, J. Cryst. Growth 34, 263 (1976)10.1016/0022-0248(76)90139-1 ↗
89. G.A. Slack, T.F. McNelly, J. Cryst. Growth 42, 560 (1977)10.1016/0022-0248(77)90246-9 ↗
90. C.M. Balkas, Z. Sitar, T. Zheleva, L. Bergman, I.K. Shmagin, J.F. Muth, R. Kolbas, R. Nemanich, R.F. Davis, MRS Proc. 449, 41 (1996)10.1557/PROC-449-41 ↗
91. M. Bickermann, B.M. Epelbaum, O. Filip, P. Heimann, S. Nagata, A. Winnacker, Physica Status Solidi (c) 5, 1502 (2008)10.1002/pssc.200778422 ↗
92. R. Schlesser, Z. Sitar, J. Cryst. Growth 234, 349 (2002)10.1016/S0022-0248(01)01720-1 ↗
93. H. Helava, S.J. Davis, G.D. Huminic, M.G. Ramm, O.V. Avdeev, I.S. Barash, T.Y. Chemekova, E.N. Mokhov, S.S. Nagalyuk, A.D. Roenkov, A.S. Segal, Y.A. Vodakov, Y.N. Makarov, in Physica Status Solidi C - Current Topics in Solid State Physics, Vol 4 No 7 2007 (Wiley-V C H Verlag Gmbh, Weinheim, 2007), pp. 2281–228410.1002/pssc.200674897 ↗
94. V. Noveski, R. Schlesser, S. Mahajan, S. Beaudoin, Z. Sitar, J. Cryst. Growth 264, 369 (2004)10.1016/j.jcrysgro.2004.01.028 ↗
95. J. Carlos Rojo, G.A. Slack, K. Morgan, B. Raghothamachar, M. Dudley, L.J. Schowalter, J. Cryst. Growth 231, 317 (2001)10.1016/S0022-0248(01)01452-X ↗
96. M. Tanaka, S. Nakahata, K. Sogabe, H. Nakata, M. Tobioka, Jpn. J. Appl. Phys. Part 2 36, 1062 (1997)10.1143/JJAP.36.L1062 ↗
97. V. Noveski, R. Schlesser, B. Raghothamachar, M. Dudley, S. Mahajan, S. Beaudoin, Z. Sitar, J. Cryst. Growth 279, 13 (2005)10.1016/j.jcrysgro.2004.12.027 ↗
98. M. Bockowski, M. Iwinska, M. Amilusik, M. Fijalkowski, B. Lucznik, T. Sochacki, Semicond. Sci. Technol. 31, 093002 (2016)10.1088/0268-1242/31/9/093002 ↗
99. S. Hagedorn, E. Richter, U. Zeimer, D. Prasai, W. John, M. Weyers, J. Cryst. Growth 353, 129 (2012)10.1016/j.jcrysgro.2012.05.028 ↗
100. V. Sukhoveev, A. Usikov, O. Kovalenkov, V. Ivantsov, A. Syrkin, V. Dmitriev, C. Collins, M. Wraback, in GaN, AIN, InN and Related Materials. ed. by M. Kuball, T.H. Myers, J.M. Redwing, T. Mukai (Materials Research Society, Warrendale, 2006), pp. 743–748