journal article·2021-01-15

Atomic and molecular layer deposition in pursuing better batteries

Xiangbo Meng

Journal of Materials Research· Volume 36· Issue 1
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Abstract

In the past decade, atomic and molecular layer deposition (ALD and MLD), these two sister techniques have been attracting more and more research attention to address technical challenges in various advanced battery systems. The charm of both ALD and MLD lies in their unique mechanism for growing a large variety of functional materials, featuring uniform and conformal films enabled at the atomic/molecular level at low temperature. Using ALD and MLD, to date, there have been many excitements achieved in research. These will ultimately be reflected on technical innovations that will help revolutionize our lifestyles. This invited article gives the first comprehensive review briefing on the journey of ALD and MLD in pursuing better batteries and highlighting many exciting progresses in various advanced battery systems. It is expected that this review will help boost many more efforts in using ALD and MLD for new battery technologies in the coming decade.
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Research context

OpenAlex topics: Advancements in Battery Materials · Advanced Battery Materials and Technologies · Advanced Battery Technologies Research

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References (100+)

Show source-provided references
1. M.M. Thackeray, C. Wolverton, and E.D. Isaacs: Electrical energy storage for transportation‐approaching the limits of, and going beyond, lithium‐ion batteries. Energy Environ. Sci. 5, 7854–7863 (2012).10.1039/c2ee21892e ↗
2. M. Winter and R.J. Brodd: What are batteries, fuel cells, and supercapacitors? Chem. Rev. 104, 4245–4270 (2004).10.1021/cr020730k ↗
3. M.S. Whittingham: History, evolution, and future status of energy storage. Proc. IEEE 100(Special Centennial Issue), 1518–1534 (2012).10.1109/JPROC.2012.2190170 ↗
4. D. Deng: Li‐ion batteries: Basics, progress, and challenges. Energy Sci. Eng. 3, 385–418 (2015).10.1002/ese3.95 ↗
5. Y. Liang, C.‐Z. Zhao, H. Yuan, Y. Chen, W. Zhang, J.‐Q. Huang, D. Yu, Y. Liu, M.‐M. Titirici, Y.‐L. Chueh, H. Yu, and Q. Zhang : A review of rechargeable batteries for portable electronic devices. InfoMat 1, 6–32 (2019).10.1002/inf2.12000 ↗
6. G.J. May, A. Davidson, and B. Monahov: Lead batteries for utility energy storage: A review. J. Energy Storage 15, 145–157 (2018).10.1016/j.est.2017.11.008 ↗
7. G. Crabtree, E. Kócs, and L. Trahey: The energy‐storage frontier: Lithium‐ion batteries and beyond. MRS Bull. 40, 1067–1078 (2015).10.1557/mrs.2015.259 ↗
8. S. Zhang: Status, opportunities, and challenges of electrochemical energy storage. Front. Energy Res. 1, 8 (2013).10.3389/fenrg.2013.00008 ↗
9. G.E. Blomgren: The development and future of lithium ion batteries. J. Electrochem. Soc. 164, A5019–A5025 (2017).10.1149/2.0251701jes ↗
10. X. Judez, G. G. Eshetu, C. Li, L. M. Rodriguez‐Martinez, H. Zhang, and M. Armand: Opportunities for rechargeable solid‐state batteries based on Li‐intercalation cathodes. Joule 2, 2208–2224 (2018).10.1016/j.joule.2018.09.008 ↗
11. X. Yu and A. Manthiram: Electrode‐electrolyte interfaces in lithium‐based batteries. Energy Environ. Sci. 11, 527–543 (2018).10.1039/C7EE02555F ↗
12. M. Gauthier, T. J. Carney, A. Grimaud, L. Giordano, N. Pour, H.‐H. Chang, D. P. Fenning, S. F. Lux, O. Paschos, C. Bauer, F. Maglia, S. Lupart, P. Lamp, Y. Shao‐Horn : Electrode–electrolyte interface in Li‐ion batteries: Current understanding and new insights. J. Phys. Chem. Lett. 6, 4653–4672 (2015).10.1021/acs.jpclett.5b01727 ↗
13. S.M. George: Atomic layer deposition: An overview. Chem. Rev. 110, 111–131 (2010).10.1021/cr900056b ↗
14. X. Meng: An overview of molecular layer deposition for organic and organic‐inorganic hybrid materials: Mechanisms, growth characteristics, and promising applications. J. Mater. Chem. A 5, 18326–18378 (2017).10.1039/C7TA04449F ↗
15. X. Meng, X.Q. Yang, and X.L. Sun: Emerging applications of atomic layer deposition for lithium‐ion battery studies. Adv. Mater. 24, 3589–3615 (2012).10.1002/adma.201200397 ↗
16. C. Zhu, K. Han, D. Geng, H. Ye, and X. Meng: : Achieving high‐performance silicon anodes of lithium‐ion batteries via atomic and molecular layer deposited surface coatings: An overview. Electrochim. Acta 251, 710–728 (2017).10.1016/j.electacta.2017.09.036 ↗
17. X. Meng: Atomic layer deposition of solid‐state electrolytes for next‐generation lithium‐ion batteries and beyond: Opportunities and challenges. Energy Storage Mater. 30, 296–328 (2020).10.1016/j.ensm.2020.05.001 ↗
18. Q. Sun, K. C. Lau, D. Geng, and X. Meng : Atomic and molecular layer deposition for superior lithium‐sulfur batteries: Strategies, performance, and mechanisms. Batteries Supercaps 1, 41–68 (2018).10.1002/batt.201800024 ↗
19. H.‐S. Shin, G. W. Seo, K. Kwon, K.‐N. Jung, S. I. Lee, E. Choi, H. Kim, J.‐H. Hwang, and J.‐W. Lee: A combined approach for high‐performance Li–O2 batteries: A binder‐free carbon electrode and atomic layer deposition of RuO2 as an inhibitor–promoter. APL Mater. 6, 047702 (2018).10.1063/1.5009399 ↗
20. X. Meng: Atomic‐scale surface modifications and novel electrode designs for high‐performance sodium‐ion batteries via atomic layer deposition. J. Mater. Chem. A 5, 10127–10149 (2017).10.1039/C7TA02742G ↗
21. M. Armand and J.M. Tarascon: Building better batteries. Nature 451, 652–657 (2008).10.1038/451652a ↗
22. K. Xu: Nonaqueous liquid electrolytes for lithium‐based rechargeable batteries. Chem. Rev. 104, 4303–4418 (2004).10.1021/cr030203g ↗
23. K. Xu: Electrolytes and interphases in Li‐ion batteries and beyond. Chem. Rev. 114, 11503–11618 (2014).10.1021/cr500003w ↗
24. R.C. Agrawal and G.P. Pandey: Solid polymer electrolytes: Materials designing and all‐solid‐state battery applications: An overview. J. Phys. D Appl. Phys. 41, 223001 (2008).10.1088/0022-3727/41/22/223001 ↗
25. X. Chen and P.M. Vereecken: Solid and solid‐like composite electrolyte for lithium ion batteries: Engineering the ion conductivity at interfaces. Adv. Mater. Interfaces 6, 1800899 (2019).10.1002/admi.201800899 ↗
26. T. Famprikis, P. Canepa, J.A. Dawson, M. Saiful Islam, and C. Masquelier: Fundamentals of inorganic solid‐state electrolytes for batteries. Nat. Mater. 18, 1278–1291 (2019).10.1038/s41563-019-0431-3 ↗
27. Q. Zhao, S. Stalin, C.‐Z. Zhao, and L. A. Archer: : Designing solid‐state electrolytes for safe, energy‐dense batteries. Nat. Rev. Mater. 5, 229–252 (2020).10.1038/s41578-019-0165-5 ↗
28. N. Yabuuchi, K. Kubota, M. Dahbi, and S. Komaba: Research development on sodium‐ion batteries. Chem. Rev. 114, 11636–11682 (2014).10.1021/cr500192f ↗
29. W. Zhang, Y. Liu, and Z. Guo: Approaching high‐performance potassium‐ion batteries via advanced design strategies and engineering. Sci. Adv. 5, eaav7412 (2019).10.1126/sciadv.aav7412 ↗
30. A. Ponrouch, J. Bitenc, R. Dominko, N. Lindahl, P. Johansson, and M. R. Palacin: Multivalent rechargeable batteries. Energy Storage Mater. 20, 253–262 (2019).10.1016/j.ensm.2019.04.012 ↗
31. M. Winter: The solid electrolyte interphase – The most important and the least understood solid electrolyte in rechargeable Li batteries. Z. Phys. Chem. 223, 1395–1406 (2009).10.1524/zpch.2009.6086 ↗
32. Y. Xiao, Y. Wang, S.‐H. Bo, J. C. Kim, L. J. Miara, and G. Ceder: Understanding interface stability in solid‐state batteries. Nat. Rev. Mater. 5, 105–126 (2020).10.1038/s41578-019-0157-5 ↗
33. T. Suntola and J. Antson: Method for producing compound thin films. United States Patent 4,058,430, 1977.
34. T. Yoshimura, S. Tatsuura, and W. Sotoyama: Polymer films formed with monolayer growth steps by molecular layer deposition. Appl. Phys. Lett. 59, 482–484 (1991).10.1063/1.105415 ↗
35. M.D. Groner, F. H. Fabreguette, J. W. Elam, and S. M. George: Low‐temperature Al2O3 atomic layer deposition. Chem. Mater. 16, 639–645 (2004).10.1021/cm0304546 ↗
36. R.L. Puurunen: Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process. J. Appl. Phys. 97, 121301 (2005).10.1063/1.1940727 ↗
37. S.M. George, B. Yoon, and A.A. Dameron: Surface chemistry for molecular layer deposition of organic and hybrid organic−inorganic polymers. Acc. Chem. Res. 42, 498–508 (2009).10.1021/ar800105q ↗
38. J. Hämäläinen, M. Ritala, and M. Leskelä: Atomic layer deposition of noble metals and their oxides. Chem. Mater. 26, 786–801 (2014).10.1021/cm402221y ↗
39. H. Kim: Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing. J. Vac. Sci. Technol. B 21, 2231–2261 (2003).10.1116/1.1622676 ↗
40. V. Miikkulainen, M. Leskelä, M. Ritala, and R. L. Puurunen: Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends. J. Appl. Phys. 113, 021301 (2013).10.1063/1.4757907 ↗
41. N.P. Dasgupta, X. Meng, J. W. Elam, A. B. Martinson, : Atomic layer deposition of metal sulfide materials. Acc. Chem. Res. 48, 341–348 (2015).10.1021/ar500360d ↗
42. Z. Guo and X. Wang: Atomic layer deposition of the metal pyrites FeS2, CoS2, and NiS2. Angew. Chem. Int. Ed. 57, 5898–5902 (2018).10.1002/anie.201803092 ↗
43. J. Wang, Z. Guo, W. Xiong, and X. Wang: Synthesis of thin‐film metal pyrites by an atomic layer deposition approach. Chemistry 24, 18568–18574 (2018).10.1002/chem.201803327 ↗
44. M. Mäntymäki, M. Ritala, and M. Leskelä: Metal fluorides as lithium‐ion battery materials: An atomic layer deposition perspective. Coatings 8, 277 (2018).10.3390/coatings8080277 ↗
45. J. Cai, X. Han, X. Wang, and X. Meng: Atomic layer deposition of two‐dimensional layered materials: Processes, growth mechanisms, and characteristics. Matter 2, 587–630 (2020).10.1016/j.matt.2019.12.026 ↗
46. H. Zhou and S.F. Bent: Fabrication of organic interfacial layers by molecular layer deposition: Present status and future opportunities. J. Vac. Sci. Technol. A 31, 040801 (2013).10.1116/1.4804609 ↗
47. H.‐I. Shao, S. Umemoto, T. Kikutani, and N. Okui: Layer‐by‐layer polycondensation of nylon 66 by alternating vapour deposition polymerization. Polymer 38, 459–462 (1997).10.1016/S0032-3861(96)00504-6 ↗
48. Y. Du and S.M. George: Molecular layer deposition of nylon 66 films examined using in situ FTIR spectroscopy. J. Phys. Chem. C 111, 8509–8517 (2007).10.1021/jp067041n ↗
49. T. Yoshimura, S. Tatsuura, W. Sotoyama, A. Matsuura, and T. Hayano: Quantum wire and dot formation by chemical vapor deposition and molecular layer deposition of one‐dimensional conjugated polymer. Appl. Phys. Lett. 60, 268–270 (1992).10.1063/1.106681 ↗
50. T. Yoshimura, A. Oshima, D.‐I. Kim, and Y. Morita: Quantum dot formation in polymer wires by three‐molecule molecular layer deposition (MLD) and applications to electro‐optic/photovoltaic devices. ECS Trans. 25, 15–25 (2009).10.1149/1.3205039 ↗
51. T. Yoshimura, R. Ebihara, and A. Oshima: Polymer wires with quantum dots grown by molecular layer deposition of three source molecules for sensitized photovoltaics. J. Vac. Sci. Technol. A 29, 051510 (2011).10.1116/1.3620644 ↗
52. T. Yoshimura and S. Ishii: Effect of quantum dot length on the degree of electron localization in polymer wires grown by molecular layer deposition. J. Vac. Sci. Technol. A 31, 031501 (2013).10.1116/1.4793478 ↗
53. A. Kim, M. A. Filler, S. Kim, and S. F. Bent: Layer‐by‐layer growth on Ge(100) via spontaneous urea coupling reactions. J. Am. Chem. Soc. 127, 6123–6132 (2005).10.1021/ja042751x ↗
54. P.W. Loscutoff, H. Zhou, S. B. Clendenning, and S. F. Bent: Formation of organic nanoscale laminates and blends by molecular layer deposition. ACS Nano 4, 331–341 (2010).10.1021/nn901013r ↗
55. H. Zhou and S.F. Bent: Molecular layer deposition of functional thin films for advanced lithographic patterning. ACS Appl. Mater. Interfaces 3, 505–511 (2011).10.1021/am1010805 ↗
56. H. Zhou, M.F. Toney, and S.F. Bent: Cross‐linked ultrathin polyurea films via molecular layer deposition. Macromolecules 46, 5638–5643 (2013).10.1021/ma400998m ↗
57. Y.‐S. Park, S.‐E. Choi, H. Kim, and J. S. Lee: Fine‐tunable absorption of uniformly aligned polyurea thin films for optical filters using sequentially self‐limited molecular layer deposition. ACS Appl. Mater. Interfaces 8, 11788–11795 (2016).10.1021/acsami.6b02142 ↗
58. N.M. Adamczyk, A.A. Dameron, and S.M. George: Molecular layer deposition of poly(p‐phenylene terephthalamide) films using terephthaloyl chloride and p‐phenylenediamine. Langmuir 24, 2081–2089 (2008).10.1021/la7025279 ↗
59. Q. Peng, K. Efimenko, J. Genzer, and G. N. Parsons: Oligomer orientation in vapor‐molecular‐layer‐deposited alkyl‐aromatic polyamide films. Langmuir 28, 10464–10470 (2012).10.1021/la3017936 ↗
60. S.E. Atanasov, M. D. Losego, B. Gong, E. Sachet, J.‐P. Maria, P. S. Williams, and G. N. Parsons: Highly conductive and conformal poly(3,4‐ethylenedioxythiophene) (PEDOT) thin films via oxidative molecular layer deposition. Chem. Mater. 26, 3471–3478 (2014).10.1021/cm500825b ↗
61. D.H. Kim, S. E. Atanasov, P. Lemaire, K. Lee, and G.N. Parsons: Platinum‐free cathode for dye‐sensitized solar cells using poly(3,4‐ethylenedioxythiophene) (PEDOT) formed via oxidative molecular layer deposition. ACS Appl. Mater. Interfaces 7, 3866–3870 (2015).10.1021/am5084418 ↗
62. T. Miyamae, K. Tsukagoshi, O. Matsuoka, S. Yamamoto, and H. Nozoye: Preparation of polyimide‐polyamide random copolymer thin film by sequential vapor deposition polymerization. Jpn. J. Appl. Phys. 41, 746 (2002).10.1143/JJAP.41.746 ↗
63. P.W. Loscutoff, H.‐B.‐R. Lee, and S.F. Bent: Deposition of ultrathin polythiourea films by molecular layer deposition. Chem. Mater. 22, 5563–5569 (2010).10.1021/cm1016239 ↗
64. T.V. Ivanova, P.S. Maydannik, and D.C. Cameron: Molecular layer deposition of polyethylene terephthalate thin films. J. Vac. Sci. Technol. A 30, 01A121 (2012).10.1116/1.3662846 ↗
65. A.A. Dameron, D. Seghete, B.B. Burton, S.D. Davidson, A.S. Cavanagh, J.A. Bertrand, and S.M. George: Molecular layer deposition of alucone polymer films using trimethylaluminum and ethylene glycol. Chem. Mater. 20, 3315–3326 (2008).10.1021/cm7032977 ↗
66. B.H. Lee, V.R. Anderson, and S.M. George: Molecular layer deposition of zircone and ZrO2/zircone alloy films: Growth and properties. Chem. Vapor Deposition 19, 204–212 (2013).10.1002/cvde.201207045 ↗
67. R.A. Hall, S.M. George, Y. Kim, W. Hwang, M.E. Samberg, N.A. Monteiro‐Riviere, and R.J. Narayan: Growth of zircone on nanoporous alumina using molecular layer deposition. JOM 66, 649–653 (2014).10.1007/s11837-014-0933-z ↗
68. L.D. Salmi, M.J. Heikkilä, E. Puukilainen, T. Sajavaara, D. Grosso, and M. Ritala: Studies on atomic layer deposition of MOF‐5 thin films. Microporous Mesoporous Mater. 182, 147–154 (2013).10.1016/j.micromeso.2013.08.024 ↗
69. J.E. Crowell: Chemical methods of thin film deposition: Chemical vapor deposition, atomic layer deposition, and related technologies. J. Vac. Sci. Technol. A 21, S88–S95 (2003).10.1116/1.1600451 ↗
70. S.O. Kucheyev, J. Biener, Y.M. Wang, T.F. Baumann, K.J. Wu, T.v. Buuren, A.V. Hamza, J.H. Satcher Jr., J.W. Elam, and M.J. Pellin: Atomic layer deposition of ZnO on ultralow‐density nanoporous silica aerogel monoliths. Appl. Phys. Lett. 86, 083108 (2005).10.1063/1.1870122 ↗
71. M. Putkonen and L. Niinistö: Atomic layer deposition of B2O3 thin films at room temperature. Thin Solid Films 514, 145–149 (2006).10.1016/j.tsf.2006.03.001 ↗
72. J. Cai, Z. Ma, U. Wejinya, M. Zou, Y. Liu, H. Zhou, and X. Meng: A revisit to atomic layer deposition of zinc oxide using diethylzinc and water as precursors. J. Mater. Sci. 54, 5236–5248 (2019).10.1007/s10853-018-03260-3 ↗
73. R. Mikko and L. Markku: Atomic layer epitaxy – A valuable tool for nanotechnology? Nanotechnology 10, 19 (1999).10.1088/0957-4484/10/1/005 ↗
74. M. Knez, K. Nielsch, and L. Niinistö: Synthesis and surface engineering of complex nanostructures by atomic layer deposition. Adv. Mater. 19, 3425–3438 (2007).10.1002/adma.200700079 ↗
75. X. Meng and J.W. Elam: Atomic layer deposition of nanophase materials for electrical energy storage. ECS Trans. 69, 39–57 (2015).10.1149/06907.0039ecst ↗
76. J.C. Badot, S. Ribes, E.B. Yousfi, V. Vivier, J.P. Pereira‐Ramos, N. Baffier, and D. Lincot: Atomic layer epitaxy of vanadium oxide thin films and electrochemical behavior in presence of lithium ions. Electrochem. Solid State Lett. 3, 485–488 (2000).10.1149/1.1391187 ↗
77. M.Q. Snyder, S.A. Trebukhova, B. Ravdel, M.C. Wheeler, J. DiCarlo, C.P. Tripp, and W.J. DeSisto: Synthesis and characterization of atomic layer deposited titanium nitride thin films on lithium titanate spinel powder as a lithium‐ion battery anode. J. Power Sources 165, 379–385 (2007).10.1016/j.jpowsour.2006.12.015 ↗
78. S.W. Kim, T.H. Han, J. Kim, H. Gwon, H.S. Moon, S.W. Kang, S.O. Kim, and K. Kang: Fabrication and electrochemical characterization of TiO2 three‐dimensional nanonetwork based on peptide assembly. ACS Nano 3, 1085–1090 (2009).10.1021/nn900062q ↗
79. X. Meng, M.N. Banis, D. Geng, X. Li, Y. Zhang, R. Li, H. Abou‐Rachid, and X. Sun: Controllable atomic layer deposition of one‐dimensional nanotubular TiO2. Appl. Surface Sci. 266, 132–140 (2013).10.1016/j.apsusc.2012.11.116 ↗
80. X. Meng, D. Geng, J. Liu, R. Li, and X. Sun: Controllable synthesis of graphene‐based titanium dioxide nanocomposites by atomic layer deposition. Nanotechnology 22, 165602 (2011).10.1088/0957-4484/22/16/165602 ↗
81. X. Meng, Y. Zhang, S. Sun, R. Li, and X. Sun: Three growth modes and mechanisms for highly structure‐tunable SnO2 nanotube arrays of template‐directed atomic layer deposition. J. Mater. Chem. 21, 12321–12330 (2011).10.1039/c1jm11511a ↗
82. X. Meng, Y. Zhong, Y. Sun, M.N. Banis, R. Li, and X. Sun: Nitrogen‐doped carbon nanotubes coated by atomic layer deposited SnO2 with controlled morphology and phase. Carbon 49, 1133–1144 (2011).10.1016/j.carbon.2010.11.028 ↗
83. X. Li, X. Meng, J. Liu, D. Geng, Y. Zhang, M.N. Banis, Y. Li, J. Yang, R. Li, X. Sun, M. Cai, and M.W. Verbrugge: Tin oxide with controlled morphology and crystallinity by atomic layer deposition onto graphene nanosheets for enhanced lithium storage. Adv. Funct. Mater. 22, 1647–1654 (2012).10.1002/adfm.201101068 ↗
84. X. Meng, D. Geng, J. Liu, M.N. Banis, Y. Zhang, R. Li, and X. Sun: Non‐aqueous approach to synthesize amorphous/crystalline metal oxide‐graphene nanosheet hybrid composites. J. Phys. Chem. C 114, 18330–18337 (2010).10.1021/jp105852h ↗
85. X. Meng, J. Liu, X. Li, M.N. Banis, J. Yang, R. Li, and X. Sun: Atomic layer deposited Li4Ti5O12 on nitrogen‐doped carbon nanotubes. RSC Adv. 3, 7285–7288 (2013).10.1039/c3ra00033h ↗
86. S.C. Riha, A.A. Koegel, X. Meng, I.S. Kim, Y. Cao, M.J. Pellin, J.W. Elem, and A.B.F. Martinson: Atomic layer deposition of MnS: Phase control and electrochemical applications. ACS Appl. Mater. interfaces 8, 2774–2780 (2016).10.1021/acsami.5b11075 ↗
87. X. Meng, K. He, D. Su, X. Zhang, C.J. Sun, Y. Ren, H.H. Wang, W. Weng, L. Trahey, C.P. Canlas, and J.W. Elam: Gallium sulfide‐single‐walled carbon nanotube composites: High‐performance anodes for lithium‐ion batteries. Adv. Funct. Mater. 24, 5435–5442 (2014).10.1002/adfm.201401002 ↗
88. X. Meng, J.A. Libera, T.T. Fister, H. Zhou, J.K. Hedlund, P. Fenter, and J.W. Elam: Atomic layer deposition of gallium sulfide films using hexakis(dimethylamido)digallium and hydrogen sulfide. Chem. Mater. 26, 1029–1039 (2014).10.1021/cm4031057 ↗
89. X. Meng, Y. Cao, J.A. Libera, and J.W. Elam: Atomic layer deposition of aluminum sulfide: Growth mechanism and electrochemical evaluation in lithium‐ion batteries. Chem. Mater. 29, 9043–9052 (2017).10.1021/acs.chemmater.7b02175 ↗
90. X. Chen, H. Zhu, Y.‐C. Chen, Y. Shang, A. Cao, L. Hu, and G.W. Rubloff: MWCNT/V2O5 core/shell sponge for high areal capacity and power density Li‐ion cathodes. ACS Nano 6, 7948–7955 (2012).10.1021/nn302417x ↗
91. J. Liu, M.N. Banis, Q. Sun, A. Lushington, R. Lu, T.‐K. Sham, and X. Sun: Rational design of atomic‐layer‐deposited LiFePO4 as a high‐performance cathode for lithium‐ion batteries. Adv. Mater. 26, 6472–6477 (2014).10.1002/adma.201401805 ↗
92. J. Liu, B. Xiao, M.N. Banis, R. Li, T.‐K. Sham, and X. Sun: Atomic layer deposition of amorphous iron phosphates on carbon nanotubes as cathode materials for lithium‐ion batteries. Electrochim. Acta 162, 275–281 (2015).10.1016/j.electacta.2014.12.158 ↗
93. X. Meng, S.C. Riha, J.A. Libera, Q. Wu, H.‐H. Wang, A.B.F. Martinson, and J.W. Elam: Tunable core‐shell single‐walled carbon nanotube‐Cu2S networked nanocomposites as high‐performance cathodes for lithium‐ion batteries. J. Power Sources 280, 621–629 (2015).10.1016/j.jpowsour.2015.01.151 ↗
94. M. Putkonen, T. Aaltonen, M. Alnes, T. Sajavaara, O. Nilsen, and H. Fjellvag: Atomic layer deposition of lithium containing thin films. J. Mater. Chem. 19, 8767–8771 (2009).10.1039/b913466b ↗
95. C. Liu, E.I. Gillette, X. Chen, A.J. Pearse, A.C. Kozen, M.A. Schroeder, K.E. Gregorczyk, S.B. Lee, and G.W. Rubloff: An all‐in‐one nanopore battery array. Nat Nano 9, 1031–1039 (2014).10.1038/nnano.2014.247 ↗
96. A. Pearse, T. Schmitt, E. Sahadeo, D.M. Stewart, A. Kozen, K. Gerasopoulos, A.A. Talin, S.B. Lee, G.W. Rubloff, and K.E. Gregorczyk: Three‐dimensional solid‐state lithium‐ion batteries fabricated by conformal vapor‐phase chemistry. ACS Nano 12, 4286–4294 (2018).10.1021/acsnano.7b08751 ↗
97. Y.S. Jung, A.S. Cavanagh, A.C. Dillon, M.D. Groner, S.M. George, and S.H. Lee: Enhanced stability of LiCoO2 cathodes in lithium‐ion batteries using surface modification by atomic layer deposition. J. Electrochem. Soc. 157, A75–A81 (2010).10.1149/1.3258274 ↗
98. Y.S. Jung, A.S. Cavanagh, L.A. Riley, S.H. Kang, A.C. Dillon, M.D. Groner, S.M. George, and S.H. Lee: Ultrathin direct atomic layer deposition on composite electrodes for highly durable and safe Li‐ion batteries. Adv. Mater. 22, 2172–2176 (2010).10.1002/adma.200903951 ↗
99. X. Li, J. Liu, X. Meng, Y. Tang, M.N. Banis, J. Yang, Y. Hu, R. Li, M. Cai, and X. Sun: Significant impact on cathode performance of lithium‐ion batteries by precisely controlled metal oxide nanocoatings via atomic layer deposition. J. Power Sources 247, 57–69 (2014).10.1016/j.jpowsour.2013.08.042 ↗
100. Y. Liu, X. Wang, J. Cai, X. Han, D. Geng, J. Li, and X. Meng: Atomic‐scale tuned interface of nickel‐rich cathode for enhanced electrochemical performance in lithium‐ion batteries. J. Mater. Sci. Technol. 54, 77–86 (2020).10.1016/j.jmst.2020.02.080 ↗