journal article·1991-06

New evidence for a pressure-induced phase transformation during the indentation of silicon

G.M. Pharr, W.C. Oliver, D.S. Harding

Journal of Materials Research· Volume 6· Issue 6
Publisher page

Abstract

Scanning electron micrographs of indents in (111) silicon reveal that a thin layer of material immediately adjacent to the indenter is plastically extruded. The fact that the material can be deformed in this way indicates that it has metallic-like mechanical properties. This is presented as new evidence that a pressure-induced phase transformation to the metallic state occurs during the indentation of silicon.
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Research context

OpenAlex topics: Advanced Surface Polishing Techniques · Force Microscopy Techniques and Applications · Metal and Thin Film Mechanics

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References (8)

Show source-provided references
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